DE69925318D1 - Ink jet recording head and ink jet recording apparatus containing the same - Google Patents

Ink jet recording head and ink jet recording apparatus containing the same

Info

Publication number
DE69925318D1
DE69925318D1 DE69925318T DE69925318T DE69925318D1 DE 69925318 D1 DE69925318 D1 DE 69925318D1 DE 69925318 T DE69925318 T DE 69925318T DE 69925318 T DE69925318 T DE 69925318T DE 69925318 D1 DE69925318 D1 DE 69925318D1
Authority
DE
Germany
Prior art keywords
ink jet
jet recording
piezoelectric elements
face
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69925318T
Other languages
German (de)
Other versions
DE69925318T2 (en
Inventor
Yoshinao Miyata
Shinri Sakai
Yutaka Furuhata
Tsutomu Hashizume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69925318D1 publication Critical patent/DE69925318D1/en
Application granted granted Critical
Publication of DE69925318T2 publication Critical patent/DE69925318T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)

Abstract

The invention relates to an ink jet recording head comprising a nozzle forming member provided with a plurality of nozzle orifices for jetting ink; a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member; a plurality of piezoelectric elements provided on a face of the channel forming substrate which is opposed to the face bonded to the nozzle forming member with a vibration plate in between for changing the associated pressure generating chambers in volume thereof; and a sealing member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the sealing member having walls (27) for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piezoelectric elements is exhibited while sealing the space hermetically, wherein one of the walls of the sealing member is disposed on each of the piezoelectric elements.
DE69925318T 1998-08-21 1999-08-18 Ink jet recording head and ink jet recording apparatus containing the same Expired - Lifetime DE69925318T2 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP23524998 1998-08-21
JP23524998 1998-08-21
JP23982598 1998-08-26
JP23982598 1998-08-26
JP29977998 1998-10-21
JP29977998 1998-10-21
JP3459299 1999-02-12
JP3459299 1999-02-12
JP22206299A JP3422364B2 (en) 1998-08-21 1999-08-05 Ink jet recording head and ink jet recording apparatus
JP22206299 1999-08-05

Publications (2)

Publication Number Publication Date
DE69925318D1 true DE69925318D1 (en) 2005-06-16
DE69925318T2 DE69925318T2 (en) 2005-10-06

Family

ID=27521622

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69917849T Expired - Lifetime DE69917849T2 (en) 1998-08-21 1999-08-18 Ink jet recording head and ink jet recording apparatus containing the same
DE69925318T Expired - Lifetime DE69925318T2 (en) 1998-08-21 1999-08-18 Ink jet recording head and ink jet recording apparatus containing the same

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69917849T Expired - Lifetime DE69917849T2 (en) 1998-08-21 1999-08-18 Ink jet recording head and ink jet recording apparatus containing the same

Country Status (4)

Country Link
EP (2) EP1277583B1 (en)
JP (1) JP3422364B2 (en)
AT (2) ATE268693T1 (en)
DE (2) DE69917849T2 (en)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001353871A (en) * 2000-04-12 2001-12-25 Seiko Epson Corp Ink jet recording head
JP2003053966A (en) * 2000-06-12 2003-02-26 Seiko Epson Corp Inkjet recording head
JP2002316417A (en) * 2001-02-19 2002-10-29 Seiko Epson Corp Ink jet recording head and ink jet recorder
JP4585721B2 (en) * 2001-09-13 2010-11-24 セイコーエプソン株式会社 Method for manufacturing ink jet recording head
JP2003080705A (en) * 2001-09-13 2003-03-19 Seiko Epson Corp Ink jet recording head, its manufacturing method and ink jet recorder
JP2003159800A (en) * 2001-09-13 2003-06-03 Seiko Epson Corp Liquid-jet head and liquid-jet apparatus
CN100478173C (en) 2003-05-06 2009-04-15 精工爱普生株式会社 Fluid jetting head and fluid jetting device
JP4484821B2 (en) * 2003-05-06 2010-06-16 セイコーエプソン株式会社 Liquid ejecting head and liquid ejecting apparatus
JP4492051B2 (en) * 2003-07-17 2010-06-30 セイコーエプソン株式会社 Method for manufacturing liquid jet head
JP3952048B2 (en) 2003-09-29 2007-08-01 ブラザー工業株式会社 Liquid transfer device and method for manufacturing liquid transfer device
US7229152B2 (en) 2003-10-31 2007-06-12 Hewlett-Packard Development Company, L.P. Fluid ejection device with insulating feature
JP4492520B2 (en) 2005-01-26 2010-06-30 セイコーエプソン株式会社 Droplet discharge head and droplet discharge device.
JP5023488B2 (en) 2005-03-09 2012-09-12 セイコーエプソン株式会社 Device mounting structure and device mounting method, droplet discharge head, drive unit, and semiconductor device
JP2007045129A (en) * 2005-08-12 2007-02-22 Seiko Epson Corp Liquid jetting head and liquid jetting apparatus
JP4779636B2 (en) * 2005-12-20 2011-09-28 セイコーエプソン株式会社 Droplet discharge head and droplet discharge apparatus
US7806521B2 (en) * 2006-08-01 2010-10-05 Brother Kogyo Kabushiki Kaisha Liquid transport apparatus and method for producing liquid transport apparatus
KR100818282B1 (en) 2006-10-26 2008-04-01 삼성전자주식회사 Inkjet printhead
JP5067946B2 (en) * 2008-09-02 2012-11-07 富士フイルム株式会社 Liquid discharge head and method of manufacturing liquid discharge head
DE102009028909A1 (en) 2009-08-26 2011-03-17 Nanoplus Gmbh Nanosystems And Technologies Semiconductor laser with an absorber mounted on a laser mirror
KR20120012160A (en) * 2010-07-30 2012-02-09 삼성전기주식회사 Inkjet head assembly and method for manufacturing the same
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
JP6024171B2 (en) * 2012-04-13 2016-11-09 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting apparatus, and actuator
JP6168385B2 (en) * 2013-01-23 2017-07-26 株式会社リコー Particle manufacturing apparatus and particle manufacturing method
JP6029497B2 (en) * 2013-03-12 2016-11-24 エスアイアイ・プリンテック株式会社 Liquid ejecting head and liquid ejecting apparatus
JP6061088B2 (en) 2013-03-28 2017-01-18 セイコーエプソン株式会社 Liquid ejecting head and liquid ejecting apparatus
JP2015033799A (en) * 2013-08-09 2015-02-19 セイコーエプソン株式会社 Liquid jet head and liquid jet device
JP6201584B2 (en) 2013-09-30 2017-09-27 ブラザー工業株式会社 Droplet ejector and method for manufacturing droplet ejector
JP6307890B2 (en) * 2014-01-17 2018-04-11 セイコーエプソン株式会社 Flow path unit, liquid ejecting head, liquid ejecting apparatus
JP6337637B2 (en) * 2014-06-18 2018-06-06 株式会社リコー Liquid ejection head and image forming apparatus
JP6493676B2 (en) * 2015-06-05 2019-04-03 セイコーエプソン株式会社 Liquid ejecting apparatus and liquid ejecting method
JP6648459B2 (en) * 2015-09-25 2020-02-14 セイコーエプソン株式会社 Liquid ejection head and liquid ejection device
JP7013124B2 (en) * 2016-01-08 2022-01-31 キヤノン株式会社 Manufacturing method of liquid discharge head
JP6859600B2 (en) * 2016-03-28 2021-04-14 セイコーエプソン株式会社 Manufacturing method of liquid injection head, liquid injection head unit, liquid injection device and liquid injection head unit
JP6443774B2 (en) * 2017-07-03 2018-12-26 株式会社リコー Particle production method
JP7106828B2 (en) * 2017-09-13 2022-07-27 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting apparatus, piezoelectric device, and liquid ejecting head manufacturing method
JP6409944B2 (en) * 2017-11-20 2018-10-24 セイコーエプソン株式会社 Liquid ejecting head and liquid ejecting apparatus
JP7224782B2 (en) * 2018-05-30 2023-02-20 キヤノン株式会社 Liquid ejection head and manufacturing method thereof
JP7237480B2 (en) * 2018-06-29 2023-03-13 キヤノン株式会社 Liquid ejection head and manufacturing method thereof
JP7388028B2 (en) * 2019-07-26 2023-11-29 ブラザー工業株式会社 liquid discharge head

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03243357A (en) * 1990-02-20 1991-10-30 Sharp Corp Ink jet recording head
JPH05286131A (en) * 1992-04-15 1993-11-02 Rohm Co Ltd Ink jet print head and production thereof
JPH07329292A (en) * 1994-04-13 1995-12-19 Seiko Epson Corp Ink jet recording head
JP3196811B2 (en) * 1994-10-17 2001-08-06 セイコーエプソン株式会社 Laminated ink jet recording head and method of manufacturing the same
EP0738599B1 (en) * 1995-04-19 2002-10-16 Seiko Epson Corporation Ink Jet recording head and method of producing same

Also Published As

Publication number Publication date
ATE295265T1 (en) 2005-05-15
EP1277583A3 (en) 2003-03-05
DE69917849D1 (en) 2004-07-15
JP2000296616A (en) 2000-10-24
JP3422364B2 (en) 2003-06-30
EP0985535A2 (en) 2000-03-15
EP1277583A2 (en) 2003-01-22
DE69917849T2 (en) 2004-10-07
ATE268693T1 (en) 2004-06-15
DE69925318T2 (en) 2005-10-06
EP0985535B1 (en) 2004-06-09
EP1277583B1 (en) 2005-05-11
EP0985535A3 (en) 2001-08-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition