DK181086B1

DK181086B1 - Electromagnetic radiation frequency converter and light source comprising same

Info

Publication number: DK181086B1
Application number: DKPA202170186A
Authority: DK
Inventors: Tønning Peter; Z Ulzig Emil; J Stanton Eric; Volet Nicolas; Johansen Peter
Original assignee: Uvl As
Priority date: 2021-04-23
Filing date: 2021-04-23
Publication date: 2022-12-07
Also published as: CN117882003A; EP4327159A1; WO2022223797A1; DK202170186A1; CN115236913A

Abstract

This invention relates to an electromagnetic radiation frequency, or equivalent wavelength, converter (17), the converter (17) comprising a nonlinear optical component or part (1) comprising or consisting of a predetermined nonlinear optical material, and a guiding module (2, 3, 4, 5), the guiding module (2, 3, 4, 5) having a predetermined geometry defining or controlling an effective refractive index of the guiding module (2, 3, 4, 5), and configured to receive and guide pump light (11) resulting in a guided pump beam (11), wherein the nonlinear component or part (1) is bonded with or joined to the guiding module (2, 3, 4, 5), where the bonding is configured to allow at least a part of the guided pump beam (11) to overlap and/or evanescently couple into the nonlinear optical material, and the nonlinear optical component or part (1) is configured to nonlinearly convert the guided pump beam (11) in the nonlinear optical material to an un‐guided signal mode radiated as an output light signal (12) at a different frequency or an equivalent wavelength.

Description

DK 181086 B1 1

AN ELECTROMAGNETIC RADIATION FREQUENCY CONVERTER AND LIGHT SOURCE COMPRISING THE SAME

FIELD OF THE INVENTION The invention is related to the coherent generation of light through nonlinear optical processes. This enables conversion of laser light to other frequencies enabling generation of compact coherent light sources at a wavelength not widely available with existing laser diodes. BACKGROUND: With the ongoing Covid-19 pandemic the urgent need for sterilization methods has become clearer than ever. Light in the ultraviolet C-band (UVC) has proven effective for sterilizing the air, liquids, and surfaces. Further, in recent years it has been established that light in at 207 and 222 nm is heavily absorbed in the outer layers of the skin and eye, and hence is potentially not harmful to mammals, including humans. This positions light in this spectral region in a position where it can be used for germicidal purposes with humans and animals present. However, only a sparse selection of light-sources within this spectral range exists, and to this point there is not a widely available and compact light sources, i.e., LEDs or lasers diodes in the far-UV. Document JP H09197454A seeks to provide an optical device having durability against UV rays which is not physically damaged even when high-power YAG laser light enters and from which second harmonic waves of high output can be obtained. The disclosed waveguide-type nonlinear optical device generates second harmonic waves of laser light by using a nonlinear optical crystal. The nonlinear optical crystal of the device is LBO, and the optical waveguide of the device is formed on the surface of the LBO substrate. The refractive index of the optical waveguide is higher than the refractive index of LBO. When laser light is made to enter the end face of the LBO substrate and to pass through the optical waveguide, the light can be enclosed in the optical waveguide and second harmonic waves are generated with high efficiency since the refractive index of the waveguide is higher than that of LBO. The document states that since LBO hardly deteriorates with UV rays, the durability of the device can be improved.

OBJECTIVE OF THE INVENTION An object of the invention is to provide devices and methods for converting the frequency, or equivalently the wavelength, of lasers to enable emission outside of the laser emission band. The frequency conversion is enabled in a compact manner, and with large conversion efficiency in particular enabled through a product design involving various fabrication methods within the field of integrated photonics. SUMMARY OF THE INVENTION: One or more of the above-mentioned objects are obtained, at least to an extent, according to a first aspect by an

DK 181086 B1 2 electromagnetic radiation frequency, or equivalent wavelength, converter, the converter comprising — a nonlinear optical component or part comprising or consisting of a predetermined nonlinear optical material, and — a guiding module, the guiding module o having a predetermined geometry defining or controlling an effective refractive index of the guiding module, and o configured to receive and guide pump light resulting in a guided pump beam, wherein — the nonlinear component or part is bonded with or joined to the guiding module, where the bonding is configured to allow at least a part of the guided pump beam to overlap and/or evanescently couple into the nonlinear optical material, and — the nonlinear optical component or part is configured to nonlinearly convert the guided pump beam in the nonlinear optical material to an un-guided signal mode radiated as an output light signal at a different frequency or an equivalent wavelength.

Controlling the effective refractive index of the waveguide in the guiding module with respect to the refractive index of the signal light (output light signal) in the nonlinear optical component enables Cherenkov phase-matching at a corresponding/predetermined angle in relation to light received in the guiding module.

In some embodiments, the guiding module comprises at least one waveguide and the nonlinear component or part is surface bonded with or joined to the at least one waveguide of the guiding module (thereby ‘sandwiching’ the waveguide in-between the nonlinear component or part and the rest of the guiding module). In some embodiments, the guiding module comprises — a substrate material, being different from the predetermined non-linear optical material, wherein the at least one waveguide is arranged or deposited on a first side (i.e. the ‘top’) of the substrate material, or — a substrate material, being different from the predetermined non-linear optical material, and a buffer layer (i.e. at least one buffer layer) arranged or deposited on a first side (i.e. the ‘top’) of the substrate material and wherein the at least one waveguide is arranged or deposited on a first side (i.e. the ‘top’) of the (‘topmost if two or more buffer layers) buffer layer.

DK 181086 B1 3 In some embodiments, the nonlinear optical component or part and/or the guiding module comprises embedded electrodes and is configured to respectively change the effective refractive index of the nonlinear optical component or part and/or the guiding module in response to a respective change in applied electric field to the embedded electrodes (i.e. via electro-optic effects). In some embodiments, the converter comprises one or more planar optical structures configured to re-route and/or modulate light received or to be received by the guiding module thereby controlling the output light signal.

In some embodiments, the predetermined nonlinear optical material is one selected from — the group consisting of: — barium borate (BBO), — cesium lithium borate (CLBO), — lithium borate (LBO), — potassium dideuterium phosphate (KDP), — potassium dideuterium phosphate (DKDP), — ammonium dihydrogen phosphate (ADP), yttrium calcium oxoborate (YCOB), and — potassium fluoroboratoberyllate (KBBF). In some embodiments, — the converter comprises an optic coupler configured to receive light and provide it to the guiding module (for embodiments comprising at waveguide, the optical coupler is configured to receive light and provide it to the waveguide), and/or — the guiding module is a guiding photonic integrated circuit.

One or more of the above-mentioned objects are obtained, at least to an extent, according to a second aspect by a light source device, the light source device comprising — atleast one pump laser light source configured to emit light at a first predetermined wavelength, and — an electromagnetic radiation frequency converter according the first aspect, wherein the guiding module of the frequency converter is configured to receive and guide at least a part of the emitted light from the at least one pump laser light source and the output light signal has a second predetermined wavelength different from the first predetermined wavelength.

One or more of the above-mentioned objects are obtained, at least to an extent, according to a third aspect by a germicidal or decontamination device, the germicidal or decontamination device comprising

DK 181086 B1 4 — at least one light source device according to the second aspect, wherein at least one pump laser light source is configured to emit light configured to emit visible blue light and the output light signal is UVC or far-UVC light, e.g. or preferably having a wavelength of about 200 to about 230 nm, e.g. at or about 222 nm.

One or more of the above-mentioned objects are obtained, at least to an extent, according to a third aspect by a method of electromagnetic radiation frequency, or equivalent wavelength, conversion comprising — receiving and guiding pump light, by a guiding module having a predetermined geometry defining or controlling an effective refractive index of the guiding module, resulting in a guided pump beam, — allowing, by a bonding between a nonlinear component or part, comprising or consisting of a predetermined nonlinear optical material, and the guiding module, at least a part of the guided pump beam to overlap and/or evanescently couple into the nonlinear optical material, and — nonlinearly converting the guided pump beam in the nonlinear optical material to an un-guided signal mode radiated as an output light signal at a different frequency or an equivalent wavelength.

Further details and embodiments for and of each aspect are disclosed elsewhere herein. In at least some embodiments, the device(s) comprises a pump laser system, an optical coupler, a guiding photonic integrated circuit, and a bonded nonlinear material. The pump laser comprises of one or more laser diodes, each generating one or more light beams. The optical coupler allows passing of the light beams from the pump laser system to the guiding module (e.g. or preferably in the form of a photonic integrated circuit (PIC)). In the guiding module, light is guided in one or more waveguide structures. The guiding module is bonded to a nonlinear material allowing the light fields to overlap into the nonlinear material, so-called evanescent coupling. Through the nonlinear optical phenomenon of Cherenkov radiation, a coherent output of light, the signal beam, is formed. For second order nonlinear processes the signal beam will have the double, half, or summed frequency of the pump beam or beams, while higher order interactions enable even more elaborate frequency conversions. The nonlinear interaction is maximized for a specific relation between the optical material parameters, tunable through the design of the optical waveguides in the guiding module. The converted light radiates into the nonlinear material at an angle that depends on the effective refractive index of the pump beam and the refractive index of the converted light in the nonlinear material. The combined device comprising a guiding module and the nonlinear material will be referred to as the “frequency converter”, while the inclusion of a pump laser source makes a complete light source. To summarize, bonding nonlinear materials to PICs as disclosed herein readily enables an application of the nonlinear process known as Cherenkov nonlinear

DK 181086 B1 generation, allowing for compact devices that convert laser light to wavelengths otherwise hard or impossible to obtain with existing laser technologies and in particular also in an economically viable way needed for mass production.

According to some embodiments of the light source, multiple lasers are combined before 5 frequency conversion takes place. This combination of pump lasers can occur either in fiber, in a separate input coupler module or on the guiding module through planar optical circuitry. Combining multiple laser sources has two functions. First it allows for increased overall input power of the pump beam(s) improving both conversion efficiency and total output power at signal frequency(s). Second, the presence of multiple laser sources allows for sum-frequency generation (SFG) or difference-frequency generation (DFG) in the case where different pump frequencies are applied. This situation allows further extending the spectral range achievable for the signal frequency.

According to some embodiments of the light source, a single pump laser is split into multiple beams before frequency conversion takes place. This splitting of pump laser sources can occur for instance in fibers, with free-space optics, in a separate input coupler module or in the guiding module through planar optical circuitry. Splitting a single pump laser into multiple converter paths allows distributing the signal light to a larger area. In addition, in the case where the pump is depleted during the conversion process, it allows for shorter frequency converter sections.

According to some embodiments of the light source, an optical input coupler is added. This component could be made from a photonic integrated circuit allowing for spot-size conversion as well as splitting/combining the pump laser/lasers before coupling to the guiding module. Suitable PIC platforms should exhibit low loss guiding of visible light signals. Examples of suited platforms for guiding visible light needed for UVC generation — are silicon nitride (Si3N4), tantala (Ta205), aluminum nitride (AIN) and alumina (Al2O3). According to some embodiments of the light source, the pump laser diode is coupled directly to the frequency converter. This allows for a very compact device suitable for large-scale production. With the correct spacing, an entire array of lasers can be coupled to a corresponding array of frequency converting waveguides in the guiding module. This allows for either a single light source with very high power or for mass production of multiple light sources through dicing into separate bodies of lasers with converter modules.

According to some embodiments of the light source, the pump laser is coupled to the frequency converter using an optical fiber or an optical fiber-array. For proper coupling, the optical fibers could be tapered/lensed or have a small mode-field diameter. On the guiding module the waveguides can be designed to match the mode-profile of a given fiber-optic delivery system.

According to some embodiments of the frequency converter, the nonlinear material is periodically poled. Certain nonlinear materials allow for the periodic reversal of the domain

DK 181086 B1 6 orientation in the material, thereby changing the sign of the nonlinear coefficient. By periodically poling the nonlinear material the phase matching criterion is altered leading to a change in radiation angle and amplitude of the signal.

According to some embodiments of the frequency converter, the guiding module contains planar optical elements. Due to the foundation on standard optical integration platforms the guiding module could contain functionality beyond simple waveguides. Example structures and their function are listed in the following; however, this list only serves as indication of the potential and other structures could provide functionality to the surface bonded frequency converter presented herein. Multimode interference couplers could — enable splitting and combining the pump light. Resonant structures such as ring resonators could enable spectral filtering of the pump beam or external stabilization of the pump laser. Tunable couplers and wavelength combiners could enable selective combination of different pump beams allowing for a configurable frequency converted output signal.

According to some embodiments of the light source, the converted output signal is collimated using external optics. This will allow for high control of the spatial propagation of the light allowing for routing and/or manipulation of the light on its way to the intended application. Manipulations of the signal beam could be but are not limited to, intensity modulation and attenuation, splitting into several beams or focusing of the beam.

According to some embodiments of the light source, the converted output signal is collimated and/or focused into an optical fiber. This optical fiber will, given proper material choice according to the signal wavelength, allow convenient and robust routing and manipulation of the generated laser-light.

According to some embodiments of the light source, the converted output signal is scattered on a reflective- or in a refractive -optical element. This would enable the light source to irradiate a bigger surface area for a given distance. Doing so would greatly increase the applicability of for instance UVC sources in germicidal use. An example of such light distributing mechanism could be a convex metallic geometry, which, if placed correctly, could go into a combined but compact housing enclosing the entire laser, frequency converter and scattering body.

According to some embodiments of the light source, the frequency converter module has electrodes embedded in the PIC and/or on the BBO. Through electrooptic effects the refractive index can be tuned in both waveguide and nonlinear material. Given the nature of Cherenkov radiation, such tuning of the effective refractive index will result in a shift in emission angle. As such beam steering of the signal beam is enabled.

DETAILED DESCRIPTION: For the purpose of promoting an understanding of the principles of the invention, reference will now be made to the embodiment illustrated in the figures and specific

DK 181086 B1 7 language will be used to describe them. It will nevertheless be understood that no limitation of the scope of the invention is thereby intended. Such alterations and further modifications in the illustrated system, and such further applications of the principles of the invention as would normally occur to those skilled in the art are to be construed as being within the scope of the present invention. It will be understood by those skilled in the art that the foregoing general description and the following detailed description are exemplary and explanatory of the invention and are not intended to be restrictive thereof. The terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process or method that comprises a list of steps does not include only those steps but may include other steps not expressly listed or inherent to such a process or method. Similarly, one or more sub-systems or elements or structures or components preceded by "comprises... a" does not, without more constraints, preclude the existence of other, sub-systems, elements, structures, components, additional sub-systems, additional elements, additional structures or additional components. Appearances of the phrase "in an embodiment”, "in another embodiment" and similar language throughout this specification may, but not necessarily do, all refer to the same embodiment.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention belongs. The system, methods, and examples provided herein are only illustrative and not intended to be limiting.

In some embodiments, a device as disclosed herein is a light source that will emit in wavelengths derived from the pump laser in accordance to nonlinear conversion processes. Since one target application is generation of far-UVC light, the following will take this emission band as example. The overall concept and layout of the presented light source could be adjusted for application at other wavelengths by substitution of nonlinear material and adjustment of waveguide dimensions. The UVC light is generated from visible blue light through nonlinear interaction in the form of Cherenkov radiation. For second harmonic generation (SHG) and sum frequency generation (SFG) based on Cherenkov radiation the coherent nonlinear interaction is ensured through phase- matching at a specific angle in relation to the pump beam, see Fig. 4. This nonlinear interaction is material dependent and present in nonlinear optical materials with nonzero second-order susceptibility. By bonding, see Fig. 1, such nonlinear material directly on top of the waveguides of the guiding module, the pump beam is guided by the waveguide core while having significant modal overlap into the nonlinear material, see Fig. 3. This approach ensures efficient and mature production of the guiding module and the nonlinear material followed by subsequent bonding of the two chips or two wafers.

DK 181086 B1 8 The bonding process may be achieved with either direct or indirect bonding of the surface of the waveguide layer to the surface of the nonlinear crystal.

For direct bonding, no other material is deposited or grown on the either surface to enhance the bonding.

In contrast, indirect bonding uses one or more intermediate materials deposited on one or both bonding surfaces to improve the bonding energy.

Common interlayers used for indirect bonding include Al2O3, SiN, or SiO2 deposited by atomic layer deposition, chemical vapor deposition, electron-beam deposition, or sputtering.

Other interlayers frequently used for indirect bonding include photosensitive polymers such as benzocyclobutene or SU-8 which is an epoxy-based negative photoresist.

For direct bonding and for indirect bonding

— with thin inorganic layers, the bonding mechanism is generally categorized as hydrophobic or hydrophilic.

The benefit of hydrophilic bonding is that lower temperatures are necessary compared to hydrophobic bonding.

The hydrophilic bonding process starts with a surface activation process, usually done with O2 or N2 plasma in vacuum or by atmospheric plasma with metastable He.

This leads to saturation of the surface with hydroxyl groups from reaction with the air or by rinsing with clean deionized water.

Other water molecules generally bond to the hydroxyl group at this point.

Next, the two surfaces are brought in contact and hydrogen bonds create an instantaneous attractive force.

To further strengthen the bond, the two substrates are baked or annealed at an elevated temperature, usually between 100 C and 500 C, for an extended period of time, usually between 10 minutes and 48 hours.

During the annealing process, water molecules diffuse away from the bonding interface to leave a stronger direct bond between the surfaces of each material with primarily oxygen atoms remaining between them.

As mentioned earlier, the hydrophilic bonding process is ideal for bonding two dissimilar materials because the lower temperature requirement reduces the total change in size between the two substrates due the thermal expansion.

This difference in size as the two materials change in temperature relative to the temperature when the bond was initiated (which is generally room temperature, but can also be at elevated or lower temperature) may cause the bond to fail and crack apart.

So, the bonding anneal temperature and time is usually experimentally determined to maximize the bonding energy without causing the bond to fail by cracking apart.

The guiding module should be transparent at the pump wavelength and preferably have as low propagation loss as possible.

Due to the direct bonding, where a very thin interlayer (relative to the wavelengths of light) or no interlayer is used to improve the bonding energy, with nonlinear crystal the guiding module should have no top-cladding above the waveguides.

The waveguide geometry allows for a tight confinement of the light, implying that a smaller effective mode area is achievable, resulting in a stronger electromagnetic intensity in the nonlinear material and thus a larger conversion efficiency compared to free space laser beams in bulk nonlinear materials.

The guiding module can be made from well-established photonic integration platforms.

For pump lasers in the blue

40 suitable PIC platforms could be silicon nitride (Si3N4), tantala (Ta205), aluminum nitride (AIN) and alumina (AI203). Regardless of the platform chosen for the guiding module, the

DK 181086 B1 9 effective index of the waveguides can be tuned through the waveguide geometry, see Fig

3. For a given PIC platform, a suitable nonlinear crystal should be chosen to fulfill the requirement of refractive index for Cherenkov phase-matching at a propagation angle in the nonlinear crystal.

For signal generation in the UVC, the nonlinear material can be barium borate (BBO), cesium lithium borate (CLBO), lithium borate (LBO), potassium dideuterium phosphate (KDP), potassium dideuterium phosphate (DKDP), ammonium dihydrogen phosphate (ADP), yttrium calcium oxoborate (YCOB), or potassium fluoroboratoberyllate (KBBF). All these materials are transparent over part of the UVC and possess second-order susceptibility, allowing them to be used for processes such as SHG and SFG. In addition, a cladding material can also be deposited on top of the nonlinear material. This can be advantageous to protect the nonlinear material, especially since several of the nonlinear materials are highly hygroscopic, however such cladding should remain thin enough on the bonding surface as to allow significant modal overlap into the nonlinear material. A compatible cladding material could amongst others, be magnesium fluoride (MgF2). MgF2 is transparent for wavelengths down to 120 nm. It is not hygroscopic, allows for protecting the nonlinear material and is widely used as a material for protective and antireflective coating.

In the following paragraph some observations are made on the crystal symmetry and orientation, where BBO bonded to a guiding module of SiN on a silicon substrate is used as an example. For optimal bonding, the bonding surface of the nonlinear material should have a similar coefficient of thermal expansion as compared with the substrate of the guiding module. For BBO bonded to SiN on Si substrate, material parameters suggest that the bonding surface should be orthogonal to the primary optical axis of the crystal, which happens to be the growth direction. For Cherenkov-SHG, it is required that the signal wave (In the UVC range) has a refractive index greater than that of the pump beam (visible blue range). This allows for some considerations on the BBO crystal-orientation in relation to the waveguide. As an example, BBO is a negative uniaxial: The ordinary refractive index is larger than the extraordinary refractive index, therefore the signal wave should be ordinary. Due to normal dispersion: smaller wavelengths have larger refractive index; the signal wave is in this case similarly preferred to be ordinary. The pump wave vector is colinear to the SiN waveguide, which is the direction of propagation of the pump. It is therefore in the ordinary plane of the BBO crystal. The angle theta between the principal crystal axis and the propagation vector of the pump is therefore fixed at 90 degrees. The pump field is TE polarized with respect to the SiN waveguide. The direction of the electric field is therefore parallel to the bonding interface, or orthogonal to the crystal axis. This implies that the pump field is an ordinary wave with respect to the BBO. The direction of the nonlinear electric polarization is given by the product of the nonlinear tensor (applied to BBO) and the 6-column nonlinear vector (applied to type-I SHG). From 40 this the optimal angle for phi that will maximize the effective nonlinear d-tensor follows.

DK 181086 B1 10 A number of N laser diodes provides N beams with either a single or multiple wavelengths. To combine the pump laser beams together, a PIC could be used, see Fig.

5. This PIC can be fabricated with silicon nitride, or aluminium nitride, or another available material that is transparent in the relevant wavelength ranges. This PIC facilitates matching of the optical modeprofiles and guiding them into the frequency converting module. A number of N laser diodes are temperature controlled. By altering the temperature of the pump diode lasers, their wavelengths are shifted. The temperature of the nonlinear chip can also be changed to tune the Cherenkov angle. This allows for the generated UVC light to be shifted in both wavelength and output angle. The light source can be mass-produced since the pump laser and the PIC in the guiding module are both fabricated by wafer-scale lithography technology. As such arrays of lasers and frequency converting waveguides can be manufactured to have matching pitch, see Fig.6. After bonding the nonlinear material to the guiding module PIC, the laser array can be aligned and fastened to the frequency converter and subsequently be diced into multiple complete light sources. DESCRIPTION OF DRAWINGS (NOTE NONE OF THE FIGURES ARE DRAWN TO SCALE): Fig. 1 schematically illustrates bonding (as indicated by the dashed arrow) of a nonlinear component (1) comprising nonlinear material to a guiding module PIC comprising one or more waveguide cores (2) on top of a substrate material (5) as disclosed herein. Once bonded (see e.g. Fig. 2), the nonlinear component (1) and the guiding module together forms an embodiment of a frequency converter (17) as disclosed herein. More particularly, the nonlinear component (1) is surface bonded with or jointed to one or more waveguides (2) of the guiding module. In some embodiments, the PIC has one or more buffer layers (4) between the substrate (5) and the waveguide (2). The figure illustrates the bonding only for a very limited cutout of the overall part to maintain resolvability of individual components (see e.g. also Fig. 6), however an advantage of the surface bonding approach is that it is routinely done on a much larger scale. Further indicated is a length (7) of the waveguide(s). Fig. 2 schematically illustrates one embodiment of a frequency converter (17), as disclosed herein, after bonding. The frequency converter (17) comprises a nonlinear component or part (1) of a nonlinear material, at least one optical waveguide (2), a substrate (5), and in some further embodiments at least one buffer layer (4) then supporting the waveguide(s) (2). The buffer layer (4) may e.g. be oxide cladding. The frequency converter (17) function as disclosed herein, and in particular — at least in some embodiments — with respect to Cherenkov-enabled nonlinear conversion. Fig. 3 schematically illustrate a cross-section of a frequency converter (e.g. of Figs. 1 and 2) showing the cross-section of a waveguide (2) sandwiched between the nonlinear

DK 181086 B1 11 component (1) and the substrate (5) (or the buffer layer/oxide cladding (4) for such embodiments) of the guiding module.

The cross-section is perpendicular to a length direction (see e.g. 7 in Fig. 1) of the waveguide (2). An optical mode profile is shown as a shaded overlay (19) as an example.

The illustrated schematic optical mode profile is for a light source being or comprising a pump laser emitting a pump beam (see e.g. 11 in Fig. 4). A height (8) of the waveguide (2) is illustrated that also generally defines the spacing between the nonlinear component (1) and the substrate (5) (or the buffer layer/oxide cladding (4)). To each other side of the waveguide (2) there is a cavity or similar (to the opposite sides of the waveguide (2) and between the nonlinear component (1) and the substrate (5)/the buffer layer/oxide cladding (4)) containing a surrounding cladding material (3), e.g. ambient air.

Part of the optical power will overlap, i.e. evanescently couple, into the nonlinear material of the nonlinear component (1), allowing for frequency conversion through nonlinear interaction.

The effective index and mode profile (19) of the pump beam is dependent on waveguide geometry (8 and 9). Note that both the nonlinear material and the substrate/buffer extends beyond the figure due to the minuscule waveguide dimensions.

Fig. 4 schematically shows a sideview of the frequency converter exemplifying second harmonic generation (SHG) of a pump beam (11) emitted by a pump laser light source.

The pump beam (11) is mostly confined in the waveguide core (2). However, the overlap into the nonlinear material (1) ensures SHG of a signal beam (12) at the Cherenkov angle (10) ensuring phase matching.

The requirements of phase matching and energy conservation in the SHG process is indicated graphically through the length and direction of the arrows denoting the pump (11) and signal (12) beam.

This figure shows only a part of the frequency converter along the length of the frequency converter, but SHG occurs continuously along the waveguide propagation axis.

Fig. 5 schematically shows further embodiments, additionally comprising an optical input coupler (6). A suitable photonic integrated circuit (PIC) is used to slim down the size of the optical mode through tapering of the waveguide dimension within the optical input coupler (6). The input coupler (6) could further enable combination of multiple pump beams though integrated optical elements such as multimode interference couplers, y-branches, etc.

Fig. 6 schematically shows an embodiment of parallel fabrication and alignment of a plurality of complete light sources.

Given that laser diodes typically are made as integrated devices in a process very similar to the fabrication process of the PIC in the frequency converter, the two components share similar feature size and overall build- structure, i.e. a functional layerstack (i.e. a laser diode active materials (14)) built upon a substate material (i.e. a laser diode substrate material (15). This similarity is a significant enabler for a tight coupling between pump laser and frequency converter.

Leveraging a unified pitch of the laser diode active materials (14) and of the respective waveguides (2) 40 inthe respective frequency converters, the optical alignment can be done for multiple

DK 181086 B1 12 devices/light sources simultaneously. Subsequent dicing between the waveguides readily facilitate large scale manufacturing of multiple (hundreds or thousands) devices/light sources. In at least some embodiments, the laser output facets are butt-coupled directly to the waveguide facets on the frequency converters. The efficiency of the coupling can be optimized for instance by tapering the guiding module waveguide towards the facet to match the geometry of the laser emission region. Fig. 7 schematically shows an example package of a compact light source/lighting device (18). In this example, a diode laser (13) and a frequency converter (17) (e.g. as shown in Figs. 1-6) is placed in a TO-can (16). The TO-can (16) is a standardised packaging approach in the field of laser diodes and may be produced in high numbers at low prices even today. Complying to a standardised package enables compatibility with an entire range of current-supplies, fixtures, thermal management systems, etc. LIST OF REFERENCE NUMERALS:

1. Nonlinear material e.g., BBO

2. Waveguide core e.g., SiN

3. Surrounding cladding material e.g., Air

4. Buffer material e.g., SiO2

5. Substrate material of the guiding module e.g., Si

6. Spot size converter/combiner on a PIC

7. Length of the waveguide

8. Height of the waveguide

9. Width of the waveguide

10. Cherenkov angle

11. Pump beam

12. Signal beam

13. First diode laser pump/(first) laser light source

14. Laser diode active material

15. Laser diode substrate material

16. TO-can

17. Frequency converter

18. Light source/light source device

19. Optical mode profile

Claims

DK 181086 B1 13 Patent claim

1. Electromagnetic radiation frequency or equivalent wavelength converter (17), which converter (17) comprises — a non-linear optical component or part (1) comprising or consisting of a predetermined non-linear optical material and — econductor module (2, 3 , 4, 5), which guide module (2, 3, 4, 5) o has the predetermined geometry which defines or controls an effective refractive index of the guide module (2, 3, 4, 5), and o is designed to receive and directing pump light (11), resulting in a directed pump beam (11), where — the non-linear optical component or part (1) is designed to non-linearly convert the directed pump beam (11) into the non- linear optical material for a non-conducted signal wave type emitted as an output light signal (12) at a different frequency or an equivalent wavelength, characterized in that — the non-linear component or part (1) is connected with or connected to the control module (2, 3, 4, 5), where the connection is designed to allow m inst part of the guided pump beam (11) can overlap with and/or can be briefly switched into the non-linear optical material.

2. Electromagnetic radiation frequency converter (17) according to claim 1, where the guide module (2, 3, 4, 5) comprises at least one waveguide (2) and the non-linear component or part (1) is connected to or connected to the at least one waveguide (2) of the guide module (2, 3, 4, 5).

3. Electromagnetic radiation frequency converter (17) according to claim 1 or 2, where the control module (2, 3, 4, 5) comprises

DK 181086 B1 14 — a substrate material (5) which is different from the predetermined non-linear optical material, where the at least one waveguide (2) is placed or deposited on a first side of the substrate material (5), or — a substrate material (5) which is different from the predetermined non-linear optical material and a buffer layer (4) which is placed or deposited on a first side of the substrate material (5) and where the at least one waveguide (2) is placed or deposited on a first side of the buffer layer (4).

4. Electromagnetic radiation frequency converter (17) according to any one of claims 1 — 3, wherein the non-linear optical component or part (1) and/or the guide module (2, 3, 4, 5) comprises embedded electrodes and is designed to respectively changing the effective refractive index of the non-linear optical component or part (1) and/or the guide module (2, 3, 4, 5) in response to a respective change in applied electric field of the embedded electrodes.

5. Electromagnetic radiation frequency converter (17) according to any one of claims 1 — 4, wherein the converter (17) comprises one or more planar optical structures designed to redirect and/or modulate light received or to be received by the guide module (2, 3, 4, 5), whereby the output light signal (12) is controlled.

6. Electromagnetic radiation frequency converter (17) according to any one of claims 1 — 5, wherein the predetermined non-linear optical material is one selected from the group consisting of: — barium borate (BBO), — cesium lithium borate (CLBO), — lithium borate (LBO), — potassium dideuterium phosphate (KDP), — potassium dideuterium phosphate (DKDP), — ammonium dihydrogen phosphate (ADP), — yttrium calcium oxoborate (YCOB) and — potassium fluoroboratoberylate (KBBF).

DK 181086 B1 15

7. Electromagnetic radiation frequency converter (17) according to any one of claims 1 — 6, where the control module (2, 3, 4, 5) is a photonic integrated control circuit (2, 3, 4, 5).

8. Light source device (18), which light source device (18) comprises — at least one pump laser/pump source (13) designed to emit light at a first predetermined wavelength, and — an electromagnetic radiation frequency converter (17) according to any one of claims 1 — 7, where the guide module (2, 3, 4, 5) of the frequency converter (17) is designed to receive and guide at least part of the emitted light from the at least one pump laser light source (13), and the output light signal (12 ) has a second predetermined wavelength which is different from the first predetermined wavelength.

9. Light source device (18) according to claim 8, where the converter (17) comprises an optical coupling element (6) which is designed to receive light and deliver this to the guide module (2, 3, 4, 5).

10. Germicidal or decontaminating device, which germicidal or decontaminating device comprises — at least one light source device (18) according to claim 8 or 9, where the at least one pump laser light source (13) is designed to emit a visible blue light, and the output light signal (12) is UVC or far UVC light.

11. Method for converting electromagnetic radiation frequency or equivalent wavelength, which method comprises — receiving and directing pump light (11) via a guiding module (2, 3, 4, 5) which has a predetermined geometry that defines or controls a effective refractive index of the guide module (2, 3, 4, 5), resulting in a guided pump beam (11), — to allow at least part of the guided pump beam (11) to overlap with and/or briefly can be plugged into a non-linear optical material comprising or consisting of a non-linear component or part (1), and

DK 181086 B1 16 — to non-linearly convert the guided pump beam (11) in the non-linear optical material into a non-guided signal wave type that is emitted as an output light signal (12) at a different frequency or an equivalent wavelength, characterized in that — overlapping and/or short-term coupling in the non-linear optical material takes place at a connection between the non-linear component or part (1) and the control module (2, 3, 4, 5).