DK1014077T3 - Method for Structural Analysis of Polycrystalline Solid Specimens - Google Patents
Method for Structural Analysis of Polycrystalline Solid SpecimensInfo
- Publication number
- DK1014077T3 DK1014077T3 DK99121800T DK99121800T DK1014077T3 DK 1014077 T3 DK1014077 T3 DK 1014077T3 DK 99121800 T DK99121800 T DK 99121800T DK 99121800 T DK99121800 T DK 99121800T DK 1014077 T3 DK1014077 T3 DK 1014077T3
- Authority
- DK
- Denmark
- Prior art keywords
- structural analysis
- polycrystalline solid
- solid specimens
- specimens
- polycrystalline
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20058—Measuring diffraction of electrons, e.g. low energy electron diffraction [LEED] method or reflection high energy electron diffraction [RHEED] method
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/25—Tubes for localised analysis using electron or ion beams
- H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
- H01J2237/2538—Low energy electron microscopy [LEEM]
- H01J2237/2544—Diffraction [LEED]
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1998159906 DE19859906C1 (en) | 1998-12-24 | 1998-12-24 | Structural analysis method on polycrystalline solid samples |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK1014077T3 true DK1014077T3 (en) | 2004-06-28 |
Family
ID=7892566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK99121800T DK1014077T3 (en) | 1998-12-24 | 1999-11-02 | Method for Structural Analysis of Polycrystalline Solid Specimens |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1014077B1 (en) |
| DE (1) | DE19859906C1 (en) |
| DK (1) | DK1014077T3 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5466934A (en) * | 1995-01-18 | 1995-11-14 | Adams; Brent L. | Method and apparatus for identification of crystallographic defects |
| US5557104A (en) * | 1995-10-24 | 1996-09-17 | Texsem Laboratories, Inc. | Method and apparatus for determining crystallographic characteristics in response to confidence factors |
-
1998
- 1998-12-24 DE DE1998159906 patent/DE19859906C1/en not_active Expired - Fee Related
-
1999
- 1999-11-02 EP EP19990121800 patent/EP1014077B1/en not_active Expired - Lifetime
- 1999-11-02 DK DK99121800T patent/DK1014077T3/en active
Also Published As
| Publication number | Publication date |
|---|---|
| EP1014077B1 (en) | 2004-03-03 |
| DE19859906C1 (en) | 2000-07-27 |
| EP1014077A3 (en) | 2002-12-11 |
| EP1014077A2 (en) | 2000-06-28 |
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