DK1160351T3 - Covered multibrand evaporator source assembly - Google Patents
Covered multibrand evaporator source assemblyInfo
- Publication number
- DK1160351T3 DK1160351T3 DK01304805T DK01304805T DK1160351T3 DK 1160351 T3 DK1160351 T3 DK 1160351T3 DK 01304805 T DK01304805 T DK 01304805T DK 01304805 T DK01304805 T DK 01304805T DK 1160351 T3 DK1160351 T3 DK 1160351T3
- Authority
- DK
- Denmark
- Prior art keywords
- crucible
- multibrand
- covered
- source assembly
- pockets
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Abstract
A multiple pocket vapour source (105), the vapour produced by an electron beam (205) that can be directed to uncovered crucible pockets, comprising:
a) a crucible (301) having a crucible surface, the surface having a plurality of pockets (201) for holding coating materials to be evaporative heated; and
b) a crucible cover (209) with a covering surface facing the crucible (301), where the pockets are uncovered by lifting the crucible cover away from the crucible prior to rotation of the crucible.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/584,940 US6342103B1 (en) | 2000-06-01 | 2000-06-01 | Multiple pocket electron beam source |
Publications (1)
Publication Number | Publication Date |
---|---|
DK1160351T3 true DK1160351T3 (en) | 2009-01-19 |
Family
ID=24339380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK01304805T DK1160351T3 (en) | 2000-06-01 | 2001-05-31 | Covered multibrand evaporator source assembly |
Country Status (6)
Country | Link |
---|---|
US (2) | US6342103B1 (en) |
EP (2) | EP1160351B1 (en) |
JP (1) | JP4845286B2 (en) |
AT (1) | ATE409245T1 (en) |
DE (1) | DE60135890D1 (en) |
DK (1) | DK1160351T3 (en) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6342103B1 (en) | 2000-06-01 | 2002-01-29 | The Boc Group, Inc. | Multiple pocket electron beam source |
US6641674B2 (en) * | 2000-11-10 | 2003-11-04 | Helix Technology Inc. | Movable evaporation device |
TWI275319B (en) * | 2002-02-05 | 2007-03-01 | Semiconductor Energy Lab | Manufacturing method and method of operating a manufacturing apparatus |
TWI286044B (en) * | 2002-02-22 | 2007-08-21 | Semiconductor Energy Lab | Light-emitting device and method of manufacturing the same, and method of operating manufacturing apparatus |
GB0307745D0 (en) * | 2003-04-03 | 2003-05-07 | Microemissive Displays Ltd | Method and apparatus for depositing material on a substrate |
KR100671673B1 (en) * | 2005-03-09 | 2007-01-19 | 삼성에스디아이 주식회사 | Device and Method for vacuum plating by Multiple evaporation |
US8168002B2 (en) * | 2005-07-27 | 2012-05-01 | Applied Materials Gmbh & Co. Kg | Device for clamping and positioning an evaporator boat |
CN100516284C (en) * | 2006-01-21 | 2009-07-22 | 鸿富锦精密工业(深圳)有限公司 | Equipment of coating by vaporization |
KR20080007820A (en) * | 2006-07-18 | 2008-01-23 | 세메스 주식회사 | The rotation evaporator for vapor deposition of thin film and apparatus for vapor deposition of thin film using rotation evaporators |
EP2113584A1 (en) | 2008-04-28 | 2009-11-04 | LightLab Sweden AB | Evaporation system |
US8557045B2 (en) * | 2008-08-26 | 2013-10-15 | Colorado State University Research Foundation | Apparatus and method for fabricating photovoltaic modules using heated pocket deposition in a vacuum |
FR2957455B1 (en) | 2010-03-09 | 2012-04-20 | Essilor Int | PROTECTIVE ENVELOPE FOR CANON IONS, DEVICE FOR DEPOSITING VACUUM EVAPORATION MATERIALS COMPRISING SUCH A PROTECTIVE ENVELOPE AND METHOD FOR DEPOSITING MATERIALS |
US8480805B2 (en) * | 2010-04-16 | 2013-07-09 | Colorado State University Research Foundation | System and method for sealing a vapor deposition source |
TW201202454A (en) * | 2010-07-07 | 2012-01-16 | Hon Hai Prec Ind Co Ltd | Processing apparatus for smoothing film material and evaporation deposition device with same |
TW201204845A (en) * | 2010-07-16 | 2012-02-01 | Hon Hai Prec Ind Co Ltd | Processing apparatus for smoothing film material and evaporation deposition device with same |
CN102337502A (en) * | 2010-07-19 | 2012-02-01 | 鸿富锦精密工业(深圳)有限公司 | Film material processing device and vapor deposition equipment with same |
KR101671489B1 (en) * | 2010-07-29 | 2016-11-02 | 삼성디스플레이 주식회사 | Evaporation source for organic material and vapor depositing apparatus including the same |
CN101942641B (en) * | 2010-09-08 | 2012-06-13 | 四川虹视显示技术有限公司 | Evaporation source device of OLED (Organic Light Emitting Diode) evaporator |
KR20120138305A (en) * | 2011-06-14 | 2012-12-26 | 삼성디스플레이 주식회사 | Organic thin film deposition system and method for depositing organic film |
CN203373418U (en) * | 2012-04-09 | 2014-01-01 | 株式会社新柯隆 | Electronic gun device |
JPWO2013153604A1 (en) * | 2012-04-09 | 2015-12-17 | 株式会社シンクロン | Electron gun equipment |
WO2014006706A1 (en) * | 2012-07-04 | 2014-01-09 | 中外炉工業株式会社 | Vapor deposition device |
KR101438734B1 (en) * | 2013-11-08 | 2014-11-03 | 우경금속주식회사 | Rotary-type heat treatment furnace |
CN104789930B (en) * | 2015-04-24 | 2016-05-11 | 京东方科技集团股份有限公司 | Evaporated device and adopt the method for operating of this evaporated device |
CN105018884B (en) * | 2015-07-30 | 2018-04-10 | 苏州方昇光电装备技术有限公司 | Instrument is deposited in a kind of small size vacuum |
TWI781929B (en) | 2016-04-25 | 2022-11-01 | 美商創新先進材料股份有限公司 | Effusion cells, deposition systems including effusion cells, and related methods |
CN107326329A (en) * | 2017-08-31 | 2017-11-07 | 京东方科技集团股份有限公司 | Evaporation source and evaporation coating device |
CN107604315B (en) * | 2017-09-21 | 2023-10-27 | 京东方科技集团股份有限公司 | Closed crucible and evaporation method using same |
CN108704687A (en) * | 2018-05-03 | 2018-10-26 | 宁波大学 | A kind of circular glass fibrous filter membrane ranked and stacked pile formula fire ware |
USD939461S1 (en) | 2018-11-30 | 2021-12-28 | Ferrotec (Usa) Corporation | Two-piece crucible cover for coating with an electron beam source |
KR102625561B1 (en) * | 2018-11-30 | 2024-01-15 | 페로텍 (유에스에이) 코포레이션 | Crucible cover for electron beam source coating |
USD909439S1 (en) | 2018-11-30 | 2021-02-02 | Ferrotec (Usa) Corporation | Two-piece crucible cover |
DE102019102587B4 (en) * | 2019-02-01 | 2023-02-23 | Semikron Elektronik Gmbh & Co. Kg | Rotatable evaporative material receiver and apparatus therewith for coating semiconductor or other surfaces |
USD973734S1 (en) * | 2019-08-06 | 2022-12-27 | Nxl Technologies Inc. | Blind shear |
EP3840012A1 (en) * | 2019-12-20 | 2021-06-23 | Essilor International | Optimized crucible assembly and method for physical vapor deposition |
US20220333231A1 (en) * | 2021-04-15 | 2022-10-20 | Applied Materials, Inc. | Evaporation source cooling mechanism |
CN113564536B (en) * | 2021-06-11 | 2022-08-26 | 北京航空航天大学 | Device for preparing double-layer ceramic layer by automatically evaporating ceramic target |
CN116770234B (en) * | 2023-06-25 | 2023-12-15 | 苏州佑伦真空设备科技有限公司 | Crucible device for preventing material mixing |
JP7421002B1 (en) | 2023-07-07 | 2024-01-23 | 株式会社アルバック | Electron beam evaporation unit |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2482329A (en) | 1946-05-27 | 1949-09-20 | Rca Corp | Apparatus for selective vapor coating |
US2853402A (en) * | 1954-08-06 | 1958-09-23 | Jr Marsden S Blois | Magnetic element and method for producing the same |
US4108107A (en) | 1976-04-01 | 1978-08-22 | Airco, Inc. | Rotatable substrate holder for use in vacuum |
DE2917841A1 (en) * | 1979-05-03 | 1980-11-13 | Leybold Heraeus Gmbh & Co Kg | EVAPORATOR FOR VACUUM EVAPORATION SYSTEMS |
DE3316554C1 (en) | 1983-05-06 | 1984-07-12 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Evaporator device with jet heating for vapor deposition of several materials |
CH663037A5 (en) | 1985-02-05 | 1987-11-13 | Balzers Hochvakuum | STEAM SOURCE FOR VACUUM COATING SYSTEMS. |
US4866239A (en) * | 1988-05-31 | 1989-09-12 | The Boc Group, Inc. | Vapor source assembly with crucible |
EP0390726B1 (en) | 1989-02-09 | 1993-09-01 | Balzers Aktiengesellschaft | Crucible cover for coating systems with an electron beam source |
US4983806A (en) * | 1990-03-01 | 1991-01-08 | Harper James L | Method and device for cooling electron beam gun |
JP2913745B2 (en) | 1990-04-10 | 1999-06-28 | 松下電器産業株式会社 | Vacuum deposition equipment |
US5473627A (en) | 1992-11-05 | 1995-12-05 | Mdc Vacuum Products Corporation | UHV rotating fluid delivery system |
US5338913A (en) | 1992-12-28 | 1994-08-16 | Tfi Telemark | Electron beam gun with liquid cooled rotatable crucible |
US5792521A (en) | 1996-04-18 | 1998-08-11 | General Electric Company | Method for forming a multilayer thermal barrier coating |
US6012413A (en) * | 1998-03-10 | 2000-01-11 | Mdc Vacuum Products Corp. | Electron beam source for use with varying sizes of crucibles |
US6342103B1 (en) | 2000-06-01 | 2002-01-29 | The Boc Group, Inc. | Multiple pocket electron beam source |
US20030019849A1 (en) | 2001-07-16 | 2003-01-30 | Cameron Daniel Barton | Electron beam gun with water cooled interlocking crucible cover |
-
2000
- 2000-06-01 US US09/584,940 patent/US6342103B1/en not_active Expired - Lifetime
-
2001
- 2001-05-31 DK DK01304805T patent/DK1160351T3/en active
- 2001-05-31 EP EP01304805A patent/EP1160351B1/en not_active Expired - Lifetime
- 2001-05-31 EP EP08153868A patent/EP1967607A1/en not_active Withdrawn
- 2001-05-31 AT AT01304805T patent/ATE409245T1/en active
- 2001-05-31 DE DE60135890T patent/DE60135890D1/en not_active Expired - Lifetime
- 2001-06-01 JP JP2001167138A patent/JP4845286B2/en not_active Expired - Lifetime
- 2001-10-24 US US09/999,199 patent/US6902625B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1160351A3 (en) | 2004-01-28 |
DE60135890D1 (en) | 2008-11-06 |
EP1967607A1 (en) | 2008-09-10 |
EP1160351B1 (en) | 2008-09-24 |
ATE409245T1 (en) | 2008-10-15 |
JP2002038256A (en) | 2002-02-06 |
US20020040682A1 (en) | 2002-04-11 |
US6342103B1 (en) | 2002-01-29 |
EP1160351A2 (en) | 2001-12-05 |
US6902625B2 (en) | 2005-06-07 |
JP4845286B2 (en) | 2011-12-28 |
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