DE9210462U1 - - Google Patents
Info
- Publication number
- DE9210462U1 DE9210462U1 DE9210462U DE9210462U DE9210462U1 DE 9210462 U1 DE9210462 U1 DE 9210462U1 DE 9210462 U DE9210462 U DE 9210462U DE 9210462 U DE9210462 U DE 9210462U DE 9210462 U1 DE9210462 U1 DE 9210462U1
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
- G03F7/2024—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure of the already developed image
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9210462U DE9210462U1 (de) | 1992-08-05 | 1992-08-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9210462U DE9210462U1 (de) | 1992-08-05 | 1992-08-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE9210462U1 true DE9210462U1 (de) | 1992-09-24 |
Family
ID=6882351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE9210462U Expired - Lifetime DE9210462U1 (de) | 1992-08-05 | 1992-08-05 |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE9210462U1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0582253A2 (de) * | 1992-08-05 | 1994-02-09 | Hoechst Aktiengesellschaft | Nachbehandlungsgerät für bildmässig belichtete Druckplatten |
DE10035430B4 (de) * | 2000-07-20 | 2005-06-16 | Advanced Photonics Technologies Ag | Verfahren und Vorrichtung zur thermischen Behandlung einer Fotolackschicht auf einem Schaltungssubstrat, insbesondere Halbleiterwafer |
-
1992
- 1992-08-05 DE DE9210462U patent/DE9210462U1/de not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0582253A2 (de) * | 1992-08-05 | 1994-02-09 | Hoechst Aktiengesellschaft | Nachbehandlungsgerät für bildmässig belichtete Druckplatten |
EP0582253A3 (en) * | 1992-08-05 | 1994-06-22 | Hoechst Ag | Apparatus for the posttreatment of image-wise exposed printing plates |
DE10035430B4 (de) * | 2000-07-20 | 2005-06-16 | Advanced Photonics Technologies Ag | Verfahren und Vorrichtung zur thermischen Behandlung einer Fotolackschicht auf einem Schaltungssubstrat, insbesondere Halbleiterwafer |