DE69937032T2 - Ink jet printhead and method of manufacture - Google Patents

Description

Background of the invention

These The invention relates to an ink-jet head containing ink of a nozzle hole ejects by an electrical voltage is applied to an electrode around the Shape the ink chamber forming a space to deform on A method of manufacturing the inkjet head on an inkjet printer and a method for manufacturing the inkjet printer.

It is a letter printing device by the ink jet method, which ink from a nozzle hole by applying an electrical voltage to an electrode ejects to the to deform an ink chamber forming partition wall.

If to get a high quality image recording at high speed using a conventional type of ink jet head, is an inkjet head with a large number of in a row arranged nozzle holes required. For this Type of inkjet head with a large number of in a row arranged nozzles is desirable from the viewpoint of practical application of the a high drive efficiency, a low weight, a low Price, good usability and high strength.

Further, since a polarized piezoelectric ceramic plate has a limit in length for manufacturing reasons, in practice, a plurality of ink chambers have been formed by partition walls in a polarized piezoelectric ceramic plate, and a plurality of such polarized piezoelectric ceramic plate having a plurality of ink chambers are arranged side by side and bonded by an adhesive , When connecting a plurality of polarized piezoelectric plates, however, it is difficult to adjust their positions so that the gaps between adjacent ink chambers at the connecting portions are kept the same, making it difficult to obtain a high-precision ink jet head. Such an ink-jet head and a method for the production thereof is disclosed in U.S. Pat EP-A-0565280 and JP 10-230600 disclosed.

Further was under inkjet heads of the split mode type, which ink by deforming the ink chamber eject an angled ink jet head known (chevron type ink jet pad) to perform a high-speed and high-quality image recording is desired; according to the conventional However, methods of making the angled head are polarized piezoelectric ceramic plates with multiple grooves or grooves side arranged side by side, and further polarized piezoelectric ceramic plates with grooves or grooves are superimposed on these and arranged on them, around an ink-jet head having a plurality of partition walls To form ink chambers; this requires complicated manufacturing work two piezoelectric plates coincident with each other Positions (of grooves), which makes it difficult to one high-precision To get an ink jet head.

Outline of the invention

These Invention was made in view of the points described above, and it is their object to provide an ink jet head and an ink jet printer able to provide a high-speed and high quality image recording perform and the cost-effective and are highly precise, and a process for their preparation.

Around to solve the above problems and to fulfill the task beats this invention provides the method of claim 1.

There according to this Structure are several piezoelectric base plates, which have a polarization is given, side by side on a non-piezoelectric base plate arranged, a plurality of grooves in each of the piezoelectric Base plates provided, and it is another non-piezoelectric Base plate provided on these piezoelectric base plates, so that several through partitions subdivided ink chambers are provided, wherein an ink chamber can be formed without reducing the position accuracy and it possible is to obtain a long-sized line head, which is inexpensive, a high precision and in its length direction elongated; thus, a high-speed and high-quality image recording carried out become.

According to this structure, since grooves are formed at the connecting portions of the plural piezoelectric base plates, the positional accuracy of the ink chamber can be further improved become.

There according to this Process the grooves at the connecting portions of the a plurality of piezoelectric base plates can be formed the ink jet head in which the positional accuracy of the ink chamber is further improved.

There according to a preferred embodiment this method, a piezoelectric base plate with at least two layers of a piezoelectric material containing different, have opposite polarization directions, on a non-piezoelectric base plate is laminated, the piezoelectric Base plate machined so that it grooves or grooves and then another non-piezoelectric base plate is placed on the provided piezoelectric base plates, so that several ink chambers, through partitions are provided, with ink chambers without deviation the grooves are formed in the piezoelectric base plates can, and a high-precision, long-sized line head manufactured at low cost can be.

There according to a another embodiment the piezoelectric base plates made of non-metallic material are made, the ink jet head, wherein the partitions of the Ink chamber more reliable deformed can be getting produced.

There according to a another embodiment the non-metallic one Material at least one of alumina, aluminum nitride, zirconium, Silicon, silicon hydride, silicon carbide and quartz is selected, For example, the ink jet head in which the piezoelectric base plates reliable are held, even if the partitions of an ink chamber deformed will be produced.

There according to a another embodiment a surface roughness the bonded surfaces between the non-piezoelectric base plate and the piezoelectric Base plates not larger than 1.0 μm, can the inkjet head be made where it is possible penetration of a soft high molecular weight adhesive (e.g. Epoxy resin) into the concave portions on the bonding surfaces prevent the layer thickness of the adhesive practically on one Minimum, and where it is possible a reduction the sensitivity and the increase in electrical voltage due to the reduction to avoid the driving force of the piezoelectric base plates.

There according to a another embodiment a surface roughness the connecting surfaces between piezoelectric materials of the piezoelectric base plates not at least two layers of the piezoelectric material greater than 1.0 μm, An ink jet head can be made in which it is possible to penetration of a soft high molecular weight adhesive (e.g. Epoxy resin) into the concave portions on the bonding surfaces Avoid the layer thickness of the adhesive practically to a minimum limit, and a reduction in sensitivity and the Increase in the electrical voltage due to the reduction of the driving force to avoid the piezoelectric base plates.

There according to a another embodiment the connecting surfaces between the piezoelectric base plate and the piezoelectric Base plates subjected to a plasma treatment or a UV treatment can, the inkjet head, in which organic contaminants cleaned and can be removed and wetting ability the surfaces for the Adhesive over the entire surface is improved to prevent a defective connection, such as the stay tiny bubbles as a result, a defective drive for the piezoelectric base plates can be eliminated become.

There according to a another embodiment the connecting surfaces between piezoelectric material layers of the piezoelectric material Base plates with at least two layers of piezoelectric Material subjected to a plasma treatment or a UV treatment can, the inkjet head, in which organic contaminants cleaned and can be removed and wetting ability the surfaces for the Adhesive over the entire surface improved to a weak connection, leaving tiny bubbles, to eliminate, therefore, a poor drive for the piezoelectric Base plates can be eliminated, produced.

Brief description of the drawings

It demonstrate:

1 a perspective view of an ink-jet head of the angled type,

2 a front view of an ink-jet head of the angled type,

3 a sectional view of an ink-jet head of the angled type,

4 (a) to 4 (c) Views of the manufacturing process of an angled-type ink-jet head,

5 (a) and 5 (b) Views of the manufacturing method of the angled-type ink-jet head in another embodiment,

6 (a) and 6 (b) Front views of an angled-type ink-jet head in another embodiment,

7 (a) and 7 (b) Front views of an angled-type ink-jet head in another embodiment,

8 (a) and 8 (b) Front views of an angled-type ink-jet head according to another embodiment;

9 (a) and 9 (b) Front views of an angled-type ink-jet head according to another embodiment;

10 (a) and 10 (b) Front views of an angled-type ink-jet head according to another embodiment;

11 (a) and 11 (b) Front views of an angled-type ink-jet head according to another embodiment;

12 (a) to 12 (c) Views for illustrating an angled-type ink-jet head,

13 5 is a sectional view showing the angled-type ink-jet head;

14 (a) and 14 (b) Views showing the driving state of an angled-type ink-jet head;

15 (a) to 15 (c) Views for illustrating the manufacturing method of an ink jet head,

16 (a) and 16 (b) Representations of the polarization mode in opposite directions in a plate formed of two layers of piezoelectric material, and

17 (a) and 17 (b) Views illustrating the polarization mode in opposite directions in a plate formed of two layers of piezoelectric material.

Detailed description of the preferred embodiments

in the The following are the inkjet head, the inkjet printer as well the method of manufacturing the ink jet head and the ink jet printer of this invention explained with reference to the embodiments; of the Mode of this invention, however, is limited to the embodiments.

1 to 11 show an ink-jet head; 1 is a perspective view 2 is the front view and 3 a sectional view.

An inkjet head 101 This embodiment ejects ink from a nozzle hole 108 by applying an electrical voltage to the electrode to match the shape of the ink chamber 102 deforming space. In this inkjet head 101 is the ink chamber 102 formed by that of the two piezoelectric base plates 103 surrounded, which have been given a polarization, and facing each other, as well as from the two non-piezoelectric base plates 104 which are also sent to each other are turned. On both the inside and outside surfaces of each of these piezoelectric base plates 103 are each electrodes 105 and 106 intended; these piezoelectric base plates 103 have such a structure that each of them consists of two layers of piezoelectric material 103a and 103b is formed, wherein the interface between the layers approximately parallel to the non-piezoelectric base plates 104 is and the polarization direction of this piezoelectric material 103a and 103b formed layers are opposite to each other. The polarization direction is generally the direction in which a material is polarized when an electric field is applied thereto, and the polarization direction of a piezoelectric material is determined when it has been polarized by applying a previous polarizing treatment. The piezoelectric base plates 103 . 103 be by gluing together two layers 103a . 103b educated. Bonding, gluing (thermal curing, thermoplastic curing, thermal UV curing), fusing, filming can be used as the method.

electrodes 105 . 106 are on both surfaces, the front and the back of the piezoelectric base plates 103 . 103 intended. On the other hand, an electrode 105 provided on an inner surface of a non-piezoelectric base plate. The electrodes 105 and 106 are at the piezoelectric base plates 103 provided by vacuum evaporation, sputtering, plating, among others. By vacuum vapor deposition and sputtering, they can be formed in high purity and a high-performance film; By plating, they can be formed at low cost and on tiny detail sections. As the metal for manufacturing the electrodes, gold, silver, aluminum, palladium, nickel, tantalum and titanium may be used, and particularly in electrical property and workability, gold and aluminum are desired; the electrodes are formed by plating, vapor deposition or sputtering.

Further, an electrode may also be used as one of the non-piezoelectric base plates 104 be provided; As a result, the electrical connection to the electrodes 105 and 106 on the piezoelectric base plates 103 by the electrode (s) on the sheet (s) of non-piezoelectric material, which makes the electrical connection to the external power source simple and improves the efficiency of the operation. Incidentally, one electrode may also be on the other non-piezoelectric base plate 104 opposite to a non-piezoelectric base plate 104 be provided.

In this inkjet head 101 as he is in 3 is shown, ink is the ink chamber 102 over the ink supply port 107 fed at the position opposite the nozzle hole 108 is trained.

Because in this way the ink chamber 102 is formed such that it consists of two piezoelectric base plates 103 . 103 which are given a polarization and which face each other, as well as two non-piezoelectric base plates 104 . 104 which face each other and the piezoelectric base plates 103 . 103 have a structure such that each of them consists of at least two lamination layers 103a . 103b is made of piezoelectric material and the laminating layer surface approximately parallel to the non-piezoelectric base plates 104 is and the polarization directions of these two lamination layers 103a . 103b of the piezoelectric material are opposite to each other, wherein one electrode 105 on the surface of each of the piezoelectric base plates 103 . 103 and on that of the ink chamber 102 facing (surface) of the non-piezoelectric base plates 104 is provided, as compared with the case where one electrode only on the piezoelectric base plates 103 . 103 is provided without on the non-piezoelectric base plate 104 to be provided, the work of providing the electrode 105 easy, so that the ink jet head has low cost and to drive the piezoelectric base plates 103 . 103 is suitable for low voltage and provides highly efficient driving performance due to the large deformation of the piezoelectric base plates 103 . 103 , can be used with multiple nozzles, has the capability of high frequency driving and ejects small droplets with multiple graduation, so that high speed image recording and high quality image recording can be performed.

As in 4 is shown, this is the ink chamber 102 by sticking the plate 103 with at least two layers of the piezoelectric material 103a . 103b on the non-piezoelectric base plate 104 ( 4 (a) ), Machining the piezoelectric base plate 103 which has been glued on to provide a groove ( 4 (b) ), and applying the upper non-piezoelectric base plate 104 onto this piezoelectric base plate that has been machined to provide a groove ( 4 (c) ). On each surface of the piezoelectric base plate 103 and the non-piezoelectric base plate 104 , which is the ink chamber 102 facing, becomes an electrode 105 provided before another non-piezoelectric base plate 104 is glued on.

In this way, by applying the piezoelectric base plate 103 that consists of at least two layers 103a and 103b exists on the non-piezoelectric base plate 104 and then processing it to provide a groove after pasting together the ink chamber 102 be formed with low cost and with high precision due to the simple positional adjustment of the ink chamber.

In the manufacture of the ink jet head of this invention, the ink chamber becomes 102 by providing a groove in the piezoelectric base plate 103 formed after the non-piezoelectric base plate 104 was superimposed; however, in providing this groove, it is appropriate to manufacture the groove in a manner such that the non-piezoelectric base plate 104 is exposed, or it is also appropriate to form the groove in such a way that a part of the piezoelectric base plate 103 on the non-piezoelectric base plate 104 is left.

Furthermore, as in 5 shown is the ink chamber 102 by sticking the piezoelectric base plate 103 with at least two layers of piezoelectric material 103a and 103b on the non-piezoelectric base plate 104 ( 5 (a) ) and placing another non-piezoelectric base plate 104 after sticking the plate 103 be formed ( 5 (b) ).

In this way, by gluing the lower non-piezoelectric base plate together 104 , the piezoelectric base plate 103 with at least two layers of piezoelectric material 103a and 103b and the other non-piezoelectric base plate 104 in turn, the ink chamber can be formed at a low cost, the assembling efficiency being high. In this embodiment, on each surface of the piezoelectric base plate 103 and the non-piezoelectric base plate 104 , which is the ink chamber 102 facing, an electrode 105 provided before another non-piezoelectric base plate 104 is glued on.

Furthermore, as in 6 is shown in the ink jet head 101 the ink chamber 102 in a plurality of stages, thereby producing a plurality of nozzles, and high-speed and high-quality image recording can be performed and image resolution can be improved. In the embodiment in FIG 6 (a) become the ink chambers in the first stage 102 on the two sides of the air chamber 120 educated; even in the second stage become the ink chambers 102 on the two sides of the air chamber 120 formed in the same way, ie, the ink chambers are formed at the corresponding positions.

In the embodiment in FIG 6 (b) becomes the ink chamber in the first stage 102 between the air chambers 120 educated; in the second stage, the ink chambers are on both sides of the air chamber 120 formed, that is, the ink chambers are formed at the positions that those of the air chambers 120 in the first stage, resulting in a higher image resolution.

The air chamber 120 is a chamber which is separated from the ink chamber and into which no ink enters; when the ink chambers are provided on both sides thereof, the partitions of the two sides can be driven independently of each other to allow the ink chambers to discharge ink on both sides, making it possible to cope with a high-speed drive.

Furthermore, according to 1 to 6 the inkjet head 101 the piezoelectric base plates 103 formed in the shape of a plane; however, the plates may also be in the form of a curved surface, such as 7 shows. When the piezoelectric base plates 103 have the shape of a plane, like 1 to 6 show, the head can be made at low cost. Further, in the case where the plates have a curved surface shape, such as 7 shows this from the in 7 (a) shown state to the in 7 (b) shown deformed state, which means that the deformation amount of the shape of the ink chamber 102 increasing space; thus, the ink-jet head can perform high-speed and high-quality image recording.

Furthermore, according to 8th the inkjet head 101 the piezoelectric base plates 103 formed in a way that the two layers 103a and 103b different lengths L1 and L2 have (layer thickness or height of a wall), respectively in the direction of stacking. Due to the different lengths L1 and L2 in the stacking direction of the two layers 103a and 103b may be the shape of the ink chamber 102 forming space in accordance with the position of the nozzle hole 108 be deformed, and it can make ink more effective from the nozzle hole 108 be ejected.

Further, the ink jet head 101 on the in 9 to 11 be constructed manner shown. In the in 9 shown inkjet head 101 is each of the two piezoelectric base plates 103 as three layers 103e . 103f and 103g formed under which the layer 103e and 103g is made of a non-metallic inorganic piezoelectric material and the layer 103f of a non-metallic inorganic non-piezoelectric material, and as in 9 (a) shown, assign the layers 103e and 103g the polarization directions, which are opposite to each other, as shown by the arrow marks, and the two plates are placed on one in 9 (b) deformed manner shown. The material of the layer 103f is not limited to a non-metallic inorganic non-piezoelectric material, but also a non-metallic inorganic piezoelectric material or an organic material may be used.

At the in 10 shown inkjet head 101 has each of the two piezoelectric base plates 103 four layers 103h . 103i . 103j and 103k each of which is made of non-metallic inorganic piezoelectric material and has the polarization direction which is alternately opposite to its neighbor as indicated by arrow marks in FIG 10 (a) is shown, wherein the two plates in an in 10 (b) shown manner are deformed. The material of the layers 103i and 103j is not limited to a non-metallic inorganic non-piezoelectric material, but also a non-metallic inorganic piezoelectric material or an organic material may be used.

At the in 11 shown inkjet head 101 has each of the two piezoelectric base plates 103 four layers 103l . 103m . 103n and 103o each of which is made of a non-metallic inorganic piezoelectric material and has the polarization direction opposite to or equal to the others, in a manner as indicated by the arrow marks in FIG 11 (a) is shown, wherein the two plates on an in 11 (b) shown manner are deformed. The material of the layers 103m and 103n is not limited to a non-metallic inorganic piezoelectric material, but also a non-metallic inorganic non-piezoelectric material or an organic material may be used.

As described above, in the 9 to 11 embodiments shown, the two piezoelectric base plates 103 three or more layers, and among these three or more layers, the inner layers are made of non-metallic inorganic piezoelectric material, non-metallic inorganic non-piezoelectric material, or organic material, and differently deform the shape of the ink chamber 102 forming space, ink may be expelled from the nozzle hole.

12 Fig. 12 is a drawing to show an angled-type ink-jet head; 12 (a) shows the state in which a piezoelectric base plate is connected to a non-piezoelectric base plate, 12 (b) shows the state in which a piezoelectric base plate is processed to provide grooves, and 12 (c) shows the state in which ink chambers and air chambers are formed.

The inkjet head 1 This embodiment has two piezoelectric base plates 3 whose polarization directions in a bonded layer structure on the long-sized substrate of non-piezoelectric material are opposite to each other ( 12 (a) ), wherein after bonding a plurality of grooves or grooves 3a be formed by at least two layers at a predetermined interval to a plurality of ink chambers 4 and air chambers 5 to be provided by partitions 3d are divided, which are formed of two layers and positioned alternately ( 12 (b) ).

In this way it can be done when the polarized piezoelectric base plates 3 Are arranged side by side, be preferable that the grooves or grooves 3a at the connection sections 20 be formed, at which each edge of these piezoelectric base plates 3 another edge comes opposite, in other words is a connecting portion 20 a linking portion between side by side arranged two piezoelectric base plates 3 , With this structure, although a minute clearance at the connecting portion 20 exists, the ink chambers 4 and the air chambers 5 be formed without further reducing the position accuracy. In this embodiment, the non-piezoelectric base plates 2 . 8th a single leaf, but you can also use multiple leaves.

After that, the electrodes become 6 and 7 on the entire surface over upper and lower sections on both sides of each of the partitions 3d intended. After the electrodes 6 and 7 on the Surface of the partitions 3d are formed, the non-piezoelectric base plate 8th with the upper surfaces of the partitions 3d connected to the ink chambers 4 and the air chambers 5 to cover. Then it will be on one side of the ink chambers 4 a nozzle plate in which nozzle holes are formed, glued, and on the other side of the ink chambers 4 become the ink supply openings 10 educated ( 12 (c) ).

13 Fig. 10 is a sectional view of an angled-type ink-jet head, and Figs 14 shows an ink jet head of the angled type in the driven state. 14 (a) shows the state before deformation and 14 (b) shows the ink chamber in the deformed state, and 14 (c) shows the condition after deformation.

For this inkjet head 1 becomes ink from the ink supply ports 10 in the ink chambers 4 supplied, and the Tintenzuführöffnungen 10 become at opposite positions of the nozzle holes 9 educated. When an electrical voltage to the electrodes 6 and 7 this inkjet head 1 is created, the partitions 3d which the ink chambers 4 divide, deformed, into the ink chambers 4 from the nozzle holes 9 To eject ink.

As described above, the ink jet head has 1 two layers of piezoelectric material 3 formed of a plurality of block-shaped parts connected to each other and having their polarization directions formed opposite to each other in a stacked structure of bonded layers on the long-dimensioned substrate of a non-piezoelectric material, wherein (the ink-jet head) having the plurality of ink chambers 4 is provided by the partitions 3d are divided, which are formed of two stacked layers and by forming the plurality of grooves or grooves 3a are formed with a predetermined interval; hence, although the length of a part of the piezoelectric base plate has a limit for manufacturing reasons, the ink chambers can not have a reduction in positional accuracy at the connecting portions 20 the multipolar polarized piezoelectric base plate 3 be formed, since the plurality of parts of the polarized, block-shaped piezoelectric base plates 3 are designed so that the grooves are provided after being placed side by side on the long-dimensioned substrate of the non-piezoelectric material to be bonded; thus, it is possible to obtain a high-precision, long-sized line head at a low cost, and high-speed and high-quality image recording can be performed.

Further, as in the manufacturing process of the ink jet head in FIG 15 is shown, in which the plurality of piezoelectric base plates 3 with two block-shaped polarized layers side by side on the long-sized substrate of non-piezoelectric material according to 15 (a) be put, even if a tiny gap 21 at any one of the connecting portions of these block-shaped polarized piezoelectric base plates 3 is present, as in the enlarged view of the connecting portion in 15 (b) is shown, the ink chambers without reducing the positional accuracy by forming the grooves or grooves 3a at these connection sections 20 be formed ( 15 (c) ).

16 and 17 FIG. 15 are diagrams of the modes in which the polarization directions of the two layers made of piezoelectric material of an angled-type ink-jet head are opposed to each other. At the in 16 shown embodiment are in an in 16 (a) shown mode with respect to the piezoelectric base plates 203 each of which has two layers 203a and 203b having opposite polarization directions, the polarization in the layers 203a and 203b formed in those directions perpendicular to both the non-piezoelectric base plate 8th as well as the substrate of the non-piezoelectric material 2 are and are facing each other, and in that in 16 (b) The other mode shown is the polarization in the layers 203a and 203b formed in the directions perpendicular to both the non-piezoelectric base plate 8th as well as the substrate of the non-piezoelectric material 2 are and point away from each other.

In this inkjet head 1 is the ink chamber 4 formed by passing through the piezoelectric base plates 203 having two layers that are polarized and face each other, the two non-piezoelectric base plates 2 and 8th otherwise facing each other, and the two electrodes 6 and 7 on the inner and outer sides of the piezoelectric base plate 203 are provided.

At the in 17 shown embodiment is at a in 17 (a) shown mode with respect to the piezoelectric base plates 203 each of which has two layers 203a and 203b has, whose Pola the directions of polarization are opposite, the polarizations in the layers 203a and 203b formed in those directions parallel to both the non-piezoelectric base plate 8th and to the substrate of the non-piezoelectric material and are opposite to each other, and in the other, in 17 (b) shown mode, are the polarizations in the layers 203a and 203b formed in those directions parallel to both the non-piezoelectric base plate 8th as well as the substrate of non-piezoelectric material 2 are, and vice versa to the directions in 17 (a) are. With respect to each of the piezoelectric base plates 203 is the electrode 7 between the layers 203a and 203b intended; Further, the electrode 6 between the layer 203a and the substrate of non-piezoelectric material 2 provided and unleashed the electrode 6 is between the layer 203b and the non-piezoelectric base plate 8th intended.

In This invention can because of the piezoelectric base plate the material of the base plate is not limited, one of organic Material-made base plate can be used, it is however a made of non-metallic piezoelectric material Base plate desired, what this made of non-metallic piezoelectric material For example, one plate may be affected by processes such as shaping and burning formed ceramic plate or one without the need of the molding and firing plate. As the organic material may be an organic polymer or a hybrid material made of an organic polymer and inorganic material become.

Further, as a ceramic material, PZT (PbZrO ₃ -PbTiO ₃ ) and PZT may be cited with a third additive, and as the third additive, Pb (Mg _1/2 Nb _2/3 ) O ₃ , Pb (Mn _1/2 Sb _2/3 ) O ₃ and Pb (CO _1/2 Nb _2/3 ) O ₃ . Further, the ceramic plate may also be formed using BaTiO ₃ , ZnO, LiNbO ₃ , LiTaO ₃ , etc.

As a plate formed without the need for molding and firing, for example, a plate formed by a sol-gel method or a method of coating a substrate by stacking layers may be given. According to the sol-gel method, the sol is prepared by adding water, an acid or an alkali into a uniform solution having a predetermined chemical composition to induce a chemical reaction such as hydrolysis. Further, by using the process such as evaporating the solvent and cooling, the sol is prepared having microparticles of the objective composition or precursors of non-metallic inorganic microparticles dispersed therein, whereby the plate can be produced. In addition to the possibility of adding a minute amount of a different type of element, a compound having a uniform chemical composition can be achieved by this method. The starting material used is a water-soluble metal salt, such as, for example, sodium silicate or metallic alkoxide. A metallic alkoxide is a compound expressed by a general formula M (OR) _n , it is easily hydrolyzed because the OR radical has a strongly basic property, and it becomes a metal oxide or a hydrate thereof by a condensation process as organic transformed high molecular compound.

Further, there is a vapor phase vapor deposition method as a method of coating a substrate by layering; the processes for preparing a ceramic vapor phase plate are subdivided into two types of processes, namely physical vapor deposition and chemical vapor reaction or surface treatment. Further, the physical vapor deposition methods are divided into the vacuum evaporation method, the sputtering method, the ion plating method, etc., and as the chemical methods, the chemical vapor deposition method (CVD), the plasma CVD method, etc. can be cited. The physical vapor deposition (PVD) vapor deposition method is a method in which the target material is heated in a vacuum to vaporize and the vapor is solidified to deposit on the surface of a substrate, and the sputtering method is a method of which applies the sputtering phenomenon in which high energy particles are made to collide with the target material (target), and the atoms or molecules on the target surface momentarily exchange with the collided molecules to be catapulted out of the surface. Further, the ion plating process is a process in which vapor deposition occurs in an ionized gas environment. Further, in the CVD method, the compound having atoms, molecules or ions to form the target film is vaporized and introduced into the reaction region by a suitable carrier gas, where they are reacted with a heated substrate or by reaction thereto be deposited to form a film; In the plasma CVD method, the vapor phase state is generated by the energy of a plasma, and a film is deposited by a chemical vapor phase reaction in a comparatively low temperature range of 400-500 ° C. In this invention, in the non-piezoelectric base plate, the material of the base plate is not limited and may be a base plate made of organic material, but a base plate made of a non-metallic non-piezoelectric material is desired; As a plate made of a non-metallic non-piezoelectric material, for example, a material selected from alumina, aluminum nitrite, zirconium, silicon, silicon hydride, silicon carbide and quartz may be used.

As this non-piezoelectric base plate, there is a ceramic plate formed by processes such as shaping and firing, a plate formed without the need for molding and firing, etc. For the ceramic plate formed by these methods such as firing For example, Al ₂ O ₃ , SiO ₂ , a mixture of these, and a molten mixture of these and also ZrO ₂ , BeO, AlN, SiC, etc. may be used. As the organic material, an organic polymer or a hybrid material of an organic polymer and inorganic material may be used.

in the Following are the physical property values of non-piezoelectric Base plate and the piezoelectric base plate described.

The density [g / cm ² ] of the piezoelectric base plate should be 3 to 10 as desired, and the density [g / cm ² ] of the volume of the non-piezoelectric base plate should be 0.8 to 10. The Young's modulus or elastic coefficient [GPa] of the piezoelectric base plate should be 50 to 200, and the Young's modulus [GPa] of the non-piezoelectric base plate should be 100 to 400.

Of the Thermal expansion coefficient [ppm / deg] of the piezoelectric base plate should be 7 to 8 and the thermal expansion coefficient [ppm / deg] of the non-piezoelectric Base plate should be 0.6 to 7.

The thermal conductivity [W / cm × deg] The piezoelectric base plate should be 0.005 to 0.1 and the thermal conductivity [W / cm × deg] of the non-piezoelectric base plate should be 0.03 to 0.3.

The permittivity The piezoelectric base plate should be 1000 to 4000, and the permittivity The non-piezoelectric base plate should be 4 to 100.

The Hardness [Hv 1.0 / GPa] of the piezoelectric base plate should be 2 to 10, and the hardness [Hv 1.0 / GPa] of non-piezoelectric Base plate should be 2 to 20.

The strength [KgF / cm ² ] against bending of the piezoelectric base plate should be 5000 to 2000, and the strength [KgF / cm ² ] against bending of the non-piezoelectric base plate should be 3000 to 9000.

Of the Volume resistivity of the piezoelectric base plate [Ω × cm] should be 0.5 to 10, and the volume resistivity of the non-piezoelectric Base plate [Ω × cm] should 7 to 10 amount.

Further should the surface roughness [Ra] at the portion between the non-piezoelectric base plate and surfaces to be bonded to the piezoelectric base plate are desired to be not larger than 1.0 μm, even better not bigger than 0.3 μm, and preferably not larger than 0.1 microns. The surface roughness [Ra] is obtained so that the non-piezoelectric base plate and the piezoelectric base plate are peeled off, a surface roughness for every detached surface the non-piezoelectric base plate and the piezoelectric base plate is measured, and the surface roughness [Ra] is obtained as an average value of the measured values. if the surface roughness the surfaces to be joined Exceeds 1.0 μm, occurs a big one Amount of soft high molecular weight adhesive (for example, a Epoxy resin) between the surfaces to be joined, what the driving force the plate of non-metallic inorganic piezoelectric Reduced material and a reduction in sensitivity and the Increase in electrical voltage brings with it; this is not wanted.

The relationship between the surface roughness [Ra] of the surfaces to be bonded of the non-piezoelectric base plate and the piezoelectric base plate and the driving voltage value is shown in Table 1. Table 1 Ra of a piezoelectric ceramic plate [μm] Ra of a non-piezoelectric ceramic plate [μm] 2.0 1.0 0.5 0.3 0.1 2.0 27V C 25V C 23V C C 1.0 25V C 20V A 0.5 19V A 0.3 23V C 18V AA 0.1 C 17V AA

In Table 1 gives AA the case where no soft high molecular weight Adhesive (for example, an epoxy resin) in the concave portions on the bonded surfaces penetrates, the drive voltage is low and a saving takes place at electrical energy, A indicates the case in which a small amount of the adhesive penetrates, and C indicates the case where a big one Amount of adhesive penetrates.

Further, the surfaces to be bonded of the non-piezoelectric base plate and the piezoelectric base plate are subjected to a plasma treatment or a UV treatment. The plasma treatment is a treatment in which a non-piezoelectric base plate or a piezoelectric base plate is placed in a vacuum chamber and any or mixed gas of two or more of Ar, N ₂ and O _{2 is} introduced and is plasma-changed by an electromagnetic field which is applied by an external energy source, wherein a fluorinated hydrocarbon gas such as CF ₄ gas can be suitably used to improve the etching performance of the surface. Further, in the ultraviolet treatment, there is a process in which the ultraviolet ray from a UV light emitting lamp is directly applied to the non-piezoelectric base plate or the piezoelectric base plate, and can be suitably carried out in the O ₂ atmosphere to effect the cleaning effect by ozone.

By Apply a plasma treatment and a UV treatment of the to be bonded Surface on this way can be contamination by organic substances be cleaned up and removed, and a weak connection, like by remaining microbubbles, due to the improved wettability over the entire surface the adhesive are eliminated; therefore, an inadequate Drive the piezoelectric base plate can be avoided, and stable inkjet heads can getting produced.

by the way become an ink chamber in the shear mode ink jet head of this type and an air chamber alternately on a polarized piezoelectric Element formed by forming grooves, and electrodes be on the sides of both walls provided on the ink chamber and the air chamber, the electrode surface is isolated and a voltage is applied to each electrode so that walls of the Under shear of the ink chamber to expel ink through an opening. There this pressurization chamber and ink chamber solid by piezoelectric Ceramics are formed, the construction of the head is extremely simple. There as well The ink chamber is made of ceramic material, it is through the ink is not damaged, the strength or resistance the ink chamber is high and the construction is simple and solid, which one for high density suitable inkjet head results.

Claims (7)

A method of manufacturing an ink-jet head in which ink is ejected from a nozzle hole by applying a voltage to an electrode so that each of ink chambers partitioned by a partition wall (US Pat. 4 ) is ejected, comprising the steps in the following order: providing a plurality of piezoelectric base plates ( 3 ) with given polarization side by side on a first, non-piezoelectric base plate ( 2 ) Producing several grooves or grooves ( 3a ) on the plurality of piezoelectric base plates ( 3 ), and attaching a second, non-piezoelectric base plate ( 8th ) on the plurality of piezoelectric base plates ( 3 ) around the plurality of grooves ( 3a ) so that the ink chambers partitioned by a partition wall ( 4 ) are formed, wherein the grooves or grooves ( 3a ) at least at connection sections ( 20 ) under the plurality of piezoelectric base plates ( 3 ) are formed in such a way that the ink chambers ( 4 ) from the first non-piezoelectric base plate ( 2 ), the piezoelectric base plates ( 3 ) and the second non-piezoelectric base plate ( 8th ) are surrounded. The method of claim 1, wherein the step of providing a plurality of piezoelectric base plates ( 3 ) the stacking of the piezoelectric base plates ( 3 ) with at least two lamination layers made of piezoelectric materials whose polarization directions are opposite to each other on the first non-piezoelectric base plate ( 2 ). The method of claim 2, wherein a surface roughness of surfaces, through which the lamination layers of the piezoelectric material glued together, not greater than 1.0 microns. A method according to claim 1, 2 or 3, wherein the piezoelectric base plates ( 3 ) are made of a non-metallic material. The method of claim 4, wherein the non-metallic material at least one of alumina, aluminum nitrite, zirconium, Silicon, silicon nitride, silicon carbide and quartz selected substances will be produced. Method according to one of claims 1 to 5, wherein a surface roughness of surfaces through which the non-piezoelectric base plates ( 2 . 8th ) and the piezoelectric base plates ( 3 ) are glued together, not larger than 1.0 microns. The method of claim 3 or 6, wherein the to be bonded surfaces a plasma treatment or a UV treatment.