DK116524B - Semiconductor element consisting of a common insulating crystalline substrate and a plurality of spaced apart monocrystalline semiconductor segments and a method of making the same. - Google Patents

Semiconductor element consisting of a common insulating crystalline substrate and a plurality of spaced apart monocrystalline semiconductor segments and a method of making the same.

Info

Publication number
DK116524B
DK116524B DK597864A DK597864A DK116524B DK 116524 B DK116524 B DK 116524B DK 597864 A DK597864 A DK 597864A DK 597864 A DK597864 A DK 597864A DK 116524 B DK116524 B DK 116524B
Authority
DK
Denmark
Prior art keywords
making
spaced apart
same
crystalline substrate
element consisting
Prior art date
Application number
DK597864A
Other languages
Danish (da)
Inventor
D Mcwilliams
C Fa
G Larchian
O Maxwell
Original Assignee
North American Aviation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by North American Aviation Inc filed Critical North American Aviation Inc
Publication of DK116524B publication Critical patent/DK116524B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291Oxides or nitrides or carbides, e.g. ceramics, glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604Chemical etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance
DK597864A 1963-12-04 1964-12-04 Semiconductor element consisting of a common insulating crystalline substrate and a plurality of spaced apart monocrystalline semiconductor segments and a method of making the same. DK116524B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32799063A 1963-12-04 1963-12-04
US33971764A 1964-01-23 1964-01-23

Publications (1)

Publication Number Publication Date
DK116524B true DK116524B (en) 1970-01-19

Family

ID=26986163

Family Applications (1)

Application Number Title Priority Date Filing Date
DK597864A DK116524B (en) 1963-12-04 1964-12-04 Semiconductor element consisting of a common insulating crystalline substrate and a plurality of spaced apart monocrystalline semiconductor segments and a method of making the same.

Country Status (3)

Country Link
CA (1) CA942893A (en)
DK (1) DK116524B (en)
GB (1) GB1096019A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6173345A (en) * 1984-09-19 1986-04-15 Toshiba Corp Semiconductor device

Also Published As

Publication number Publication date
GB1096019A (en) 1967-12-20
CA942893A (en) 1974-02-26

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