DE69825548D1 - Optischer Wellenfrontsensor vom Hartmann-Typ - Google Patents
Optischer Wellenfrontsensor vom Hartmann-TypInfo
- Publication number
- DE69825548D1 DE69825548D1 DE69825548T DE69825548T DE69825548D1 DE 69825548 D1 DE69825548 D1 DE 69825548D1 DE 69825548 T DE69825548 T DE 69825548T DE 69825548 T DE69825548 T DE 69825548T DE 69825548 D1 DE69825548 D1 DE 69825548D1
- Authority
- DE
- Germany
- Prior art keywords
- wavefront sensor
- optical wavefront
- hartmann type
- hartmann
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US984751 | 1997-12-04 | ||
US08/984,751 US5912731A (en) | 1997-12-04 | 1997-12-04 | Hartmann-type optical wavefront sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69825548D1 true DE69825548D1 (de) | 2004-09-16 |
DE69825548T2 DE69825548T2 (de) | 2005-02-03 |
Family
ID=25530824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69825548T Expired - Fee Related DE69825548T2 (de) | 1997-12-04 | 1998-12-02 | Optischer Wellenfrontsensor vom Hartmann-Typ |
Country Status (6)
Country | Link |
---|---|
US (1) | US5912731A (de) |
EP (1) | EP0921382B1 (de) |
JP (1) | JP3315086B2 (de) |
KR (1) | KR100300683B1 (de) |
CA (1) | CA2255197C (de) |
DE (1) | DE69825548T2 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6819414B1 (en) | 1998-05-19 | 2004-11-16 | Nikon Corporation | Aberration measuring apparatus, aberration measuring method, projection exposure apparatus having the same measuring apparatus, device manufacturing method using the same measuring method, and exposure method |
US6376819B1 (en) * | 1999-07-09 | 2002-04-23 | Wavefront Sciences, Inc. | Sub-lens spatial resolution Shack-Hartmann wavefront sensing |
US6304330B1 (en) * | 1999-10-06 | 2001-10-16 | Metrolaser, Inc. | Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry |
JP4549468B2 (ja) * | 1999-12-28 | 2010-09-22 | 株式会社トプコン | レンズメータ |
US6707020B1 (en) | 1999-12-28 | 2004-03-16 | Mza Associates Corporation | Adaptive dynamic range wavefront sensor |
US6394999B1 (en) | 2000-03-13 | 2002-05-28 | Memphis Eye & Cataract Associates Ambulatory Surgery Center | Laser eye surgery system using wavefront sensor analysis to control digital micromirror device (DMD) mirror patterns |
US6649895B1 (en) | 2000-07-14 | 2003-11-18 | Adaptive Optics Associates, Inc. | Dispersed Hartmann sensor and method for mirror segment alignment and phasing |
US7161128B2 (en) * | 2000-07-14 | 2007-01-09 | Adaptive Optics Associates, Inc. | Optical instrument employing a wavefront sensor capable of coarse and fine phase measurement capabilities during first and second modes of operation |
US6486943B1 (en) | 2000-09-19 | 2002-11-26 | The Schepens Eye Research Institute, Inc. | Methods and apparatus for measurement and correction of optical aberration |
US6382797B1 (en) * | 2000-10-17 | 2002-05-07 | 20/10 Perfect Vision Optische Geraete Gmbh | Aberration-free delivery system |
US6548797B1 (en) | 2000-10-20 | 2003-04-15 | Nikon Corporation | Apparatus and method for measuring a wavefront using a screen with apertures adjacent to a multi-lens array |
US6577447B1 (en) | 2000-10-20 | 2003-06-10 | Nikon Corporation | Multi-lens array of a wavefront sensor for reducing optical interference and method thereof |
WO2002046713A2 (en) * | 2000-12-08 | 2002-06-13 | Cyberoptics Corporation | Automated system with improved height sensing |
CN1423831A (zh) * | 2000-12-22 | 2003-06-11 | 株式会社尼康 | 波像差测定装置,波像差测定方法,曝光装置及微型器件的制造方法 |
JP2002198279A (ja) | 2000-12-25 | 2002-07-12 | Nikon Corp | 位置検出方法、光学特性測定方法、光学特性測定装置、露光装置、及びデバイス製造方法 |
JP2002202220A (ja) | 2000-12-27 | 2002-07-19 | Nikon Corp | 位置検出方法、位置検出装置、光学特性測定方法、光学特性測定装置、露光装置、及びデバイス製造方法 |
JP4345098B2 (ja) * | 2001-02-06 | 2009-10-14 | 株式会社ニコン | 露光装置及び露光方法、並びにデバイス製造方法 |
US6784408B1 (en) | 2001-04-25 | 2004-08-31 | Oceanit Laboratories, Inc. | Array of lateral effect detectors for high-speed wavefront sensing and other applications |
US20040165147A1 (en) * | 2001-11-13 | 2004-08-26 | Della Vecchia Michael A. | Determining iris biometric and spatial orientation of an iris in accordance with same |
US7775665B2 (en) * | 2001-11-13 | 2010-08-17 | Dellavecchia Michael A | Method for optically scanning objects |
US7226166B2 (en) * | 2001-11-13 | 2007-06-05 | Philadelphia Retina Endowment Fund | Optimizing the properties of electromagnetic energy in a medium using stochastic parallel perturbation gradient descent optimization adaptive optics |
US6648473B2 (en) | 2001-11-13 | 2003-11-18 | Philadelphia Retina Endowment Fund | High-resolution retina imaging and eye aberration diagnostics using stochastic parallel perturbation gradient descent optimization adaptive optics |
US7377647B2 (en) * | 2001-11-13 | 2008-05-27 | Philadelphia Retina Endowment Fund | Clarifying an image of an object to perform a procedure on the object |
KR100419192B1 (ko) * | 2002-04-10 | 2004-02-21 | 한국수력원자력 주식회사 | 다중 입사광의 파면왜곡 정밀측정 장치 및 그 방법 |
US20030234993A1 (en) * | 2002-06-21 | 2003-12-25 | Hazelton Andrew J. | Adaptive optic off-axis metrology |
US6989922B2 (en) * | 2002-06-21 | 2006-01-24 | Nikon Corporation | Deformable mirror actuation system |
US6840638B2 (en) * | 2002-07-03 | 2005-01-11 | Nikon Corporation | Deformable mirror with passive and active actuators |
US6910770B2 (en) * | 2003-02-10 | 2005-06-28 | Visx, Incorporated | Eye refractor with active mirror wavefront sensor |
US7343099B2 (en) * | 2004-02-12 | 2008-03-11 | Metrologic Instruments, Inc. | Free space optical (FSO) laser communication system employing fade mitigation measures based on laser beam speckle tracking and locking principles |
US7187815B1 (en) * | 2004-10-01 | 2007-03-06 | Sandia Corporation | Relaying an optical wavefront |
US7268937B1 (en) | 2005-05-27 | 2007-09-11 | United States Of America As Represented By The Secretary Of The Air Force | Holographic wavefront sensor |
WO2007070006A1 (en) * | 2005-12-13 | 2007-06-21 | Agency For Science, Technology And Research | Optical wavefront sensor |
US7381934B2 (en) * | 2006-01-11 | 2008-06-03 | Xinetics, Inc. | Closed loop compensation system and method for a deformable mirror |
EP1999443B1 (de) * | 2006-03-14 | 2017-12-27 | AMO Manufacturing USA, LLC | Raumfrequenz-wellenfront-sensorsystem und verfahren dafür |
US7626152B2 (en) * | 2006-08-16 | 2009-12-01 | Raytheon Company | Beam director and control system for a high energy laser within a conformal window |
WO2014018584A1 (en) * | 2012-07-24 | 2014-01-30 | Trustees Of Boston University | Partitioned aperture wavefront imaging method and system |
DE102014010667B4 (de) | 2014-07-18 | 2017-07-13 | Berliner Glas Kgaa Herbert Kubatz Gmbh & Co | Verfahren und Vorrichtung zur Messung der Form einer Wellenfront eines optischen Strahlungsfeldes |
CN110455420B (zh) * | 2019-07-11 | 2021-12-07 | 长春理工大学 | 波前测量设备 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4141652A (en) * | 1977-11-25 | 1979-02-27 | Adaptive Optics Associates, Inc. | Sensor system for detecting wavefront distortion in a return beam of light |
FR2665955B1 (fr) * | 1985-11-20 | 1993-04-23 | Onera (Off Nat Aerospatiale) | Analyseur opto electronique de surfaces d'onde a mosauique de micro-lentilles. |
US4967063A (en) * | 1988-06-16 | 1990-10-30 | The Aerospace Corporation | Charge controlled adaptive-optics system |
US5229889A (en) * | 1991-12-10 | 1993-07-20 | Hughes Aircraft Company | Simple adaptive optical system |
US5233174A (en) * | 1992-03-11 | 1993-08-03 | Hughes Danbury Optical Systems, Inc. | Wavefront sensor having a lenslet array as a null corrector |
US5448395A (en) * | 1993-08-03 | 1995-09-05 | Northrop Grumman Corporation | Non-mechanical step scanner for electro-optical sensors |
-
1997
- 1997-12-04 US US08/984,751 patent/US5912731A/en not_active Expired - Lifetime
-
1998
- 1998-12-02 CA CA002255197A patent/CA2255197C/en not_active Expired - Fee Related
- 1998-12-02 EP EP98122562A patent/EP0921382B1/de not_active Expired - Lifetime
- 1998-12-02 DE DE69825548T patent/DE69825548T2/de not_active Expired - Fee Related
- 1998-12-03 KR KR1019980052911A patent/KR100300683B1/ko not_active IP Right Cessation
- 1998-12-04 JP JP34521298A patent/JP3315086B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5912731A (en) | 1999-06-15 |
KR100300683B1 (ko) | 2001-09-06 |
DE69825548T2 (de) | 2005-02-03 |
EP0921382B1 (de) | 2004-08-11 |
JP3315086B2 (ja) | 2002-08-19 |
JPH11264771A (ja) | 1999-09-28 |
EP0921382A2 (de) | 1999-06-09 |
EP0921382A3 (de) | 2000-04-05 |
CA2255197C (en) | 2001-05-01 |
CA2255197A1 (en) | 1999-06-04 |
KR19990062780A (ko) | 1999-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |