DE9218275U1 - Lichtelektrische Längen- oder Winkelmeßeinrichtung - Google Patents

Lichtelektrische Längen- oder Winkelmeßeinrichtung

Info

Publication number
DE9218275U1
DE9218275U1 DE9218275U DE9218275U DE9218275U1 DE 9218275 U1 DE9218275 U1 DE 9218275U1 DE 9218275 U DE9218275 U DE 9218275U DE 9218275 U DE9218275 U DE 9218275U DE 9218275 U1 DE9218275 U1 DE 9218275U1
Authority
DE
Germany
Prior art keywords
photodetectors
measuring device
partial beams
grating
angle measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9218275U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE9218275U priority Critical patent/DE9218275U1/de
Priority to DE4221165A priority patent/DE4221165C1/de
Priority to EP92112487A priority patent/EP0576720B1/de
Priority to JP5153932A priority patent/JP2577182B2/ja
Publication of DE9218275U1 publication Critical patent/DE9218275U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
DE9218275U 1992-06-27 1992-06-27 Lichtelektrische Längen- oder Winkelmeßeinrichtung Expired - Lifetime DE9218275U1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE9218275U DE9218275U1 (de) 1992-06-27 1992-06-27 Lichtelektrische Längen- oder Winkelmeßeinrichtung
DE4221165A DE4221165C1 (de) 1992-06-27 1992-06-27 Lichtelektrische Längen- oder Winkelmeßeinrichtung
EP92112487A EP0576720B1 (de) 1992-06-27 1992-07-21 Optische Anordnung
JP5153932A JP2577182B2 (ja) 1992-06-27 1993-06-24 位置測定装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE9218275U DE9218275U1 (de) 1992-06-27 1992-06-27 Lichtelektrische Längen- oder Winkelmeßeinrichtung
DE4221165A DE4221165C1 (de) 1992-06-27 1992-06-27 Lichtelektrische Längen- oder Winkelmeßeinrichtung

Publications (1)

Publication Number Publication Date
DE9218275U1 true DE9218275U1 (de) 1993-11-04

Family

ID=25916083

Family Applications (2)

Application Number Title Priority Date Filing Date
DE9218275U Expired - Lifetime DE9218275U1 (de) 1992-06-27 1992-06-27 Lichtelektrische Längen- oder Winkelmeßeinrichtung
DE4221165A Expired - Fee Related DE4221165C1 (de) 1992-06-27 1992-06-27 Lichtelektrische Längen- oder Winkelmeßeinrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE4221165A Expired - Fee Related DE4221165C1 (de) 1992-06-27 1992-06-27 Lichtelektrische Längen- oder Winkelmeßeinrichtung

Country Status (2)

Country Link
EP (1) EP0576720B1 (https=)
DE (2) DE9218275U1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19511068A1 (de) 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2451668A1 (de) * 1974-10-31 1976-05-06 Leitz Ernst Gmbh Anordnung zur geometrischen trennung von lichtfluessen in abbildungssystemen
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
DE3834676A1 (de) * 1988-10-12 1990-04-19 Heidenhain Gmbh Dr Johannes Photoelektrische positionsmesseinrichtung

Also Published As

Publication number Publication date
EP0576720A3 (https=) 1994-04-13
EP0576720A2 (de) 1994-01-05
DE4221165C1 (de) 1994-01-20
EP0576720B1 (de) 1996-03-27

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