DE69915771D1 - Mikrospritzvorrichtung und Verfahren zur Herstellung derselben - Google Patents

Mikrospritzvorrichtung und Verfahren zur Herstellung derselben

Info

Publication number
DE69915771D1
DE69915771D1 DE69915771T DE69915771T DE69915771D1 DE 69915771 D1 DE69915771 D1 DE 69915771D1 DE 69915771 T DE69915771 T DE 69915771T DE 69915771 T DE69915771 T DE 69915771T DE 69915771 D1 DE69915771 D1 DE 69915771D1
Authority
DE
Germany
Prior art keywords
making
same
microspray device
microspray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69915771T
Other languages
English (en)
Other versions
DE69915771T2 (de
Inventor
Byung-Sun Ahn
Zukov Andrey Aleksandrovich
Dunaev Boris Nikolaevich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of DE69915771D1 publication Critical patent/DE69915771D1/de
Publication of DE69915771T2 publication Critical patent/DE69915771T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14064—Heater chamber separated from ink chamber by a membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Coating Apparatus (AREA)
DE69915771T 1998-11-03 1999-11-03 Mikrospritzvorrichtung und Verfahren zur Herstellung derselben Expired - Fee Related DE69915771T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU98119890 1998-11-03
RU98119890A RU2144470C1 (ru) 1998-11-03 1998-11-03 Микроинжектор и способ его изготовления (варианты)

Publications (2)

Publication Number Publication Date
DE69915771D1 true DE69915771D1 (de) 2004-04-29
DE69915771T2 DE69915771T2 (de) 2005-04-28

Family

ID=20211922

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69915771T Expired - Fee Related DE69915771T2 (de) 1998-11-03 1999-11-03 Mikrospritzvorrichtung und Verfahren zur Herstellung derselben

Country Status (7)

Country Link
US (1) US6270197B1 (de)
EP (1) EP0999054B1 (de)
JP (1) JP3269050B2 (de)
KR (1) KR100288699B1 (de)
CN (1) CN1094424C (de)
DE (1) DE69915771T2 (de)
RU (1) RU2144470C1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7488056B2 (en) * 2004-04-19 2009-02-10 Hewlett--Packard Development Company, L.P. Fluid ejection device
FR2990055B1 (fr) * 2012-04-30 2014-12-26 Total Sa Matrice de depot d'au moins un fluide conducteur sur un substrat, ainsi que dispositif comprenant cette matrice et procede de depot
US9004651B2 (en) 2013-09-06 2015-04-14 Xerox Corporation Thermo-pneumatic actuator working fluid layer
US9004652B2 (en) 2013-09-06 2015-04-14 Xerox Corporation Thermo-pneumatic actuator fabricated using silicon-on-insulator (SOI)
US9096057B2 (en) 2013-11-05 2015-08-04 Xerox Corporation Working fluids for high frequency elevated temperature thermo-pneumatic actuation
CN104085194B (zh) * 2014-07-17 2016-08-17 南通锐发打印科技有限公司 基于热气泡式喷墨打印机头的柔性薄膜机构

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4490728A (en) 1981-08-14 1984-12-25 Hewlett-Packard Company Thermal ink jet printer
US4480259A (en) * 1982-07-30 1984-10-30 Hewlett-Packard Company Ink jet printer with bubble driven flexible membrane
US4809428A (en) 1987-12-10 1989-03-07 Hewlett-Packard Company Thin film device for an ink jet printhead and process for the manufacturing same
US5140345A (en) 1989-03-01 1992-08-18 Canon Kabushiki Kaisha Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method
US5420627A (en) 1992-04-02 1995-05-30 Hewlett-Packard Company Inkjet printhead
US5274400A (en) 1992-04-28 1993-12-28 Hewlett-Packard Company Ink path geometry for high temperature operation of ink-jet printheads
US5734399A (en) * 1995-07-11 1998-03-31 Hewlett-Packard Company Particle tolerant inkjet printhead architecture
US5838351A (en) * 1995-10-26 1998-11-17 Hewlett-Packard Company Valve assembly for controlling fluid flow within an ink-jet pen
JP3542460B2 (ja) * 1996-06-07 2004-07-14 キヤノン株式会社 液体吐出方法及び液体吐出装置
KR100209498B1 (ko) * 1996-11-08 1999-07-15 윤종용 서로 다른 열팽창 계수 특성을 지닌 다중 멤브레인을 갖는 잉크젯 프린터의 분사장치
KR100208015B1 (ko) * 1997-05-15 1999-07-15 윤종용 잉크젯 프린터의 잉크젯 카트리지

Also Published As

Publication number Publication date
JP2000141665A (ja) 2000-05-23
EP0999054A3 (de) 2000-10-04
KR20000034820A (ko) 2000-06-26
RU2144470C1 (ru) 2000-01-20
CN1253040A (zh) 2000-05-17
EP0999054B1 (de) 2004-03-24
DE69915771T2 (de) 2005-04-28
JP3269050B2 (ja) 2002-03-25
KR100288699B1 (ko) 2001-04-16
CN1094424C (zh) 2002-11-20
EP0999054A2 (de) 2000-05-10
US6270197B1 (en) 2001-08-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee