DK141557B - Apparatus for the manufacture of unilaterally closed tubes of semiconductor material - Google Patents

Apparatus for the manufacture of unilaterally closed tubes of semiconductor material Download PDF

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Publication number
DK141557B
DK141557B DK564772A DK564772A DK141557B DK 141557 B DK141557 B DK 141557B DK 564772 A DK564772 A DK 564772A DK 564772 A DK564772 A DK 564772A DK 141557 B DK141557 B DK 141557B
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DK
Denmark
Prior art keywords
support body
sheath
semiconductor material
graphite
casing
Prior art date
Application number
DK564772A
Other languages
Danish (da)
Other versions
DK141557C (en
Inventor
A Kasper
W Dietze
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of DK141557B publication Critical patent/DK141557B/en
Application granted granted Critical
Publication of DK141557C publication Critical patent/DK141557C/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/073—Hollow body
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/122—Polycrystalline

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  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)

Description

141557141557

Patent nr. 137.550 angår et apparat til fremstilling af ensidigt lukkede rør af halvledermateriale ved udskillelse af halvledermaterialet fra en gasformig for-bindelse på et hult rørformet bærelegeme, som er lukket 5 ved en ende og opvarmes ved direkte strømgennemgang, i hvilket bærelegemes indre der er anbragt en stav af grafit eller et af materialerne glaskul, spektralkul eller pyrografit, hvilken stav er elektrisk ledende forbundet med bærelegemet, og det ejendommelige ifølge hovedpaten-10 tet er, at staven er skruet ind i en i den lukkede ende af bærelegemet tilvejebragt udsparing. Udsparingen kan f.eks. som vist på fig.l og 2 i hovedpatentet være en boring, som gennemtrænger den lukkede ende af bærelegemet, og boringen er lukket ved hjælp af en midterdel af 15 en i tværsnit paddehatteformet indskruet eller indpresset kappe.Patent No. 137,550 relates to an apparatus for producing unilaterally closed tubes of semiconductor material by separating the semiconductor material from a gaseous connection on a hollow tubular support member, which is closed at one end and heated by direct current passage in which the interior of the support body is located. arranged a graphite rod or one of the glass, spectral or pyrographic materials, which rod is electrically conductive to the support body, and the peculiar feature of the main patent is that the rod is screwed into a recess provided at the closed end of the support body. The recess can e.g. As shown in Figs. 1 and 2 of the main patent, a bore penetrates the closed end of the support body and the bore is closed by means of a middle portion of a cross-sectional mushroom-shaped screwed-in or pressed-in sheath.

Opfindelsen angår et apparat ifølge hovedpatentet, hvor udsparingen er udformet på den ovenfor angivne måde, og det ejendommelige er, at kappen på den udvendige side 20 har form som et fra midten udgående skråt tag.The invention relates to an apparatus according to the main patent, in which the recess is formed in the manner indicated above, and the characteristic is that the casing on the outer side 20 has the shape of a centered inclined roof.

Det ligger inden for opfindelsens rammer, at de skrå flader forløber fra midten af kappen til anlægsfladen på bærelegemets udvendige side.It is within the scope of the invention that the inclined surfaces extend from the center of the casing to the abutment surface on the outside of the support body.

Ved et særligt fordelagtigt udførelseseksempel i-25 følge opfindelsen er der foruden de skrå flader udført en afrunding ved det sted, hvor kappekanten og bærelegemets udvendige væg mødes, hvorved sikres en bedre af-trækning af det færdige siliciumrør.In a particularly advantageous embodiment according to the invention, in addition to the oblique surfaces, a rounding is carried out at the point where the cutting edge and the outer wall of the support body meet, thereby ensuring a better pulling of the finished silicon tube.

Kappen i apparatet ifølge opfindelsen har over for 30 den i hovedpatentet som afdækning af grafitrøret forudsete flade grafitkappe den fordel, at der ved den på forhånd tilvejebragte skrå kappeform opnås en ensartet temperaturfordeling over den samlede flade. Derved kan der ved fremstillingen af ensidigt lukkede siliciumrør ved 35 hjælp af sådanne apparater også sikres en ensartet siliciumudskillelse, og de tilvejebragte Siliciumrør har en ensartet vægtykkelse. Den skrå afsliphing ved kanten afThe casing of the apparatus according to the invention has the advantage of providing a uniform temperature distribution over the total surface with respect to the flat graphite casing envisaged in the main patent as covering the graphite tube. Thus, in the manufacture of unilaterally closed silicon tubes by means of such apparatus, a uniform silicon separation can also be ensured and the silicon tubes provided have a uniform wall thickness. The oblique slip hinged at the edge of

Claims (3)

141557 kappen efter sammensætningen af grafitdelene, som ved ap-paratet ifølge hovedpatentet benyttes til at forhindre Store temperaturforskelle hen til kanten ved opvarmningen, kan reduceres til et minimum. 5 En yderligere fordel frem for den flade kappe er den langt større mekaniske stabilitet. Opfindelsen forklares nærmere med henvisning til figuren, som er vist på tegningen. Figuren viser et tværsnit gennem overdelen af et bærelegeme med stav og tilpasset 10 kappe. Herved betegnes med henvisningstallet 10 grafitstaven, med 11 bærelegemet af grafit, mens gevind 12 og 14 er vist skematisk. Den i grafitstaven indpassede kappe, som afslutter det hule bærelegeme udadtil, bærer henvisningstallet 13 og har form som et skråt tag, der 15 udgår fra midten 15. De i figurens tværsnit med 16 betegnede steder, hvor kappekanten 13 og bærelegemets udvendige væg 11 mødes, er afrundet ved hjælp af afslip-ning, hvilket er vist ved hjælp af indtegnede punkterede linier 17. 20 Udskillelsen af røret af halvledermateriale, især af silicium, sker på kendt måde, som det allerede er beskrevet i hovedpatentet.The sheath after the composition of the graphite parts used by the apparatus according to the main patent to prevent large temperature differences to the edge during heating can be reduced to a minimum. A further advantage over the flat sheath is the much greater mechanical stability. The invention is further explained with reference to the figure shown in the drawing. The figure shows a cross-section through the top of a support body with a rod and a fitted jacket. The reference numeral 10 is hereby designated the graphite rod, with 11 the graphite support body, while threads 12 and 14 are shown schematically. The casing fitted into the graphite rod terminating the hollow support body outwardly carries the reference numeral 13 and has the shape of an oblique roof 15 extending from the center 15. The locations indicated in the cross-section by 16 indicated at the point where the casing edge 13 and the outer wall 11 of the support body meet. is rounded by means of grinding, which is shown by means of plotted dotted lines 17. 20 The separation of the tube of semiconductor material, especially of silicon, takes place in a known manner, as already described in the main patent. 1. Apparat til fremstilling af ensidigt lukkede rør 25 af halvledermateriale ifølge patent nr. 137.550, og ved hvilket udsparingen er en boring, som gennemtrænger den lukkede ende af bærelegemet, og boringen er lukket ved hjælp af en midterdel af en i tværsnit paddehatteformet indskruet eller indpresset kappe, kendetegnet 30 ved, at kappen på den udvendige side har form som et fra midten udgående skråt tag.Apparatus for the manufacture of unilaterally closed tubes 25 of semiconductor material according to patent No. 137,550, in which the recess is a bore which penetrates the closed end of the support body and the bore is closed by means of a middle part of a cross-sectional mushroom shaped screw or compressed sheath, characterized in that the sheath on the outer side has the shape of a centered inclined roof. 2. Apparat ifølge krav 1, kendetegnet ved, at de skrå flader forløber fra midten af kappen til anlægsfladen på bærelegemets udvendige side.Apparatus according to claim 1, characterized in that the inclined surfaces extend from the center of the casing to the abutment surface on the outside of the support body. 3. Apparat ifølge krav 1 og 2, kendetegnet ved, at der foruden de skrå flader er udført en afrundingApparatus according to claims 1 and 2, characterized in that, in addition to the inclined surfaces, a rounding is performed
DK564772A 1971-11-24 1972-11-14 Apparatus for the manufacture of unilaterally closed tubes of semiconductor material DK141557C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2158257 1971-11-24
DE2158257A DE2158257A1 (en) 1971-11-24 1971-11-24 ARRANGEMENT FOR THE MANUFACTURING OF SINGLE-SIDED TUBES FROM SEMICONDUCTOR MATERIAL

Publications (2)

Publication Number Publication Date
DK141557B true DK141557B (en) 1980-04-21
DK141557C DK141557C (en) 1980-09-08

Family

ID=5826011

Family Applications (1)

Application Number Title Priority Date Filing Date
DK564772A DK141557C (en) 1971-11-24 1972-11-14 Apparatus for the manufacture of unilaterally closed tubes of semiconductor material

Country Status (13)

Country Link
US (1) US3793984A (en)
JP (1) JPS5743526B2 (en)
AT (1) AT324434B (en)
BE (1) BE787577R (en)
CH (1) CH550609A (en)
DD (1) DD105727A6 (en)
DE (1) DE2158257A1 (en)
DK (1) DK141557C (en)
FR (1) FR2160903B2 (en)
GB (1) GB1370988A (en)
IT (1) IT1046828B (en)
NL (1) NL7212471A (en)
SE (1) SE375555B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5478787A (en) * 1991-12-26 1995-12-26 Uop Discrete molecular sieve and use
US5453233A (en) * 1993-04-05 1995-09-26 Cvd, Inc. Method of producing domes of ZNS and ZNSE via a chemical vapor deposition technique
CA2298491C (en) 1997-07-25 2009-10-06 Nichia Chemical Industries, Ltd. Nitride semiconductor device
JP3770014B2 (en) 1999-02-09 2006-04-26 日亜化学工業株式会社 Nitride semiconductor device
WO2000052796A1 (en) * 1999-03-04 2000-09-08 Nichia Corporation Nitride semiconductor laser element
TWI362769B (en) * 2008-05-09 2012-04-21 Univ Nat Chiao Tung Light emitting device and fabrication method therefor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB450959A (en) * 1934-10-22 1936-07-22 Robert Calvert Knight Young Electric resistance heaters
US2271838A (en) * 1939-11-06 1942-02-03 Dow Chemical Co Electric furnace resistor element
US2355343A (en) * 1941-07-23 1944-08-08 Ind De L Aluminum Sa Furnace for the electrothermal production of magnesium
US2858403A (en) * 1956-04-23 1958-10-28 Carborundum Co Silicon carbide immersion heating device
US2955566A (en) * 1957-04-16 1960-10-11 Chilean Nitrate Sales Corp Dissociation-deposition unit for the production of chromium
GB944009A (en) * 1960-01-04 1963-12-11 Texas Instruments Ltd Improvements in or relating to the deposition of silicon on a tantalum article
US3451772A (en) * 1967-06-14 1969-06-24 Air Reduction Production of ultrapure titanium nitride refractory articles
US3717439A (en) * 1970-11-18 1973-02-20 Tokyo Shibaura Electric Co Vapour phase reaction apparatus

Also Published As

Publication number Publication date
JPS5743526B2 (en) 1982-09-16
DD105727A6 (en) 1974-05-12
IT1046828B (en) 1980-07-31
SE375555B (en) 1975-04-21
DK141557C (en) 1980-09-08
CH550609A (en) 1974-06-28
FR2160903B2 (en) 1976-08-20
FR2160903A2 (en) 1973-07-06
US3793984A (en) 1974-02-26
GB1370988A (en) 1974-10-23
AT324434B (en) 1975-08-25
JPS4863976A (en) 1973-09-05
NL7212471A (en) 1973-05-28
BE787577R (en) 1972-12-01
DE2158257A1 (en) 1973-05-30

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