DK166048C - Fremgangsmaade og apparat til maaling af lave tryk - Google Patents

Fremgangsmaade og apparat til maaling af lave tryk

Info

Publication number
DK166048C
DK166048C DK390085A DK390085A DK166048C DK 166048 C DK166048 C DK 166048C DK 390085 A DK390085 A DK 390085A DK 390085 A DK390085 A DK 390085A DK 166048 C DK166048 C DK 166048C
Authority
DK
Denmark
Prior art keywords
rotating body
gas
pressure
drive coils
rotational speed
Prior art date
Application number
DK390085A
Other languages
English (en)
Other versions
DK390085A (da
DK166048B (da
DK390085D0 (da
Inventor
Johan Kristian Fremerey
Bernd Lindenau
Klaus Witthauer
Original Assignee
Forschungszentrum Juelich Gmbh
Rwd Datentechnik Gmhh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich Gmbh, Rwd Datentechnik Gmhh filed Critical Forschungszentrum Juelich Gmbh
Publication of DK390085D0 publication Critical patent/DK390085D0/da
Publication of DK390085A publication Critical patent/DK390085A/da
Publication of DK166048B publication Critical patent/DK166048B/da
Application granted granted Critical
Publication of DK166048C publication Critical patent/DK166048C/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
DK390085A 1984-08-28 1985-08-27 Fremgangsmaade og apparat til maaling af lave tryk DK166048C (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3431517 1984-08-28
DE3431517A DE3431517C2 (de) 1984-08-28 1984-08-28 Verfahren zur Druckmessung mit einem Gasreibungsvakuummeter und Gasreibungsvakuummeter zur Durchführung des Verfahrens

Publications (4)

Publication Number Publication Date
DK390085D0 DK390085D0 (da) 1985-08-27
DK390085A DK390085A (da) 1986-03-01
DK166048B DK166048B (da) 1993-03-01
DK166048C true DK166048C (da) 1993-07-12

Family

ID=6244028

Family Applications (1)

Application Number Title Priority Date Filing Date
DK390085A DK166048C (da) 1984-08-28 1985-08-27 Fremgangsmaade og apparat til maaling af lave tryk

Country Status (8)

Country Link
US (1) US4619144A (da)
EP (1) EP0176735B1 (da)
JP (1) JPS6161030A (da)
AT (1) ATE57576T1 (da)
CA (1) CA1229241A (da)
DE (2) DE3431517C2 (da)
DK (1) DK166048C (da)
SU (1) SU1421267A3 (da)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3716016A1 (de) * 1987-05-11 1988-12-22 Physikalisch Tech Bundesanstal Transportvorrichtung fuer den rotationskoerper eines gasreibungs-druckmessgeraetes
DE8908069U1 (da) * 1989-07-01 1989-11-02 Leybold Ag, Zweigniederlassung Koeln, 5000 Koeln, De
JP2816423B2 (ja) * 1993-03-31 1998-10-27 工業技術院長 回転形粘性真空計
DE4343575C2 (de) * 1993-12-21 1995-10-19 Forschungszentrum Juelich Gmbh Gasreibungsvakuummeter mit um eine ortsfeste Rotationsachse rotierendem Gasreibungssensor
DE19501773A1 (de) * 1994-02-01 1995-08-03 Abb Patent Gmbh Einrichtung zum Messen des Innendruckes in einer Vakuumkammer in einem Bereich von 100 mbar bis 10·-··7· mbar
DE4438591A1 (de) * 1994-10-28 1996-05-02 Kloeckner Moeller Gmbh Störlichtbogen-Schutzvorrichtung für Schaltanlagen zur Verteilung elektrischer Energie und Verfahren zur Fertigung und Prüfung
US8327713B2 (en) * 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1573603A1 (de) * 1965-06-16 1970-04-16 Fremerey Dipl Phys Johan Krist Geraet zur Messung des Druckes im Hochvakuum
DE2914037C2 (de) * 1979-04-06 1983-12-08 Siemens AG, 1000 Berlin und 8000 München Einrichtung zum Unwirksammachen von durch Temperaturschwankungen verursachten Abweichungen der Ausgangsspannung eines Druckwandlers in Magnetbandgeräten
DE2945889A1 (de) * 1979-11-14 1981-05-27 Leybold-Heraeus GmbH, 5000 Köln Verfahren zun vorrichtung zur messung niedriger druecke
DE3019315C2 (de) * 1980-05-21 1982-07-29 Kernforschungsanlage Jülich GmbH, 5170 Jülich Gasreibungsvakuummeter mit im Messkopf gelagertem Rotationskörper sowie Verfahren zur Herstellung von Rotationskörpern für Gasreibungsvakuummeter
DE3374346D1 (en) * 1983-12-17 1987-12-10 Leybold Heraeus Gmbh & Co Kg Method of processing measured values of a gas friction vacuum meter, and a gas friction vacuum meter provided with a circuit for carrying out this method

Also Published As

Publication number Publication date
EP0176735A2 (de) 1986-04-09
US4619144A (en) 1986-10-28
JPS6161030A (ja) 1986-03-28
DK390085A (da) 1986-03-01
SU1421267A3 (ru) 1988-08-30
DE3431517A1 (de) 1986-03-06
EP0176735B1 (de) 1990-10-17
ATE57576T1 (de) 1990-11-15
DK166048B (da) 1993-03-01
DK390085D0 (da) 1985-08-27
CA1229241A (en) 1987-11-17
EP0176735A3 (en) 1988-10-12
JPH0533734B2 (da) 1993-05-20
DE3580149D1 (de) 1990-11-22
DE3431517C2 (de) 1986-09-04

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Legal Events

Date Code Title Description
PBP Patent lapsed