DE743728C - Process for the production of metallization patterns by metal vapor deposition in a vacuum - Google Patents
Process for the production of metallization patterns by metal vapor deposition in a vacuumInfo
- Publication number
- DE743728C DE743728C DEB197856D DEB0197856D DE743728C DE 743728 C DE743728 C DE 743728C DE B197856 D DEB197856 D DE B197856D DE B0197856 D DEB0197856 D DE B0197856D DE 743728 C DE743728 C DE 743728C
- Authority
- DE
- Germany
- Prior art keywords
- condensation
- metal vapor
- vacuum
- local heating
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 title claims description 19
- 238000000034 method Methods 0.000 title claims description 8
- 238000007740 vapor deposition Methods 0.000 title claims description 5
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 238000001465 metallisation Methods 0.000 title claims description 4
- 239000000126 substance Substances 0.000 claims description 8
- 238000009833 condensation Methods 0.000 claims description 7
- 230000005494 condensation Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 235000014593 oils and fats Nutrition 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B44—DECORATIVE ARTS
- B44C—PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
- B44C1/00—Processes, not specifically provided for elsewhere, for producing decorative surface effects
- B44C1/04—Producing precipitations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
Verfahren zur Herstellung von Metallisierungsmustern durch Metallbedampfung im Vakuum Bei der Herstellung von dünnen Metallschichten durch Bedampfen von Unterlagen im Vakuum sind oft Muster erwünscht, d. h. die Metallschicht soll nicht gleichmäßig zusammenhängen, sondern an gewissen Stellen soll die Unterlage von Metall frei bleiben. Dieses wurde bisher in der Weise ausgeführt, daß man den Metalldampf von den freizuhaltenden Stellen durch Schablonen abhielt.- Beider Metallisierung laufender Bänder ist es jedoch umständlich, entsprechende Schablonen mitlaufen zu lassen. Auch wachsen die freien Stellen der Schablonen leicht mit Metall zu, da die Schablonen ja selbst dem Metalldampf ausgesetzt sind, sie müssen daher öfter ausgewechselt und gereinigt werden, um sauber begrenzte Muster zu ermöglichen.Process for the production of metallization patterns by metal vapor deposition in a vacuum In the production of thin metal layers by vapor deposition on substrates Patterns are often desired in a vacuum; H. the metal layer should not be uniform related, but at certain points the base should remain free of metal. This has so far been carried out in such a way that the metal vapor to be kept free Restrained places by templates However, it is difficult to run the corresponding templates. They grow too Free areas of the stencils can be easily covered with metal, since the stencils themselves are exposed to metal vapor, so they have to be replaced and cleaned more often to enable neatly delimited patterns.
Es wurde vorgeschlagen, an den von Metall freizulassenden Stellen Stoffe aufzutragen, die eine Bedampfung verhindern, z. B. öle und Fette lassen sich hierzu zweckmäßig auf die Unterlagebänder in jeder gewünschten Form auftragen. Zu diesem Zweck trägt man dünnste Schichten z. B. mit Druckwalzen- auf. - . Gemäß der Erfindung enthält nun die Unterlage selbst einen kondensationshindernden Stoff in solcher Menge, daß er an der Oberfläche der Unterlage in so geringer Konzentration vorhanden ist, daß er die Kondensation des Metalldampfes nicht verhindern kann. Durch lokale Erwärmung gelangt der kondensationshindernde Stoff in wirksamen Mengen an die Oberfläche der Unterlage und verhindert nun .die Kondensation des Metalldampfes an den Stellen., die man zum Zwecke der Bemusterung ausgewählt hatte.It has been suggested to be in the places to be exposed by metal To apply substances that prevent vaporization, e.g. B. oils and fats can For this purpose, it is advisable to apply it to the underlay tape in any desired shape. to for this purpose one wears the thinnest layers z. B. with pressure rollers. -. According to the Invention now contains a condensation-preventing substance in the pad itself such an amount that it is in such a low concentration on the surface of the substrate is present that it cannot prevent the condensation of the metal vapor. The anti-condensation substance arrives in effective quantities through local heating to the surface of the base and now prevents condensation of the metal vapor in the places that had been selected for the purpose of sampling.
Ein zu metallisierendes Band wird z. B. dadurch mit einem kondensationshindernden Stoff versehen, daß man gleichzeitig einen dünnen Lacküberzug aufträgt, welcher den kondensationshindernden Stoff in Form eines Lösungsmittels oder Weichmachers (C51) enthält. Das C51 ist nun an der Oberfläche des lackierten Bandes gar nicht oder in so geringer Konzentration vorhanden, daß es eine nachfolgende Metallbedampfung dieses Bandes nicht stören kann und die Unterlage an allen Stellen gleichmäßigen Metallbelag erhalten würde. ... . 1. A band to be metallized is z. B. thereby provided with a condensation-preventing substance that a thin lacquer coating is applied at the same time, which contains the condensation-preventing substance in the form of a solvent or plasticizer (C51). The C51 is now not present on the surface of the lacquered tape or is present in such a low concentration that it cannot interfere with subsequent metal vapor deposition of this tape and the base would have a uniform metal coating at all points. ... 1.
Druckt man jetzt durch Berührung z. B. mit einem wärfen S"tentpel ein Muster auf die lackierte Unterlage, so gelangt das 01 als konderi'sati@@ttsTi'in@lerri@Ier Stoff an die Oberfläche und verhindert an den bedruckten Stellen die Metallisierung. Diese Stellen bleiben von Metallbelag frei.If you now press z. B. with a warfen S "tentpel a sample on the lacquered surface, the 01 arrives as konderi'sati @@ ttsTi'in @ lerri @ Ier Fabric to the surface and prevents metallization on the printed areas. These areas remain free of metal deposits.
Kondensationshindernde Schichten brau nur äußerst dünn zu sein, z. B. von mole rer Größenordnung. Die Konzentration 6,1 #. Schichten läßt sich daher leicht mit einfach&b: Mitteln dosieren. Die Muster -neigen saubere Abgrenzungen, cla die an der Oberfläche im Vakuum verdampfende Menge des kondensationshindernden Stoffes verschwindend klein ist. Es kann nämlich bei zu stark aufgetragenen hondensa.tionsliindernden Schichten die lletallbedanipfung auch neben den von Metall freizulassenden Stellen gestört werden, weil der kondensationshindernde Stoff im Vakuum selbst größere Dampfmengen abgeben `kann. Bei den nach dein vorstehenden Verfahren erzeugten äußerst dünnen Schichten ist die Gefahr der Erschwerung einer Kondensation an den -Nachbarstellen nicht vorhanden.Anti-condensation layers only need to be extremely thin, e.g. B. of mole rer order of magnitude. The concentration 6.1 #. Layers can therefore be easily dosed with simple & b: means. The patterns tend to have clean delimitations, since the amount of the condensation-preventing substance evaporating on the surface in a vacuum is negligibly small. If the condensation-reducing layers are applied too thickly, the metal-to-metal contact can also be disturbed in addition to the areas to be left free of metal, because the condensation-preventing substance itself can give off large amounts of vapor in a vacuum. With the extremely thin layers produced by the above process, there is no risk of condensation being made difficult at the neighboring points.
Die Wärmeerzeugung an bestimmten begrenzten Stellen kann außer mit warmen Stempeln auch mit Elektronenstrahlen z. B. erfolgen, die man aus bekannten Erzeugern kommend in ebenfalls bekannter Weise steuern kann. Werden die Elektronenstrahlen z. B. durch magnetische Linsen in Strahlenbündel zusammengefaßt und in einem Brennfleck vereinigt, so kann der Brennfleck bzw. das Strahlenbündel bewegt werden, und nur die voni Brennfleck getroffenen Stellen auf der Unterlage werden erwärmt. In entsprechender Weise können Wärmestrahlen angewendet und gesteuert werden, z. B. in der Art wie beim Mechau-Projektor die optischen Strahlen projiziert «-erden.The heat generation in certain limited places can except with warm stamps also with electron beams z. B. be done, which is known from Generators can control coming in a known manner as well. Will the electron beams z. B. summarized by magnetic lenses in bundles of rays and in a focal spot combined, the focal spot or the bundle of rays can be moved, and only the areas on the substrate hit by the focal point are heated. In appropriate Heat rays can be applied and controlled, e.g. B. in the manner of in the Mechau projector, the optical beams are projected «-erden.
Claims (3)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL64341D NL64341C (en) | 1942-04-09 | ||
| DEB197856D DE743728C (en) | 1942-04-09 | 1942-04-09 | Process for the production of metallization patterns by metal vapor deposition in a vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEB197856D DE743728C (en) | 1942-04-09 | 1942-04-09 | Process for the production of metallization patterns by metal vapor deposition in a vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE743728C true DE743728C (en) | 1944-12-18 |
Family
ID=7012020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEB197856D Expired DE743728C (en) | 1942-04-09 | 1942-04-09 | Process for the production of metallization patterns by metal vapor deposition in a vacuum |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE743728C (en) |
| NL (1) | NL64341C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE949724C (en) * | 1952-03-09 | 1956-09-27 | Franke & Heidecke Fabrik Photo | Process for generating characters that only become visible when breathing on |
| DE1263449B (en) * | 1959-04-08 | 1968-03-14 | Siemens Ag | Process for the production of metallized insulating foils |
-
0
- NL NL64341D patent/NL64341C/xx active
-
1942
- 1942-04-09 DE DEB197856D patent/DE743728C/en not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| None * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE949724C (en) * | 1952-03-09 | 1956-09-27 | Franke & Heidecke Fabrik Photo | Process for generating characters that only become visible when breathing on |
| DE1263449B (en) * | 1959-04-08 | 1968-03-14 | Siemens Ag | Process for the production of metallized insulating foils |
Also Published As
| Publication number | Publication date |
|---|---|
| NL64341C (en) |
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