DE9400896U1 - Radiation and receiving device - Google Patents

Radiation and receiving device

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Publication number
DE9400896U1
DE9400896U1 DE9400896U DE9400896U DE9400896U1 DE 9400896 U1 DE9400896 U1 DE 9400896U1 DE 9400896 U DE9400896 U DE 9400896U DE 9400896 U DE9400896 U DE 9400896U DE 9400896 U1 DE9400896 U1 DE 9400896U1
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DE
Germany
Prior art keywords
radiation
fiber
components
photoelectric
reception device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9400896U
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German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Priority to DE9400896U priority Critical patent/DE9400896U1/en
Publication of DE9400896U1 publication Critical patent/DE9400896U1/en
Priority to DE29500373U priority patent/DE29500373U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29361Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/14Beam splitting or combining systems operating by reflection only
    • G02B27/145Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2817Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using reflective elements to split or combine optical signals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4246Bidirectionally operating package structures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Fire-Detection Mechanisms (AREA)

Description

Strahlungs- und EmpfangsvorrichtungRadiation and reception device

Die Neuerung betrifft eine Strahlungs- und Empfangsvorrichtung für einen faseroptischen Sensor, welche die von einer lichtelektrischen Strahlungsquelle emittierte Strahlung in eine zu einem Sensorkopf gehende Faser leitet und die aus dieser Faser zurückkommende Strahlung auf einen lichtelektrischen Empfänger leitet, bestehend aus einem Filter mit wellenlängenabhängiger Transmission und Reflexion, sowie optischen Bauteilen zur Kollimierung oder Fokussierung, zur Weiterleitung und zur Strahlteilung oder -zusammenführung.The innovation concerns a radiation and reception device for a fiber optic sensor, which directs the radiation emitted by a photoelectric radiation source into a fiber going to a sensor head and directs the radiation returning from this fiber to a photoelectric receiver, consisting of a filter with wavelength-dependent transmission and reflection, as well as optical components for collimation or focusing, for forwarding and for beam splitting or merging.

Eine solche gattungsgemäße Strahlungs- und Empfangsvorrichtung ist aus DE 40 33 187 bekannt, deren Inhalt auch zur Offenbarung dieser Anmeldung gehört. Alle optischen Bauteile sind prismatische oder zylindrische Körper, wobei GRIN-Linsen und Faserstücke wegen ihres geringen Durchmessers in Schutzrohre eingebettet sind. Die Bauteile stoßen mit Planflächen aneinander. Herkömmlich wird die gesamte Vorrichtung auf einen präzise gefrästen Montagerahmen mit Klebverbindungen in einer Justiervorrichtung montiert, wobei die Montageplatte mit einem Deckel zusammen ein schützendes Gehäuse bildet.Such a generic radiation and reception device is known from DE 40 33 187, the content of which is also part of the disclosure of this application. All optical components are prismatic or cylindrical bodies, with GRIN lenses and fiber pieces being embedded in protective tubes due to their small diameter. The components abut one another with flat surfaces. Conventionally, the entire device is mounted on a precisely milled mounting frame with adhesive connections in an adjustment device, with the mounting plate forming a protective housing together with a cover.

Die Herstellung des Montagerahmens ist aufwendig und die komplette Vorrichtung mit Montageplatte und Deckel ist beträchtlich voluminöser als die eigentliche optische Vorrichtung.The production of the mounting frame is complex and the complete device with mounting plate and cover is considerably more voluminous than the actual optical device.

US 5 026 160 beschreibt ein Diodenzeilenspektrometer, bei dem alle Funktionsteile, Lichtleitfaser, Spiegel, Gitter, Photodiodenzeile mit einem Glasblock, in dem die LichtpfadeUS 5 026 160 describes a diode array spectrometer in which all functional parts, optical fiber, mirror, grating, photodiode array are connected to a glass block in which the light paths

verlaufen, verklebt sind und auf einen Montagerahmen verzichtet wird.run, are glued and a mounting frame is omitted.

US 5 101 465 beschreibt die Verwendung einer speziell ausgebildeten Leiterbahn-Platine zur Verbindung eines optoelektronischen Elements, z.B. LED, mit einer Lichtleitfaser, wobei auch die Integration einer Linse vorgesehen ist, sowie die Verkapselung der Einheit mit Kunststoff. Auf einen Komponententräger (submount) für die Optik wird ausdrücklich verzichtet.US 5 101 465 describes the use of a specially designed circuit board to connect an optoelectronic element, e.g. LED, to an optical fiber, whereby the integration of a lens is also provided for, as well as the encapsulation of the unit with plastic. A component carrier (submount) for the optics is expressly dispensed with.

Es ist die Aufgabe der Neuerung, eine gattungsgemäße Vorrichtung zu verkleinern, vereinfachen und verbilligen.The aim of the innovation is to make a generic device smaller, simpler and cheaper.

Überraschend wurde festgestellt, daß eine gattungsgemäße Vorrichtung ohne fest vorbundenen Montagerahmen gut mit den bekannten Verfahren des Richtkittens bzw. der Montage mit Lehren und abnehmbaren Halterungen montiert werden kann und daß diese allein durch die gegenseitige Verklebung der Bauteile zumindest für die stationäre Verwendung stabil genug ist.Surprisingly, it was found that a device of this type without a fixed mounting frame can be easily assembled using the known methods of aligning cement or assembly with gauges and removable brackets and that it is stable enough, at least for stationary use, simply by gluing the components together.

Gemäß der Neuerung ist daher die gesamte gattungsgemäße Vorrichtung einschließlich Faser ohne Montagerahmen und Gehäuse aufgebaut und die optischen und lichtelektrischen Bauteile sind lediglich miteinander verklebt.According to the innovation, the entire generic device, including fiber, is constructed without a mounting frame and housing and the optical and photoelectric components are simply glued together.

Die besonders dünnen Bauteile wie GRIN-Linsen und kurze Lichtleitfaserstücke sind wie auch bei der vorbekannten Vorrichtung vorteilhaft mit Schutz- und Tragstrukturen mit den ungefähren Querschnitten der anderen Bauteile, z.B. Prismen, versehen.As with the previously known device, the particularly thin components such as GRIN lenses and short pieces of optical fiber are advantageously provided with protective and supporting structures with the approximate cross-sections of the other components, e.g. prisms.

Einen zusätzlichen Schutz gegen Fremdlicht, chemische Einflüsse und mechanische Beanspruchung wird sehrAdditional protection against external light, chemical influences and mechanical stress is very

kostengünstig mit einem insbesondere durch Tauchen aufgebrachten Kunststoff-Überzug erreicht.This can be achieved cost-effectively using a plastic coating, particularly one applied by dipping.

In ein System integriert wird die Vorrichtung in vorteilhafter Weise durch Verbindung der elektrischen Anschlußdrähte der lichtelektrischen Bauteile mit einer Leiterplatte.The device is advantageously integrated into a system by connecting the electrical connecting wires of the photoelectric components to a circuit board.

Anhand der Zeichnung, welche ein Ausführungsbeispiel schematisch zeigt, wird die Neuerung erläutert.The innovation is explained using the drawing, which schematically shows an embodiment.

Die Zeichnung entspricht zunächst der Figur 1 aus der DE 40 33 187 und zeigt die gleichen optischen und lichtelektrischen Bauteile in gleicher Wirkverbindung, nämlich Strahlungsquellen (Laserdioden) (L1, L2)/ lichtelektrische Empfänger (D1, D2) , Filter (OF), GRIN-Linsen (Gl, G2, G3, G4), Strahlteiler (Tl, T2, T3, T4), Faser (FA) und Bauteile zur Weiterleitung. (FS, 14, 14t, 14z, 15t, 15z, 16, 17, 18, 19). Alle diese Bauteile sind aus transparenten Optik-Werkstoffen in bekannter Weise gefertigt und in bekannter Weise mit bekannten Klebstoffen in justierter Lage miteinander verklebt. Die Verklebung erfolgt z.B. mit dem bekannten Verfahren des Richtkittens.The drawing corresponds to Figure 1 from DE 40 33 187 and shows the same optical and photoelectric components in the same functional connection, namely radiation sources (laser diodes) (L 1 , L2)/photoelectric receivers (D 1 , D 2 ), filters (OF), GRIN lenses (Gl, G2, G3, G4), beam splitters (Tl, T2, T3, T4), fibers (FA) and components for transmission (FS, 14, 14t, 14z, 15t, 15z, 16, 17, 18, 19). All of these components are made from transparent optical materials in a known manner and are glued together in an adjusted position in a known manner using known adhesives. The bonding is carried out, for example, using the well-known method of aligning cement.

Beispielhaft ist die Klebestelle von GRIN-Linse (Gl) zu dem das Filter (DF) als Dünnschicht tragenden Prisma (14z) als Klebewulst (KW) dargestellt, der einen kompletten Ring oder nur einzelne Tropfen bilden kann, und der die Berührungsfläche der beiden Bauteile (Gl) und (14z), die allerdings einen Luftspalt aufweisen kann, frei läßt.As an example, the bonding point of the GRIN lens (Gl) to the prism (14z) carrying the filter (DF) as a thin film is shown as an adhesive bead (KW), which can form a complete ring or only individual drops, and which leaves the contact surface of the two components (Gl) and (14z), which can, however, have an air gap, free.

Eine andere Ausführung der Klebestelle ist beispielhaft an der Verbindung des Bauteils zur Weiterleitung (Zylinder oder Quader) (18) zum Strahlteilerwürfel (17) mit Strahlteiler-Schicht (T3) als den ganzen Querschnitt ausfüllende Kittschicht (KS) dargestellt. Hierbei muß der KleberAnother design of the bonding point is shown as an example in the connection of the component for forwarding (cylinder or cuboid) (18) to the beam splitter cube (17) with beam splitter layer (T3) as a putty layer (KS) filling the entire cross-section. In this case, the adhesive must

bestimmte Anforderungen an Absorption, Brechungsindex und Homogenität erfüllen, um die Lichttransmission nicht zu stören.meet certain requirements regarding absorption, refractive index and homogeneity in order not to disturb the light transmission.

An allen Übergängen zwischen zwei Bauteilen können diese beiden oder andere Klebetechniken im Rahmen der Neuerung beliebig angewendet werden.These two or other bonding techniques can be used at any transition between two components within the scope of the innovation.

Die gesamte Vorrichtung ist ca. 4 cm lang und besteht aus 22 miteinander verklebten Bauteilen.The entire device is approximately 4 cm long and consists of 22 components glued together.

Vorteilhaft ist der dargestellte Überzug (C) mit einem Kunststoff, z.B. einer schwarzen Silikonmasse, der einfach durch Tauchen aufgebracht werden kann. Solche Überzüge sind in der Elektronikfertigung gängig. Damit kann Störlicht abgehalten werden, chemische Veränderungen der Klebestellen und der freien Bauteiloberflächen können verhindert werden und der gesamte Aufbau wird mechanisch verstärkt und bei entsprechender Elastizität des Überzugs (C) auch gegen mechanische Schocks gedämpft.The coating shown (C) with a plastic, e.g. a black silicone compound, which can be applied simply by dipping, is advantageous. Such coatings are common in electronics manufacturing. They can block out stray light, prevent chemical changes to the bonding points and the exposed component surfaces, and mechanically strengthen the entire structure and, if the coating (C) is sufficiently elastic, also cushion it against mechanical shocks.

Die Integration der Strahlungs- und Empfangsvorrichtung in ein elektrooptisches Gesamtsystem etwa eines Meßgeräts kann kostengünstig dadurch erfolgen, daß lediglich die elektrischen Anschlußdrählte der lichtelektrischen Bauteile (Li, L2/ Di) mit einer Leiterplatte (P) verlötet sind. Der lichtelektrische Empfänger (D2) ist im gezeigten Beispiel aus räumlichen Gründen auf andere Weise an die Schaltung des Meßgeräts angeschlossen.The integration of the radiation and reception device into an overall electro-optical system, such as a measuring device, can be carried out cost-effectively by simply soldering the electrical connecting wires of the photoelectric components (Li, L2/Di) to a circuit board (P). In the example shown, the photoelectric receiver (D2) is connected to the circuit of the measuring device in a different way for spatial reasons.

Natürlich kann auch die komplette Leiterplatte mit angeschlossener Vorrichtung in die Überzugsmasse eingetaucht werden.Of course, the entire circuit board with the connected device can also be immersed in the coating compound.

• ··

Die Neuerung betrifft nicht nur die beispielhaft gezeigte Ausführung, sondern alle gattungsgemäßen Strahlungs- und Empfangsvorrichtungen.The innovation affects not only the exemplary embodiment shown, but all radiation and reception devices of this type.

Claims (4)

Schutzansprüche:Protection claims: 1. Strahlungs- und Empfangsvorrichtung für einen faseroptischen Sensor, welche die von einer lichtelektrischen Strahlungsquelle (L^) emittierte Strahlung in eine zu einem Sensorkopf gehende Faser (FA) leitet und die aus dieser Faser (FA) zurückkommende Strahlung auf einen lichtelektrischen Empfänger (D]_) leitet, bestehend aus einem Filter (DF) mit wellenlängenabhängiger Transmission und Reflexion, sowie optischen Bauteilen zur Kollimierung oder Fokussierung (Gl, G2, G4, G4), zur Weiterleitung (FS, 14, 14t, 14z, 18, 19) und zur Strahlteilung oder -zusammenführung (15z, 15t, 16, 17, Tl, T2, T3) dadurch gekennzeichnet, daß die gesamte Vorrichtung einschließlich Faser (FA) ohne Montagerahmen und Gehäuse aufgebaut ist und die optischen und lichtelektrischen Bauteile miteinander verklebt sind.1. Radiation and reception device for a fiber optic sensor, which directs the radiation emitted by a photoelectric radiation source (L^) into a fiber (FA) going to a sensor head and directs the radiation coming back from this fiber (FA) to a photoelectric receiver (D]_), consisting of a filter (DF) with wavelength-dependent transmission and reflection, as well as optical components for collimation or focusing (Gl, G2, G4, G4), for forwarding (FS, 14, 14t, 14z, 18, 19) and for beam splitting or combining (15z, 15t, 16, 17, Tl, T2, T3), characterized in that the entire device including fiber (FA) is constructed without a mounting frame and housing and the optical and photoelectric components are glued together. 2. Strahlungs- und Empfangsvorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß einzelne optische Bauteile, insbesondere Linsen (Gl, G2, G3) und Lichtleitfaserstücke (FS) mit Schutz- und Tragstrukturen versehen sind.2. Radiation and reception device according to claim 1, characterized in that individual optical components, in particular lenses (Gl, G2, G3) and optical fiber pieces (FS) are provided with protective and supporting structures. 3. Strahlungs- und Empfangsvorrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß sie mit einem Überzug, insbesondere einem durch Tauchen aufgebrachten Kunststoff-Überzug (C), ummantelt ist.3. Radiation and reception device according to claim 1 or 2, characterized in that it is covered with a coating, in particular a plastic coating (C) applied by dipping. 4. Strahlungs- und Empfangsvorrichtung nach mindestens einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß sie mittels der elektrischen Anschlußfahnen der lichtelektrischen Bauteile (L^, L2, D^) auf eine Leiterplatte (P) montiert ist.4. Radiation and reception device according to at least one of claims 1 to 3, characterized in that it is mounted on a circuit board (P) by means of the electrical connection lugs of the photoelectric components (L^, L2, D^).
DE9400896U 1994-01-20 1994-01-20 Radiation and receiving device Expired - Lifetime DE9400896U1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE9400896U DE9400896U1 (en) 1994-01-20 1994-01-20 Radiation and receiving device
DE29500373U DE29500373U1 (en) 1994-01-20 1995-01-11 Radiation and receiving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9400896U DE9400896U1 (en) 1994-01-20 1994-01-20 Radiation and receiving device

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DE9400896U1 true DE9400896U1 (en) 1994-03-03

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DE9400896U Expired - Lifetime DE9400896U1 (en) 1994-01-20 1994-01-20 Radiation and receiving device
DE29500373U Expired - Lifetime DE29500373U1 (en) 1994-01-20 1995-01-11 Radiation and receiving device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19640423C1 (en) * 1996-09-30 1998-03-26 Siemens Ag Optoelectronic module for bidirectional optical data transmission

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2775774B1 (en) 1998-03-06 2000-04-14 Schneider Electric Ind Sa MEASURING PROBE INCLUDING AT LEAST ONE OPTICAL FIBER, MEASURING DEVICE AND INSTALLATION INCLUDING AT LEAST ONE SUCH PROBE

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19640423C1 (en) * 1996-09-30 1998-03-26 Siemens Ag Optoelectronic module for bidirectional optical data transmission
EP0833175A2 (en) * 1996-09-30 1998-04-01 Siemens Aktiengesellschaft Opto-electronic module for bidirectional optical transmission
EP0833175A3 (en) * 1996-09-30 1999-02-03 Siemens Aktiengesellschaft Opto-electronic module for bidirectional optical transmission
US6021238A (en) * 1996-09-30 2000-02-01 Simens Aktiengesellschaft Optoelectronic module for bidirectional optical data transmission

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Publication number Publication date
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