DK2227705T3 - Fremgangsmåde og apparat til tilvejebringelse af billeddata - Google Patents

Fremgangsmåde og apparat til tilvejebringelse af billeddata

Info

Publication number
DK2227705T3
DK2227705T3 DK08862445.7T DK08862445T DK2227705T3 DK 2227705 T3 DK2227705 T3 DK 2227705T3 DK 08862445 T DK08862445 T DK 08862445T DK 2227705 T3 DK2227705 T3 DK 2227705T3
Authority
DK
Denmark
Prior art keywords
image data
target object
providing image
radiation
providing
Prior art date
Application number
DK08862445.7T
Other languages
English (en)
Inventor
Andrew Maiden
Original Assignee
Phase Focus Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phase Focus Ltd filed Critical Phase Focus Ltd
Application granted granted Critical
Publication of DK2227705T3 publication Critical patent/DK2227705T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/205—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials using diffraction cameras
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914—Measurement of spatial distribution of radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/645—Specific applications or type of materials quality control
DK08862445.7T 2007-12-17 2008-12-04 Fremgangsmåde og apparat til tilvejebringelse af billeddata DK2227705T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0724448.6A GB0724448D0 (en) 2007-12-17 2007-12-17 Method and apparatus for providing image data
PCT/GB2008/051154 WO2009077779A2 (en) 2007-12-17 2008-12-04 Method and apparatus for providing image data

Publications (1)

Publication Number Publication Date
DK2227705T3 true DK2227705T3 (da) 2012-07-23

Family

ID=39048134

Family Applications (1)

Application Number Title Priority Date Filing Date
DK08862445.7T DK2227705T3 (da) 2007-12-17 2008-12-04 Fremgangsmåde og apparat til tilvejebringelse af billeddata

Country Status (7)

Country Link
US (1) US8917393B2 (da)
EP (1) EP2227705B1 (da)
AT (1) ATE554378T1 (da)
DK (1) DK2227705T3 (da)
ES (1) ES2386091T3 (da)
GB (1) GB0724448D0 (da)
WO (1) WO2009077779A2 (da)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2481589B (en) * 2010-06-28 2014-06-11 Phase Focus Ltd Calibration of a probe in ptychography
KR101960403B1 (ko) 2014-08-28 2019-03-20 에이에스엠엘 네델란즈 비.브이. 검사 장치, 검사 방법 및 제조 방법
KR102098034B1 (ko) 2015-08-12 2020-04-08 에이에스엠엘 네델란즈 비.브이. 검사 장치, 검사 방법 및 제조 방법
WO2017157645A1 (en) 2016-03-15 2017-09-21 Stichting Vu Inspection method, inspection apparatus and illumination method and apparatus
US10289891B2 (en) * 2016-03-31 2019-05-14 Synaptics Incorpated Optical biometric sensor having diffractive optical elements
CN112539823B (zh) * 2020-12-11 2022-05-31 中国科学院上海光学精密机械研究所 一种超快时间复振幅测量装置和方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3689772A (en) * 1971-08-18 1972-09-05 Litton Systems Inc Photodetector light pattern detector
US5341213A (en) * 1992-07-21 1994-08-23 Avco Corporation Alignment of radiation receptor with lens by Fourier optics
US5523846A (en) * 1994-11-21 1996-06-04 New Creation Co., Ltd. Apparatus for detecting marks formed on a sample surface
US6630996B2 (en) * 2000-11-15 2003-10-07 Real Time Metrology, Inc. Optical method and apparatus for inspecting large area planar objects
GB0409572D0 (en) * 2004-04-29 2004-06-02 Univ Sheffield High resolution imaging
GB0709796D0 (en) * 2007-05-22 2007-06-27 Phase Focus Ltd Three dimensional imaging

Also Published As

Publication number Publication date
US8917393B2 (en) 2014-12-23
EP2227705B1 (en) 2012-04-18
WO2009077779A2 (en) 2009-06-25
WO2009077779A3 (en) 2009-10-29
US20110001970A1 (en) 2011-01-06
ATE554378T1 (de) 2012-05-15
GB0724448D0 (en) 2008-01-30
ES2386091T3 (es) 2012-08-08
EP2227705A2 (en) 2010-09-15

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