DE9007614U1 - Winkelmeßeinrichtung - Google Patents
WinkelmeßeinrichtungInfo
- Publication number
- DE9007614U1 DE9007614U1 DE9007614U DE9007614U DE9007614U1 DE 9007614 U1 DE9007614 U1 DE 9007614U1 DE 9007614 U DE9007614 U DE 9007614U DE 9007614 U DE9007614 U DE 9007614U DE 9007614 U1 DE9007614 U1 DE 9007614U1
- Authority
- DE
- Germany
- Prior art keywords
- grating
- measuring device
- angle measuring
- coupling
- correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008878 coupling Effects 0.000 claims description 13
- 238000010168 coupling process Methods 0.000 claims description 13
- 238000005859 coupling reaction Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9007614U DE9007614U1 (de) | 1990-04-27 | 1990-04-27 | Winkelmeßeinrichtung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9007614U DE9007614U1 (de) | 1990-04-27 | 1990-04-27 | Winkelmeßeinrichtung |
DE4013566A DE4013566A1 (de) | 1990-04-27 | 1990-04-27 | Winkelmesseinrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
DE9007614U1 true DE9007614U1 (de) | 1993-04-08 |
Family
ID=25892633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE9007614U Expired - Lifetime DE9007614U1 (de) | 1990-04-27 | 1990-04-27 | Winkelmeßeinrichtung |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE9007614U1 (ja) |
-
1990
- 1990-04-27 DE DE9007614U patent/DE9007614U1/de not_active Expired - Lifetime
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