DE69920056D1 - Elektrischer Kontaktöffnungsschalter, integrierter elektrischer Kontaktöffnungsschalter und Schaltverfahren - Google Patents

Elektrischer Kontaktöffnungsschalter, integrierter elektrischer Kontaktöffnungsschalter und Schaltverfahren

Info

Publication number
DE69920056D1
DE69920056D1 DE69920056T DE69920056T DE69920056D1 DE 69920056 D1 DE69920056 D1 DE 69920056D1 DE 69920056 T DE69920056 T DE 69920056T DE 69920056 T DE69920056 T DE 69920056T DE 69920056 D1 DE69920056 D1 DE 69920056D1
Authority
DE
Germany
Prior art keywords
electrical contact
opening switch
contact opening
switching method
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69920056T
Other languages
English (en)
Other versions
DE69920056T2 (de
Inventor
You Kondoh
Mitsuchika Saito
Yoshikatsu Ichimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE69920056D1 publication Critical patent/DE69920056D1/de
Application granted granted Critical
Publication of DE69920056T2 publication Critical patent/DE69920056T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Contacts (AREA)
DE69920056T 1998-12-30 1999-12-23 Elektrischer Kontaktöffnungsschalter, integrierter elektrischer Kontaktöffnungsschalter und Schaltverfahren Expired - Fee Related DE69920056T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP37718398A JP4183817B2 (ja) 1998-12-30 1998-12-30 電気接点開閉装置
JP37718398 1998-12-30

Publications (2)

Publication Number Publication Date
DE69920056D1 true DE69920056D1 (de) 2004-10-14
DE69920056T2 DE69920056T2 (de) 2005-01-20

Family

ID=18508395

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69920056T Expired - Fee Related DE69920056T2 (de) 1998-12-30 1999-12-23 Elektrischer Kontaktöffnungsschalter, integrierter elektrischer Kontaktöffnungsschalter und Schaltverfahren

Country Status (3)

Country Link
EP (1) EP1179829B1 (de)
JP (1) JP4183817B2 (de)
DE (1) DE69920056T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001185014A (ja) 1999-12-22 2001-07-06 Agilent Technol Inc スイッチ装置及びその製造方法
JP2002260498A (ja) * 2001-02-28 2002-09-13 Agilent Technol Inc スイッチ装置
JP2002260499A (ja) * 2001-02-23 2002-09-13 Agilent Technol Inc 導電性流体を利用したスイッチ装置
US6774324B2 (en) * 2002-12-12 2004-08-10 Agilent Technologies, Inc. Switch and production thereof
US20040201447A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Thin-film resistor device
US6822176B1 (en) * 2004-04-16 2004-11-23 Agilent Technologies, Inc. Liquid metal switch and method of manufacture therefor
US6979789B1 (en) * 2005-03-21 2005-12-27 Agilent Technologies, Inc. Switches having wettable surfaces comprising a material that does not form alloys with a switching fluid, and method of making same
US7211754B2 (en) * 2005-08-01 2007-05-01 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Fluid-based switch, and method of making same
WO2007026678A1 (ja) * 2005-08-31 2007-03-08 Matsushita Electric Works, Ltd. 導電性流体を用いたリレー装置
KR101051732B1 (ko) 2009-11-12 2011-07-25 한국전자통신연구원 미세 액체 금속 액적의 형상 변화를 이용한 ｒｆ ｍｅｍｓ 스위치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE312051C (de) * 1916-04-22
US1598874A (en) * 1922-01-19 1926-09-07 Absolute Con Tac Tor Corp Electrical apparatus
US1983150A (en) * 1931-05-18 1934-12-04 Nelis A Simonsen Electric circuit breaker
GB407861A (en) * 1933-07-17 1934-03-29 Hugh Terrell Improvements in or relating to mercury or like electric switches or relays
DE1942980U (de) * 1965-12-23 1966-07-28 Siemens Ag Mit mechanischer verdrangung von quecksilber arbeitender fluessigkeitskontakt.
US3539743A (en) * 1967-08-10 1970-11-10 Bell Telephone Labor Inc Electrofluidic switching circuit
KR0174871B1 (ko) * 1995-12-13 1999-02-01 양승택 랫칭형 열구동 마이크로 릴레이 소자

Also Published As

Publication number Publication date
EP1179829B1 (de) 2004-09-08
DE69920056T2 (de) 2005-01-20
JP4183817B2 (ja) 2008-11-19
JP2000195389A (ja) 2000-07-14
EP1179829A1 (de) 2002-02-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee
8370 Indication of lapse of patent is to be deleted
8339 Ceased/non-payment of the annual fee