DK1125065T3 - Molekylærpumpe - Google Patents

Molekylærpumpe

Info

Publication number
DK1125065T3
DK1125065T3 DK99948619T DK99948619T DK1125065T3 DK 1125065 T3 DK1125065 T3 DK 1125065T3 DK 99948619 T DK99948619 T DK 99948619T DK 99948619 T DK99948619 T DK 99948619T DK 1125065 T3 DK1125065 T3 DK 1125065T3
Authority
DK
Denmark
Prior art keywords
outlet
inlet
piezo
molecular pump
housing
Prior art date
Application number
DK99948619T
Other languages
Danish (da)
English (en)
Inventor
Brande Pierre Vanden
Alain Weymeersch
Original Assignee
Brande Pierre Vanden
Alain Weymeersch
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brande Pierre Vanden, Alain Weymeersch filed Critical Brande Pierre Vanden
Application granted granted Critical
Publication of DK1125065T3 publication Critical patent/DK1125065T3/da

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Fluid-Driven Valves (AREA)
  • Electron Beam Exposure (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DK99948619T 1998-10-20 1999-10-15 Molekylærpumpe DK1125065T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP98203502A EP0995908A1 (fr) 1998-10-20 1998-10-20 Pompe moléculaire
PCT/BE1999/000127 WO2000023715A1 (fr) 1998-10-20 1999-10-15 Pompe moleculaire

Publications (1)

Publication Number Publication Date
DK1125065T3 true DK1125065T3 (da) 2002-11-04

Family

ID=8234232

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99948619T DK1125065T3 (da) 1998-10-20 1999-10-15 Molekylærpumpe

Country Status (12)

Country Link
US (1) US6612816B1 (fr)
EP (2) EP0995908A1 (fr)
JP (1) JP2002527683A (fr)
AT (1) ATE220765T1 (fr)
AU (1) AU763828B2 (fr)
CA (1) CA2347169A1 (fr)
DE (1) DE69902187T2 (fr)
DK (1) DK1125065T3 (fr)
ES (1) ES2181480T3 (fr)
PT (1) PT1125065E (fr)
WO (1) WO2000023715A1 (fr)
ZA (1) ZA200104022B (fr)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20020859A1 (it) * 2002-10-04 2004-04-05 Varian Spa Stadio di pompaggio vibrante per pompe da vuoto e pompa da vuoto a stadi di pompaggio vibranti.
US10541070B2 (en) 2016-04-25 2020-01-21 Haier Us Appliance Solutions, Inc. Method for forming a bed of stabilized magneto-caloric material
US10274231B2 (en) 2016-07-19 2019-04-30 Haier Us Appliance Solutions, Inc. Caloric heat pump system
US10281177B2 (en) 2016-07-19 2019-05-07 Haier Us Appliance Solutions, Inc. Caloric heat pump system
US10295227B2 (en) * 2016-07-19 2019-05-21 Haier Us Appliance Solutions, Inc. Caloric heat pump system
US10443585B2 (en) 2016-08-26 2019-10-15 Haier Us Appliance Solutions, Inc. Pump for a heat pump system
US10386096B2 (en) 2016-12-06 2019-08-20 Haier Us Appliance Solutions, Inc. Magnet assembly for a magneto-caloric heat pump
US10527325B2 (en) 2017-03-28 2020-01-07 Haier Us Appliance Solutions, Inc. Refrigerator appliance
US11009282B2 (en) 2017-03-28 2021-05-18 Haier Us Appliance Solutions, Inc. Refrigerator appliance with a caloric heat pump
US10451320B2 (en) 2017-05-25 2019-10-22 Haier Us Appliance Solutions, Inc. Refrigerator appliance with water condensing features
US10422555B2 (en) 2017-07-19 2019-09-24 Haier Us Appliance Solutions, Inc. Refrigerator appliance with a caloric heat pump
US10451322B2 (en) 2017-07-19 2019-10-22 Haier Us Appliance Solutions, Inc. Refrigerator appliance with a caloric heat pump
US10520229B2 (en) 2017-11-14 2019-12-31 Haier Us Appliance Solutions, Inc. Caloric heat pump for an appliance
US11022348B2 (en) 2017-12-12 2021-06-01 Haier Us Appliance Solutions, Inc. Caloric heat pump for an appliance
US10648705B2 (en) 2018-04-18 2020-05-12 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly
US10876770B2 (en) 2018-04-18 2020-12-29 Haier Us Appliance Solutions, Inc. Method for operating an elasto-caloric heat pump with variable pre-strain
US10641539B2 (en) 2018-04-18 2020-05-05 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly
US10648706B2 (en) 2018-04-18 2020-05-12 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly with an axially pinned magneto-caloric cylinder
US10782051B2 (en) 2018-04-18 2020-09-22 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly
US10551095B2 (en) 2018-04-18 2020-02-04 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly
US10648704B2 (en) 2018-04-18 2020-05-12 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly
US10830506B2 (en) 2018-04-18 2020-11-10 Haier Us Appliance Solutions, Inc. Variable speed magneto-caloric thermal diode assembly
US10557649B2 (en) 2018-04-18 2020-02-11 Haier Us Appliance Solutions, Inc. Variable temperature magneto-caloric thermal diode assembly
US11015842B2 (en) 2018-05-10 2021-05-25 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly with radial polarity alignment
US10989449B2 (en) 2018-05-10 2021-04-27 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly with radial supports
US11054176B2 (en) 2018-05-10 2021-07-06 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly with a modular magnet system
US11092364B2 (en) 2018-07-17 2021-08-17 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly with a heat transfer fluid circuit
US10684044B2 (en) 2018-07-17 2020-06-16 Haier Us Appliance Solutions, Inc. Magneto-caloric thermal diode assembly with a rotating heat exchanger
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11456234B2 (en) 2018-08-10 2022-09-27 Frore Systems Inc. Chamber architecture for cooling devices
US11149994B2 (en) 2019-01-08 2021-10-19 Haier Us Appliance Solutions, Inc. Uneven flow valve for a caloric regenerator
US11274860B2 (en) 2019-01-08 2022-03-15 Haier Us Appliance Solutions, Inc. Mechano-caloric stage with inner and outer sleeves
US11193697B2 (en) 2019-01-08 2021-12-07 Haier Us Appliance Solutions, Inc. Fan speed control method for caloric heat pump systems
US11168926B2 (en) 2019-01-08 2021-11-09 Haier Us Appliance Solutions, Inc. Leveraged mechano-caloric heat pump
US11112146B2 (en) 2019-02-12 2021-09-07 Haier Us Appliance Solutions, Inc. Heat pump and cascaded caloric regenerator assembly
US11015843B2 (en) 2019-05-29 2021-05-25 Haier Us Appliance Solutions, Inc. Caloric heat pump hydraulic system
CN114586479A (zh) * 2019-10-30 2022-06-03 福珞尔系统公司 基于mems的气流系统
US11510341B2 (en) 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
JP2023544160A (ja) 2020-10-02 2023-10-20 フロー・システムズ・インコーポレーテッド アクティブヒートシンク
WO2022187160A1 (fr) 2021-03-02 2022-09-09 Frore Systems Inc. Mélange d'échappement pour systèmes de refroidissement piézoélectriques

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374941A (en) * 1964-06-30 1968-03-26 American Standard Inc Air blower
US3554669A (en) * 1968-12-04 1971-01-12 Gen Electric Electric-fluid energy converter
WO1980002445A1 (fr) * 1979-05-07 1980-11-13 Rotron Inc Soufflante a circuits integres
US4498851A (en) * 1980-05-02 1985-02-12 Piezo Electric Products, Inc. Solid state blower
US4595338A (en) * 1983-11-17 1986-06-17 Piezo Electric Products, Inc. Non-vibrational oscillating blade piezoelectric blower
US4780062A (en) * 1985-10-09 1988-10-25 Murata Manufacturing Co., Ltd. Piezoelectric fan
DE3925749C1 (fr) * 1989-08-03 1990-10-31 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
US5192197A (en) * 1991-11-27 1993-03-09 Rockwell International Corporation Piezoelectric pump
US5759015A (en) * 1993-12-28 1998-06-02 Westonbridge International Limited Piezoelectric micropump having actuation electrodes and stopper members
WO1996018823A1 (fr) * 1994-12-15 1996-06-20 The Whitaker Corporation Ventilateur vibrant en polyfluorure de vinylidene renforce par du metal
US6071087A (en) * 1996-04-03 2000-06-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ferroelectric pump
US6042345A (en) * 1997-04-15 2000-03-28 Face International Corporation Piezoelectrically actuated fluid pumps
US6074178A (en) * 1997-04-15 2000-06-13 Face International Corp. Piezoelectrically actuated peristaltic pump
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump

Also Published As

Publication number Publication date
EP1125065B1 (fr) 2002-07-17
EP0995908A1 (fr) 2000-04-26
ATE220765T1 (de) 2002-08-15
EP1125065A1 (fr) 2001-08-22
DE69902187D1 (de) 2002-08-22
PT1125065E (pt) 2002-12-31
JP2002527683A (ja) 2002-08-27
ES2181480T3 (es) 2003-02-16
CA2347169A1 (fr) 2000-04-27
ZA200104022B (en) 2002-05-17
AU6183999A (en) 2000-05-08
AU763828B2 (en) 2003-07-31
DE69902187T2 (de) 2003-03-06
US6612816B1 (en) 2003-09-02
WO2000023715A1 (fr) 2000-04-27

Similar Documents

Publication Publication Date Title
DE69902187T2 (de) Molekularpumpe
ATE291451T1 (de) Spender für medien
DE50210313D1 (de) Amphotere sterole und deren verwendung
TW332939B (en) Electric dust gathering device
FI962200A0 (fi) Resonoiva mikrosoninen synteesi
DE69420744D1 (de) Verdrängungspumpe des membrantyps
DE69715913D1 (de) Verpackung mit zwei kammern und pumpen
DE69505689D1 (de) Piezoelektrische mikromembranpumpe zum niederdruckpumpen von gasen
EP1519782A4 (fr) Protection contre le cloquage pour elements spirales
DE59403143D1 (de) Abgedichtete Verbindungsvorrichtung zwischen zwei Gehäuse-Stirnseiten
KR970702959A (ko) 필라멘트가 감겨진 일체 하우징을 갖춘 유체펌프(fluid pump with integral filament-wound housing)
DE69817582D1 (de) Geräuscharme saugpumpe
IT9048460A1 (it) Pompaggio di una miscela liquido/gas.
ATE205865T1 (de) Härtbare silikon klebe- /abdichtungszusammensetzungen
DK1015735T3 (da) Snegletransportør til transport af flydende emner og/eller klumper af emner
ATE249585T1 (de) Vakuumpumpe
DE69502525D1 (de) Dichtungsvorrichtung für Pumpenlaufrad
ATE302998T1 (de) Gehäuse mit einem fach zur aufnahme von batterien für ein tragbares elektrisches gerät
EP1455155A3 (fr) Element-PCM
ITMI950954A0 (it) Insieme di riscaldamento per pompe getter e purificatori di gas
KR840000221A (ko) 생리식염수등의 압송 장치
FR2846529B1 (fr) Boitier comportant un organe d'etancheite
FR2719084B1 (fr) Dispositif de réglage du volume d'une chambre de pompe d'une pompe à précompression.
HUP9601254A1 (hu) Állandó mágneseket tartalmazó készülék folyadékok tulajdonságainak megváltoztatására
KR970019737U (ko) 반도체 소자 제조용 액상가스 전용 펌프를 구비한 액상가스 주입장치