DE69736843D1 - Messgerät für einen physikalischen parameter und zugehörige messmethode - Google Patents

Messgerät für einen physikalischen parameter und zugehörige messmethode

Info

Publication number
DE69736843D1
DE69736843D1 DE69736843T DE69736843T DE69736843D1 DE 69736843 D1 DE69736843 D1 DE 69736843D1 DE 69736843 T DE69736843 T DE 69736843T DE 69736843 T DE69736843 T DE 69736843T DE 69736843 D1 DE69736843 D1 DE 69736843D1
Authority
DE
Germany
Prior art keywords
measuring device
measurement method
physical parameter
associated measurement
parameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69736843T
Other languages
English (en)
Inventor
S White
P Laplant
W Dixon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Perceptron Inc
Original Assignee
Perceptron Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perceptron Inc filed Critical Perceptron Inc
Application granted granted Critical
Publication of DE69736843D1 publication Critical patent/DE69736843D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G01N29/348Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor with frequency characteristics, e.g. single frequency signals, chirp signals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0666Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using an exciting beam and a detection beam including surface acoustic waves [SAW]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G01B17/025Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness for measuring thickness of coating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654Imaging
    • G01N29/0681Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/225Supports, positioning or alignment in moving situation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2418Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/36Detecting the response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/42Detecting the response signal, e.g. electronic circuits specially adapted therefor by frequency filtering or by tuning to resonant frequency
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/46Processing the detected response signal, e.g. electronic circuits specially adapted therefor by spectral analysis, e.g. Fourier analysis or wavelet analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/50Processing the detected response signal, e.g. electronic circuits specially adapted therefor using auto-correlation techniques or cross-correlation techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/01Indexing codes associated with the measuring variable
    • G01N2291/014Resonance or resonant frequency
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/022Liquids
    • G01N2291/0228Aqueous liquids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/023Solids
    • G01N2291/0231Composite or layered materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/023Solids
    • G01N2291/0237Thin materials, e.g. paper, membranes, thin films
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0251Solidification, icing, curing composites, polymerisation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02818Density, viscosity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02854Length, thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0421Longitudinal waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/044Internal reflections (echoes), e.g. on walls or defects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/048Transmission, i.e. analysed material between transmitter and receiver
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/10Number of transducers
    • G01N2291/101Number of transducers one transducer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
DE69736843T 1996-11-22 1997-11-21 Messgerät für einen physikalischen parameter und zugehörige messmethode Expired - Fee Related DE69736843D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US3171796P 1996-11-22 1996-11-22
US3200696P 1996-11-22 1996-11-22
PCT/US1997/021307 WO1998022801A1 (en) 1996-11-22 1997-11-21 Physical parameter measuring apparatus and method thereof

Publications (1)

Publication Number Publication Date
DE69736843D1 true DE69736843D1 (de) 2006-11-30

Family

ID=26707537

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69736843T Expired - Fee Related DE69736843D1 (de) 1996-11-22 1997-11-21 Messgerät für einen physikalischen parameter und zugehörige messmethode

Country Status (5)

Country Link
US (1) US6092419A (de)
EP (2) EP1007942B1 (de)
CA (2) CA2272956A1 (de)
DE (1) DE69736843D1 (de)
WO (2) WO1998022814A1 (de)

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US7342665B2 (en) * 1998-06-30 2008-03-11 Drake Jr Thomas E System and method for control of paint thickness
US7545509B2 (en) * 1998-06-30 2009-06-09 Lockheed Martin Corporation System and method for online control of paper elasticity and thickness
US6393915B1 (en) * 1999-07-29 2002-05-28 Koninklijke Philips Electronics N.V. Method and device for simultaneously measuring multiple properties of multilayer films
DE19963345A1 (de) * 1999-12-27 2001-07-05 Leica Microsystems Optische Messanordnung und Verfahren zur Neigungsmessung
CA2352839A1 (en) * 2000-07-11 2002-01-11 National Research Council Of Canada Apparatus and method for evaluating the physical properties of a sample using ultrasonics
EP1305617A2 (de) 2000-07-13 2003-05-02 National Research Council Of Canada Ultraschall-laser-testsystem
EP1301778B1 (de) * 2000-07-14 2012-06-13 Lockheed Martin Corporation Methode und anordnung zur bestimmung der porösität von verbundwerkstoffen mittels ultraschall
US6397680B1 (en) * 2000-07-24 2002-06-04 National Research Council Of Canada Ultrasonic spectroscopy apparatus for determining thickness and other properties of multilayer structures
US6403322B1 (en) 2001-03-27 2002-06-11 Lam Research Corporation Acoustic detection of dechucking and apparatus therefor
JP2003057027A (ja) * 2001-08-10 2003-02-26 Ebara Corp 測定装置
US6606909B2 (en) * 2001-08-16 2003-08-19 Lockheed Martin Corporation Method and apparatus to conduct ultrasonic flaw detection for multi-layered structure
US6856918B2 (en) * 2001-11-26 2005-02-15 Lockheed Martin Corporation Method to characterize material using mathematical propagation models and ultrasonic signal
JP4220169B2 (ja) * 2002-03-20 2009-02-04 富士重工業株式会社 実車の塗膜厚予測方法、実車の塗膜厚予測システムおよび記録媒体
US7908757B2 (en) 2008-10-16 2011-03-22 Hexagon Metrology, Inc. Articulating measuring arm with laser scanner
EP2438394A4 (de) * 2009-05-26 2017-07-12 Udo Wolfgang Bucher Nasslackbeschichtung-dickenmessung und instrument
US20110112786A1 (en) * 2009-11-06 2011-05-12 Hexagon Metrology Ab Cmm with improved sensors
DE102010025144A1 (de) * 2009-12-04 2011-06-09 Sms Meer Gmbh Berührungslose Rohrwanddickenmessvorrichtung und Rohrwanddickenmessung
JP5249975B2 (ja) * 2010-02-26 2013-07-31 三菱重工業株式会社 レーザ超音波探傷装置
US8756998B1 (en) 2011-03-04 2014-06-24 Express Scripts, Inc. Solid contents verification systems and methods
US8965100B2 (en) * 2012-01-20 2015-02-24 The Boeing Company Ultrasonic modeling for inspection of composite irregularities
US20130312527A1 (en) * 2012-05-22 2013-11-28 Richard A. Lomenzo, JR. Integrated excitation and measurement system
US9360418B2 (en) 2014-07-17 2016-06-07 The Boeing Company Nondestructive inspection using hypersound
EP3194884B1 (de) 2014-09-19 2023-11-01 Hexagon Metrology, Inc Multimodale tragbare koordinatenmessmaschine
CN107429988B (zh) * 2015-03-03 2020-12-08 Abb瑞士股份有限公司 用于表征湿漆层的堆叠体的传感器系统和方法
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US10876882B1 (en) * 2019-06-26 2020-12-29 Honeywell International Inc. Online grade selection for weight measurements of composite sheets
CN113587866B (zh) * 2021-07-12 2022-10-28 西安交通大学 基于光栅激光超声声谱的薄膜涂层厚度无损测量方法
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Also Published As

Publication number Publication date
EP1007942A1 (de) 2000-06-14
CA2272956A1 (en) 1998-05-28
WO1998022801A1 (en) 1998-05-28
EP1007942B1 (de) 2006-10-18
EP1023595A4 (de) 2003-07-09
CA2272954C (en) 2005-03-15
EP1007942A4 (de) 2000-06-14
US6092419A (en) 2000-07-25
WO1998022814A1 (en) 1998-05-28
CA2272954A1 (en) 1998-05-28
EP1023595A1 (de) 2000-08-02

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee