DE69821509D1 - Teilchenstrahlgerät - Google Patents

Teilchenstrahlgerät

Info

Publication number
DE69821509D1
DE69821509D1 DE69821509T DE69821509T DE69821509D1 DE 69821509 D1 DE69821509 D1 DE 69821509D1 DE 69821509 T DE69821509 T DE 69821509T DE 69821509 T DE69821509 T DE 69821509T DE 69821509 D1 DE69821509 D1 DE 69821509D1
Authority
DE
Germany
Prior art keywords
particle beam
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69821509T
Other languages
English (en)
Other versions
DE69821509T2 (de
Inventor
Juergen Dr Frosien
Stefan Dr Lanio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority claimed from EP98122710A external-priority patent/EP1022766B1/de
Application granted granted Critical
Publication of DE69821509D1 publication Critical patent/DE69821509D1/de
Publication of DE69821509T2 publication Critical patent/DE69821509T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE69821509T 1998-11-30 1998-11-30 Korpuskularstrahlgerät Expired - Lifetime DE69821509T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP98122710A EP1022766B1 (de) 1998-11-30 1998-11-30 Teilchenstrahlgerät

Publications (2)

Publication Number Publication Date
DE69821509D1 true DE69821509D1 (de) 2004-03-11
DE69821509T2 DE69821509T2 (de) 2005-01-05

Family

ID=31502878

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69821509T Expired - Lifetime DE69821509T2 (de) 1998-11-30 1998-11-30 Korpuskularstrahlgerät

Country Status (1)

Country Link
DE (1) DE69821509T2 (de)

Also Published As

Publication number Publication date
DE69821509T2 (de) 2005-01-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition