DEP0000606BA - Corpuscular beam apparatus used for examining objects - Google Patents

Corpuscular beam apparatus used for examining objects

Info

Publication number
DEP0000606BA
DEP0000606BA DEP0000606BA DE P0000606B A DEP0000606B A DE P0000606BA DE P0000606B A DEP0000606B A DE P0000606BA
Authority
DE
Germany
Prior art keywords
apparatus used
beam apparatus
corpuscular beam
examining objects
sit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
German (de)
Inventor
Bodo Dr.-Ing. von Bornes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Original Assignee
Siemens and Halske AG
Publication date

Links

Description

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