DE69923212D1 - Ionenpumpeschaltersteuerung - Google Patents

Ionenpumpeschaltersteuerung

Info

Publication number
DE69923212D1
DE69923212D1 DE69923212T DE69923212T DE69923212D1 DE 69923212 D1 DE69923212 D1 DE 69923212D1 DE 69923212 T DE69923212 T DE 69923212T DE 69923212 T DE69923212 T DE 69923212T DE 69923212 D1 DE69923212 D1 DE 69923212D1
Authority
DE
Germany
Prior art keywords
switch control
ion pump
pump switch
ion
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69923212T
Other languages
English (en)
Other versions
DE69923212T2 (de
Inventor
P Littlejohn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Industry Inc
Original Assignee
Siemens Applied Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Applied Automation Inc filed Critical Siemens Applied Automation Inc
Publication of DE69923212D1 publication Critical patent/DE69923212D1/de
Application granted granted Critical
Publication of DE69923212T2 publication Critical patent/DE69923212T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/36—Radio frequency spectrometers, e.g. Bennett-type spectrometers, Redhead-type spectrometers
    • H01J49/38—Omegatrons ; using ion cyclotron resonance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE69923212T 1998-10-16 1999-10-13 Ionenpumpeschaltersteuerung Expired - Lifetime DE69923212T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US173944 1998-10-16
US09/173,944 US6232599B1 (en) 1998-10-16 1998-10-16 Ion pump relay control
PCT/US1999/021624 WO2000024033A1 (en) 1998-10-16 1999-10-13 Ion pump relay control

Publications (2)

Publication Number Publication Date
DE69923212D1 true DE69923212D1 (de) 2005-02-17
DE69923212T2 DE69923212T2 (de) 2005-12-29

Family

ID=22634161

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69923212T Expired - Lifetime DE69923212T2 (de) 1998-10-16 1999-10-13 Ionenpumpeschaltersteuerung

Country Status (5)

Country Link
US (1) US6232599B1 (de)
EP (1) EP1129468B1 (de)
CA (1) CA2345383A1 (de)
DE (1) DE69923212T2 (de)
WO (1) WO2000024033A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3904322B2 (ja) * 1998-04-20 2007-04-11 株式会社日立製作所 分析装置
JP4475646B2 (ja) * 2004-08-27 2010-06-09 キヤノン株式会社 画像表示装置
DE102007017053B4 (de) * 2006-04-27 2011-06-16 Bruker Daltonik Gmbh Messzelle für Ionenzyklotronresonanz-Massenspektrometer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3937955A (en) 1974-10-15 1976-02-10 Nicolet Technology Corporation Fourier transform ion cyclotron resonance spectroscopy method and apparatus
US4201913A (en) * 1978-10-06 1980-05-06 Honeywell Inc. Sampling system for mass spectrometer
US4683749A (en) * 1986-05-22 1987-08-04 Westinghouse Electric Corp. Process and system for detecting and measuring a tritium gas leak
US4945234A (en) * 1989-05-19 1990-07-31 Extrel Ftms, Inc. Method and apparatus for producing an arbitrary excitation spectrum for Fourier transform mass spectrometry
US5313061A (en) 1989-06-06 1994-05-17 Viking Instrument Miniaturized mass spectrometer system
JP2952894B2 (ja) * 1989-07-03 1999-09-27 富士通株式会社 真空装置およびプロセスチャンバ内のガス分析方法
US5155357A (en) * 1990-07-23 1992-10-13 Massachusetts Institute Of Technology Portable mass spectrometer
US6121609A (en) * 1998-10-16 2000-09-19 Siemens Aktiengesellschaft Pulsed mass spectrometer leak valve with controlled energy closure

Also Published As

Publication number Publication date
EP1129468B1 (de) 2005-01-12
US6232599B1 (en) 2001-05-15
DE69923212T2 (de) 2005-12-29
WO2000024033A1 (en) 2000-04-27
CA2345383A1 (en) 2000-04-27
EP1129468A1 (de) 2001-09-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SIEMENS INDUSTRY, INC. (N.D.GES.D. STAATES DEL, US