DE69823904T2 - Mikromechanische Pipettiervorrichtung - Google Patents
Mikromechanische Pipettiervorrichtung Download PDFInfo
- Publication number
- DE69823904T2 DE69823904T2 DE69823904T DE69823904T DE69823904T2 DE 69823904 T2 DE69823904 T2 DE 69823904T2 DE 69823904 T DE69823904 T DE 69823904T DE 69823904 T DE69823904 T DE 69823904T DE 69823904 T2 DE69823904 T2 DE 69823904T2
- Authority
- DE
- Germany
- Prior art keywords
- chamber
- micromechanical
- actuator
- membrane
- sensor means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012528 membrane Substances 0.000 claims description 49
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 30
- 229910052710 silicon Inorganic materials 0.000 claims description 30
- 239000010703 silicon Substances 0.000 claims description 30
- 239000007788 liquid Substances 0.000 claims description 29
- 239000012530 fluid Substances 0.000 claims description 16
- 230000004044 response Effects 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 210000004379 membrane Anatomy 0.000 description 44
- 235000012431 wafers Nutrition 0.000 description 26
- 239000011521 glass Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 6
- 239000000523 sample Substances 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007705 chemical test Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000002405 diagnostic procedure Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010339 medical test Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001717 pathogenic effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/02—Burettes; Pipettes
- B01L3/0241—Drop counters; Drop formers
- B01L3/0268—Drop counters; Drop formers using pulse dispensing or spraying, eg. inkjet type, piezo actuated ejection of droplets from capillaries
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/02—Burettes; Pipettes
- B01L3/021—Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/14—Process control and prevention of errors
- B01L2200/143—Quality control, feedback systems
- B01L2200/146—Employing pressure sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
- B01L2400/0481—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
- G01N2035/1027—General features of the devices
- G01N2035/1034—Transferring microquantities of liquid
- G01N2035/1039—Micropipettes, e.g. microcapillary tubes
Landscapes
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
- Sampling And Sample Adjustment (AREA)
- Reciprocating Pumps (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP97104756 | 1997-03-20 | ||
| EP97104756 | 1997-03-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69823904D1 DE69823904D1 (de) | 2004-06-24 |
| DE69823904T2 true DE69823904T2 (de) | 2005-06-16 |
Family
ID=8226622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69823904T Expired - Lifetime DE69823904T2 (de) | 1997-03-20 | 1998-03-02 | Mikromechanische Pipettiervorrichtung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6407437B1 (enExample) |
| JP (1) | JP4083280B2 (enExample) |
| DE (1) | DE69823904T2 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990072936A (ko) * | 1998-02-27 | 1999-09-27 | 가나이 쓰도무 | 아이솔레이터및그것을사용하는모뎀장치 |
| US6713828B1 (en) * | 1999-12-17 | 2004-03-30 | Delphi Technologies, Inc. | Monolithic fully-integrated vacuum sealed BiCMOS pressure sensor |
| DE10022398B4 (de) * | 2000-04-28 | 2011-03-17 | Eppendorf Ag | Gaspolster-Mikrodosiersystem |
| US6740530B1 (en) | 2000-11-22 | 2004-05-25 | Xerox Corporation | Testing method and configurations for multi-ejector system |
| US6861034B1 (en) | 2000-11-22 | 2005-03-01 | Xerox Corporation | Priming mechanisms for drop ejection devices |
| US6713022B1 (en) | 2000-11-22 | 2004-03-30 | Xerox Corporation | Devices for biofluid drop ejection |
| DE10104868A1 (de) * | 2001-02-03 | 2002-08-22 | Bosch Gmbh Robert | Mikromechanisches Bauelement sowie ein Verfahren zur Herstellung eines mikromechanischen Bauelements |
| US7310543B2 (en) * | 2001-03-26 | 2007-12-18 | Kumetrix, Inc. | Silicon microprobe with integrated biosensor |
| US7125727B2 (en) * | 2003-01-29 | 2006-10-24 | Protedyne Corporation | Sample handling tool with piezoelectric actuator |
| EP1714116B1 (en) * | 2004-02-06 | 2016-06-29 | Seyonic SA | Pipette verification device and pipette |
| JP2007130599A (ja) * | 2005-11-11 | 2007-05-31 | Canon Inc | 液体噴射ヘッドおよび液体噴射ヘッドの液体充填方法、多種液噴射ヘッド |
| JP2009022861A (ja) * | 2007-07-18 | 2009-02-05 | Fujitsu Ltd | 液体吐出装置および液体吐出方法並びにマイクロインジェクション装置 |
| DK2546656T3 (da) * | 2010-02-09 | 2019-07-22 | Cytena Gmbh | Udtømningsindretning til væskemateriale, der indeholder partikler |
| EP2704834A2 (en) * | 2011-05-06 | 2014-03-12 | Owe Orwar | Microfluidic device with holding interface, and method of use |
| CN113711056B (zh) * | 2019-04-18 | 2024-11-26 | 美国西门子医学诊断股份有限公司 | 具有移液器适配性的集成微流控设备 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5591139A (en) * | 1994-06-06 | 1997-01-07 | The Regents Of The University Of California | IC-processed microneedles |
| DK0725267T3 (da) | 1995-02-01 | 1999-08-02 | Rossendorf Forschzent | Elektrisk styrbar mikropipette |
-
1998
- 1998-03-02 DE DE69823904T patent/DE69823904T2/de not_active Expired - Lifetime
- 1998-03-19 JP JP07052398A patent/JP4083280B2/ja not_active Expired - Fee Related
- 1998-03-19 US US09/044,735 patent/US6407437B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP4083280B2 (ja) | 2008-04-30 |
| DE69823904D1 (de) | 2004-06-24 |
| US6407437B1 (en) | 2002-06-18 |
| JPH10318150A (ja) | 1998-12-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8328 | Change in the person/name/address of the agent |
Representative=s name: DURM & PARTNER, 76133 KARLSRUHE |