DE9114253U1 - - Google Patents

Info

Publication number
DE9114253U1
DE9114253U1 DE9114253U DE9114253U DE9114253U1 DE 9114253 U1 DE9114253 U1 DE 9114253U1 DE 9114253 U DE9114253 U DE 9114253U DE 9114253 U DE9114253 U DE 9114253U DE 9114253 U1 DE9114253 U1 DE 9114253U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9114253U
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VTD Vakuumtechnik Dresden GmbH
Original Assignee
VTD Vakuumtechnik Dresden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VTD Vakuumtechnik Dresden GmbH filed Critical VTD Vakuumtechnik Dresden GmbH
Priority to DE9114253U priority Critical patent/DE9114253U1/de
Publication of DE9114253U1 publication Critical patent/DE9114253U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
DE9114253U 1991-11-15 1991-11-15 Expired - Lifetime DE9114253U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9114253U DE9114253U1 (de) 1991-11-15 1991-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9114253U DE9114253U1 (de) 1991-11-15 1991-11-15

Publications (1)

Publication Number Publication Date
DE9114253U1 true DE9114253U1 (de) 1992-01-16

Family

ID=6873336

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9114253U Expired - Lifetime DE9114253U1 (de) 1991-11-15 1991-11-15

Country Status (1)

Country Link
DE (1) DE9114253U1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4305748A1 (de) * 1993-02-25 1994-09-01 Leybold Ag Vorrichtung zum Beschichten und/oder Ätzen von Substraten in einer Vakuumkammer
DE102006043394A1 (de) * 2006-09-12 2008-03-27 Creavac - Creative Vakuumbeschichtung Gmbh Einrichtung zur schnellen und automatischen Vakuumbeschichtung von Massengütern als Werkstücke

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Leybold-Prospekt: Hochvakuum-Aufdampfanlage A 11 v.10.1.1953 *
Leybold-Prospekt: Metallisierungsanlagen A 650 H ... A 2500 H, v.5.12.1977, S.6-7 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4305748A1 (de) * 1993-02-25 1994-09-01 Leybold Ag Vorrichtung zum Beschichten und/oder Ätzen von Substraten in einer Vakuumkammer
US5429705A (en) * 1993-02-25 1995-07-04 Leybold Aktiengesellschaft Apparatus for coating and/or etching substrates in a vacuum chamber
DE102006043394A1 (de) * 2006-09-12 2008-03-27 Creavac - Creative Vakuumbeschichtung Gmbh Einrichtung zur schnellen und automatischen Vakuumbeschichtung von Massengütern als Werkstücke

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