DE9304435U1 - - Google Patents

Info

Publication number
DE9304435U1
DE9304435U1 DE9304435U DE9304435U DE9304435U1 DE 9304435 U1 DE9304435 U1 DE 9304435U1 DE 9304435 U DE9304435 U DE 9304435U DE 9304435 U DE9304435 U DE 9304435U DE 9304435 U1 DE9304435 U1 DE 9304435U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9304435U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE9304435U priority Critical patent/DE9304435U1/de
Publication of DE9304435U1 publication Critical patent/DE9304435U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00Flanged joints
    • F16L23/16Flanged joints characterised by the sealing means
    • F16L23/18Flanged joints characterised by the sealing means the sealing means being rings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/08Sealings
    • F04D29/083Sealings especially adapted for elastic fluid pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00Flanged joints
    • F16L23/02Flanged joints the flanges being connected by members tensioned axially
    • F16L23/036Flanged joints the flanges being connected by members tensioned axially characterised by the tensioning members, e.g. specially adapted bolts or C-clamps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00Flanged joints
    • F16L23/16Flanged joints characterised by the sealing means
DE9304435U 1993-03-24 1993-03-24 Expired - Lifetime DE9304435U1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9304435U DE9304435U1 (zh) 1993-03-24 1993-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9304435U DE9304435U1 (zh) 1993-03-24 1993-03-24

Publications (1)

Publication Number Publication Date
DE9304435U1 true DE9304435U1 (zh) 1993-06-09

Family

ID=6891130

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9304435U Expired - Lifetime DE9304435U1 (zh) 1993-03-24 1993-03-24

Country Status (1)

Country Link
DE (1) DE9304435U1 (zh)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold Ag Reibungsvakuumpumpe mit Zwischeneinlaß
WO1998057088A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
EP1519048A2 (de) * 2003-09-26 2005-03-30 Elektror M. Müller GmbH Seitenkanalverdichter
EP1837521A1 (en) * 2004-12-20 2007-09-26 BOC Edwards Japan Limited Structure for connecting end parts and vacuum system using the structure
WO2008104314A1 (de) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder vakuumapparatur mit vakuumpumpe
GB2504329A (en) * 2012-07-26 2014-01-29 Edwards Ltd Ultra high vacuum pump seal arrangement
EP2789889A1 (de) * 2013-04-11 2014-10-15 Pfeiffer Vacuum GmbH Vakuumsystem
DE102014110078A1 (de) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh Vakuumsystem
GB2549335A (en) * 2016-04-15 2017-10-18 Micromass Ltd A sealing arrangement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2817665A1 (de) * 1978-04-19 1979-10-31 Hahn Meitner Kernforsch Abdichtung zwischen ruhend aneinander liegenden dichtungsflaechen
DE3225361C2 (de) * 1982-07-07 1984-04-26 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur Herstellung einer Metalldichtung für Flanschverbindungen
DE3144578C2 (de) * 1981-11-10 1985-02-14 Kempchen & Co Gmbh, 4200 Oberhausen Dichtungsanordnung, insbesondere Flanschdichtungsanordnung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2817665A1 (de) * 1978-04-19 1979-10-31 Hahn Meitner Kernforsch Abdichtung zwischen ruhend aneinander liegenden dichtungsflaechen
DE3144578C2 (de) * 1981-11-10 1985-02-14 Kempchen & Co Gmbh, 4200 Oberhausen Dichtungsanordnung, insbesondere Flanschdichtungsanordnung
DE3225361C2 (de) * 1982-07-07 1984-04-26 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur Herstellung einer Metalldichtung für Flanschverbindungen

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997015760A1 (de) * 1995-10-20 1997-05-01 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit zwischeneinlass
US6030189A (en) * 1995-10-20 2000-02-29 Leybold Vakuum Gmbh Friction vacuum pump with intermediate inlet
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold Ag Reibungsvakuumpumpe mit Zwischeneinlaß
WO1998057088A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
US6814550B1 (en) 2000-01-15 2004-11-09 Leybold Vakuum Gmbh Vacuum pump with vibration absorber
EP1519048A3 (de) * 2003-09-26 2008-04-09 Elektror M. Müller GmbH Seitenkanalverdichter
EP1519048A2 (de) * 2003-09-26 2005-03-30 Elektror M. Müller GmbH Seitenkanalverdichter
EP1837521A4 (en) * 2004-12-20 2009-04-15 Edwards Japan Ltd STRUCTURE FOR CONNECTING END PARTS AND VACUUM SYSTEM USING THIS STRUCTURE
EP1837521A1 (en) * 2004-12-20 2007-09-26 BOC Edwards Japan Limited Structure for connecting end parts and vacuum system using the structure
WO2008104314A1 (de) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder vakuumapparatur mit vakuumpumpe
GB2459233A (en) * 2007-02-28 2009-10-21 Thermo Fisher Scient Vacuum pump or vacuum apparatus having a vacuum pump
GB2459233B (en) * 2007-02-28 2011-09-28 Thermo Fisher Scient Vacuum pump or vacuum apparatus having a vacuum pump
US8529218B2 (en) 2007-02-28 2013-09-10 Thermo Fisher Scientific (Bremen) Gmbh Vacuum pump having nested chambers associated with a mass spectrometer
US8858188B2 (en) 2007-02-28 2014-10-14 Thermo Fisher Scientific (Bremen) Gmbh Vacuum pump or vacuum apparatus with vacuum pump
WO2014016551A1 (en) * 2012-07-26 2014-01-30 Edwards Limited Sealing arrangement
GB2504329A (en) * 2012-07-26 2014-01-29 Edwards Ltd Ultra high vacuum pump seal arrangement
EP2789889A1 (de) * 2013-04-11 2014-10-15 Pfeiffer Vacuum GmbH Vakuumsystem
CN104100715A (zh) * 2013-04-11 2014-10-15 普发真空有限公司 真空系统
CN104100715B (zh) * 2013-04-11 2017-04-12 普发真空有限公司 真空系统
DE102014110078A1 (de) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh Vakuumsystem
GB2549335A (en) * 2016-04-15 2017-10-18 Micromass Ltd A sealing arrangement

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