DE69828501D1 - Aperturelement für elektronenstrahlung - Google Patents

Aperturelement für elektronenstrahlung

Info

Publication number
DE69828501D1
DE69828501D1 DE69828501T DE69828501T DE69828501D1 DE 69828501 D1 DE69828501 D1 DE 69828501D1 DE 69828501 T DE69828501 T DE 69828501T DE 69828501 T DE69828501 T DE 69828501T DE 69828501 D1 DE69828501 D1 DE 69828501D1
Authority
DE
Germany
Prior art keywords
electron radiation
aperture element
aperture
electron
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69828501T
Other languages
English (en)
Other versions
DE69828501T2 (de
Inventor
Tao Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vistec Lithography Ltd
Original Assignee
Vistec Lithography Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vistec Lithography Ltd filed Critical Vistec Lithography Ltd
Application granted granted Critical
Publication of DE69828501D1 publication Critical patent/DE69828501D1/de
Publication of DE69828501T2 publication Critical patent/DE69828501T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
DE69828501T 1997-05-16 1998-05-14 Aperturelement für elektronenstrahlung Expired - Lifetime DE69828501T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9710019A GB2325335B (en) 1997-05-16 1997-05-16 Electron beam aperture element
GB9710019 1997-05-16
PCT/EP1998/002853 WO1998053481A1 (en) 1997-05-16 1998-05-14 Electron beam aperture element

Publications (2)

Publication Number Publication Date
DE69828501D1 true DE69828501D1 (de) 2005-02-10
DE69828501T2 DE69828501T2 (de) 2006-01-05

Family

ID=10812464

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69828501T Expired - Lifetime DE69828501T2 (de) 1997-05-16 1998-05-14 Aperturelement für elektronenstrahlung

Country Status (8)

Country Link
US (1) US6376850B1 (de)
EP (1) EP0981828B1 (de)
JP (1) JP2001526823A (de)
KR (1) KR20010012601A (de)
CN (1) CN1114935C (de)
DE (1) DE69828501T2 (de)
GB (1) GB2325335B (de)
WO (1) WO1998053481A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4113032B2 (ja) 2003-04-21 2008-07-02 キヤノン株式会社 電子銃及び電子ビーム露光装置
GB2414857B (en) * 2004-06-03 2009-02-25 Nanobeam Ltd Apparatus for blanking a charged particle beam
US8294125B2 (en) * 2009-11-18 2012-10-23 Kla-Tencor Corporation High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture
DE102010040324B3 (de) * 2010-09-07 2012-05-10 Asphericon Gmbh Ionenstrahlvorrichtung zur Bearbeitung eines Substrats
DE102010041156B9 (de) * 2010-09-21 2018-01-25 Carl Zeiss Microscopy Gmbh Blendeneinheit für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät
CN103077762B (zh) * 2012-12-19 2016-09-28 中国科学院上海应用物理研究所 电子射线源产生装置及产生低剂量率电子射线的方法
US10483080B1 (en) * 2018-07-17 2019-11-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device
EP3879557A1 (de) * 2020-03-09 2021-09-15 ASML Netherlands B.V. Aperturkörper, flutsäule und ladungsteilchenwerkzeug

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB101172A (en) 1916-02-19 1916-08-24 William Hamilton Brown Improvements in or relating to Means for Supplying Air to Furnaces, Stoves and the like.
CH394411A (de) * 1962-08-17 1965-06-30 Bbc Brown Boveri & Cie Kollimator für Strahlen schneller Elektronen
NL7109140A (de) * 1971-07-02 1973-01-04
US4354111A (en) * 1981-03-10 1982-10-12 Veeco Instruments Incorporated Screen lens array system
US4952814A (en) * 1989-06-14 1990-08-28 Varian Associates, Inc. Translating aperture electron beam current modulator
DE19610492A1 (de) * 1996-03-18 1997-10-02 Viotechnik Ges Fuer Innovative Elektronenstrahlanlage

Also Published As

Publication number Publication date
KR20010012601A (ko) 2001-02-15
EP0981828B1 (de) 2005-01-05
DE69828501T2 (de) 2006-01-05
EP0981828A1 (de) 2000-03-01
WO1998053481A1 (en) 1998-11-26
JP2001526823A (ja) 2001-12-18
CN1114935C (zh) 2003-07-16
CN1256788A (zh) 2000-06-14
GB2325335B (en) 2001-07-11
GB9710019D0 (en) 1997-07-09
GB2325335A (en) 1998-11-18
US6376850B1 (en) 2002-04-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition