DK135153B - Fremgangsmåde til digelfri zonesmeltning af en krystallinsk stav, navnlig en halvlederstav. - Google Patents

Fremgangsmåde til digelfri zonesmeltning af en krystallinsk stav, navnlig en halvlederstav.

Info

Publication number
DK135153B
DK135153B DK300067AA DK300067A DK135153B DK 135153 B DK135153 B DK 135153B DK 300067A A DK300067A A DK 300067AA DK 300067 A DK300067 A DK 300067A DK 135153 B DK135153 B DK 135153B
Authority
DK
Denmark
Prior art keywords
rod
crucible
free zone
zone melting
crystalline
Prior art date
Application number
DK300067AA
Other languages
English (en)
Other versions
DK135153C (da
Inventor
Wolfgang Keller
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of DK135153B publication Critical patent/DK135153B/da
Application granted granted Critical
Publication of DK135153C publication Critical patent/DK135153C/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/91—Downward pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/912—Replenishing liquid precursor, other than a moving zone
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DK300067AA 1966-09-28 1967-06-08 Fremgangsmåde til digelfri zonesmeltning af en krystallinsk stav, navnlig en halvlederstav. DK135153B (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0106159 1966-09-28

Publications (2)

Publication Number Publication Date
DK135153B true DK135153B (da) 1977-03-14
DK135153C DK135153C (da) 1977-08-22

Family

ID=7527178

Family Applications (1)

Application Number Title Priority Date Filing Date
DK300067AA DK135153B (da) 1966-09-28 1967-06-08 Fremgangsmåde til digelfri zonesmeltning af en krystallinsk stav, navnlig en halvlederstav.

Country Status (6)

Country Link
US (1) US3594132A (da)
BE (1) BE704264A (da)
DE (1) DE1544302C3 (da)
DK (1) DK135153B (da)
GB (1) GB1187625A (da)
NL (1) NL6710203A (da)

Also Published As

Publication number Publication date
GB1187625A (en) 1970-04-08
DE1544302C3 (de) 1973-10-18
DK135153C (da) 1977-08-22
DE1544302A1 (de) 1970-03-19
DE1544302B2 (de) 1973-03-22
NL6710203A (da) 1968-03-29
US3594132A (en) 1971-07-20
BE704264A (da) 1968-03-25

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