DK3443361T3 - Lavenergi-accelerometer - Google Patents

Lavenergi-accelerometer Download PDF

Info

Publication number
DK3443361T3
DK3443361T3 DK17720548.1T DK17720548T DK3443361T3 DK 3443361 T3 DK3443361 T3 DK 3443361T3 DK 17720548 T DK17720548 T DK 17720548T DK 3443361 T3 DK3443361 T3 DK 3443361T3
Authority
DK
Denmark
Prior art keywords
accelerometer
energy
low
energy accelerometer
Prior art date
Application number
DK17720548.1T
Other languages
English (en)
Inventor
Nicolas Pierre Delorme
Daniel Saias
Original Assignee
Nicolas Pierre Delorme
Daniel Saias
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nicolas Pierre Delorme, Daniel Saias filed Critical Nicolas Pierre Delorme
Application granted granted Critical
Publication of DK3443361T3 publication Critical patent/DK3443361T3/da

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0837—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0851—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of spring-mass systems, each system having a different range of sensitivity to acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
DK17720548.1T 2016-04-12 2017-04-05 Lavenergi-accelerometer DK3443361T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1653228A FR3050032B1 (fr) 2016-04-12 2016-04-12 Accelerometre basse consommation
PCT/FR2017/050803 WO2017178732A1 (fr) 2016-04-12 2017-04-05 Accéléromètre basse consommation

Publications (1)

Publication Number Publication Date
DK3443361T3 true DK3443361T3 (da) 2020-03-30

Family

ID=56373017

Family Applications (1)

Application Number Title Priority Date Filing Date
DK17720548.1T DK3443361T3 (da) 2016-04-12 2017-04-05 Lavenergi-accelerometer

Country Status (7)

Country Link
US (2) US10725067B2 (da)
EP (1) EP3443361B1 (da)
CN (1) CN109154627B (da)
DK (1) DK3443361T3 (da)
ES (1) ES2779991T3 (da)
FR (1) FR3050032B1 (da)
WO (1) WO2017178732A1 (da)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2644606A1 (de) * 1976-10-02 1978-04-06 Daimler Benz Ag Magnetisch betaetigter elektrischer schalter
DE4447487A1 (de) * 1994-03-30 1995-10-19 Siemens Ag Mikromechanische Sensoreinheit zum Erkennen von Beschleunigungen
JP3728876B2 (ja) * 1996-07-31 2005-12-21 株式会社デンソー 衝突検知装置及びその設定方法
US5705767A (en) * 1997-01-30 1998-01-06 The United States Of America As Represented By The Secretary Of The Army Miniature, planar, inertially-damped, inertially-actuated delay slider actuator
DE19817357B4 (de) * 1998-04-18 2008-10-30 Robert Bosch Gmbh Mikromechanisches Bauelement
JP2005017049A (ja) * 2003-06-25 2005-01-20 Alps Electric Co Ltd 加速度センサ
DE10357870B4 (de) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor mit symmetrischer Begrenzung eines Signals
CN101752141A (zh) * 2009-12-21 2010-06-23 西安电子科技大学 一种屈曲式加速度开关
CN202564127U (zh) * 2012-04-13 2012-11-28 山东大学 一种光电式振动开关
DE102012207939A1 (de) * 2012-05-11 2013-11-14 Robert Bosch Gmbh Federnder Anschlag für Beschleunigungssensor
EP3029469A1 (en) * 2014-12-04 2016-06-08 ETH Zurich Mechanical transducer for the detection of acoustic and/or seismic signals
US10732199B2 (en) * 2017-12-20 2020-08-04 Apple Inc. Multi-stage MEMS accelerometer for mixed g-level operation

Also Published As

Publication number Publication date
CN109154627B (zh) 2020-10-30
WO2017178732A1 (fr) 2017-10-19
EP3443361B1 (fr) 2020-01-01
US11002756B2 (en) 2021-05-11
FR3050032A1 (fr) 2017-10-13
ES2779991T3 (es) 2020-08-21
US20190128918A1 (en) 2019-05-02
EP3443361A1 (fr) 2019-02-20
US20200355723A1 (en) 2020-11-12
FR3050032B1 (fr) 2018-04-20
US10725067B2 (en) 2020-07-28
CN109154627A (zh) 2019-01-04

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