DE69727111D1 - Halterantriebseinheit - Google Patents

Halterantriebseinheit

Info

Publication number
DE69727111D1
DE69727111D1 DE69727111T DE69727111T DE69727111D1 DE 69727111 D1 DE69727111 D1 DE 69727111D1 DE 69727111 T DE69727111 T DE 69727111T DE 69727111 T DE69727111 T DE 69727111T DE 69727111 D1 DE69727111 D1 DE 69727111D1
Authority
DE
Germany
Prior art keywords
drive unit
holder drive
holder
unit
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69727111T
Other languages
English (en)
Other versions
DE69727111T2 (de
Inventor
Satoru Yuasa
Yoshio Tamura
Makoto Nakaya
Tomoyasu Matsuno
Nobuo Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Ion Equipment Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Publication of DE69727111D1 publication Critical patent/DE69727111D1/de
Application granted granted Critical
Publication of DE69727111T2 publication Critical patent/DE69727111T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/08—Protective coverings for parts of machine tools; Splash guards
    • B23Q11/0883—Protective coverings for parts of machine tools; Splash guards for spindles, e.g. for their bearings or casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/74—Sealings of sliding-contact bearings
    • F16C33/741—Sealings of sliding-contact bearings by means of a fluid
    • F16C33/748—Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2005—Seal mechanisms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/913—Seal for fluid pressure below atmospheric, e.g. vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE69727111T 1996-10-18 1997-10-17 Halterantriebseinheit Expired - Fee Related DE69727111T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP29745296A JP3077605B2 (ja) 1996-10-18 1996-10-18 ホルダ駆動装置
JP29745296 1996-10-18

Publications (2)

Publication Number Publication Date
DE69727111D1 true DE69727111D1 (de) 2004-02-12
DE69727111T2 DE69727111T2 (de) 2004-06-09

Family

ID=17846701

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69727111T Expired - Fee Related DE69727111T2 (de) 1996-10-18 1997-10-17 Halterantriebseinheit

Country Status (6)

Country Link
US (1) US6805487B1 (de)
EP (1) EP0838835B1 (de)
JP (1) JP3077605B2 (de)
KR (1) KR100417505B1 (de)
DE (1) DE69727111T2 (de)
TW (1) TW391027B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW559688B (en) * 1999-04-19 2003-11-01 Asml Netherlands Bv Lithographic projection apparatus, vacuum apparatus, low-stiffness seal for sealing between vacuum chamber wall and elongate rod, device manufacturing method and integrated circuit manufactured thereof
US20020180159A1 (en) * 2000-12-13 2002-12-05 Nsk Ltd. Sealing device and positioning device using the same
EP1350997B1 (de) * 2002-04-05 2014-10-01 Ebara Corporation Betriebsverfahren für eine Dichtungsvorrichtung
US20040165972A1 (en) * 2003-02-21 2004-08-26 Vladimir Knyazik Apparatus and method for insertion of a sample into a vacuum chamber
JP4560321B2 (ja) * 2004-03-31 2010-10-13 株式会社Ｓｅｎ ウエハスキャン装置
DE102004051684A1 (de) * 2004-10-23 2006-04-27 Krauss-Maffei Kunststofftechnik Gmbh Bearbeitungsvorrichtung mit Hoch- oder Unterdruckkammer
JP5042515B2 (ja) * 2006-03-22 2012-10-03 株式会社Ｓｅｎ 真空駆動軸の真空シール機構
KR100984285B1 (ko) 2008-11-07 2010-09-30 (주)유지인트 볼 스크류의 베어링 방수구조
KR20110026935A (ko) * 2009-09-09 2011-03-16 삼성전자주식회사 로봇 관절 구동장치 및 이를 포함하는 로봇
US10119529B2 (en) * 2015-03-17 2018-11-06 Varian Semiconductor Equipment Associates, Inc. Cryopump arrangement for improved pump speed
US10906145B2 (en) * 2017-01-05 2021-02-02 American Axle & Manufacturing, Inc. Driveline test fixture having compliant collar
DE102017122754A1 (de) * 2017-09-29 2019-04-04 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Vorrichtung sowie Vakuumkammer
TW202112572A (zh) * 2019-09-26 2021-04-01 伍鐌科技股份有限公司 滾動結構

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248261B2 (de) * 1972-04-11 1977-12-08
US4361332A (en) * 1980-11-12 1982-11-30 The United States Of America As Represented By The United States Department Of Energy Rotatable seal assembly
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置
US4749283A (en) * 1985-09-12 1988-06-07 Canon Kabushiki Kaisha Static pressure bearing
FR2602911B1 (fr) * 1986-08-05 1991-06-28 Letyrant Claude Dispositif de deplacement d'echantillons dans une enceinte a atmosphere controlee
US4726689A (en) * 1986-10-22 1988-02-23 Eclipse Ion Technology, Inc. Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment
US4812101A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for continuous throughput in a vacuum environment
US4797053A (en) * 1988-02-16 1989-01-10 Huntington Mechanical Laboratories, Inc. Manipulator for vacuum applications
US5003183A (en) * 1989-05-15 1991-03-26 Nissin Electric Company, Limited Ion implantation apparatus and method of controlling the same
US5180230A (en) * 1991-06-12 1993-01-19 Etec Systems, Inc. Rolling element cage constraint

Also Published As

Publication number Publication date
KR19980032893A (ko) 1998-07-25
KR100417505B1 (ko) 2004-11-06
EP0838835A2 (de) 1998-04-29
JP3077605B2 (ja) 2000-08-14
EP0838835A3 (de) 2000-03-08
EP0838835B1 (de) 2004-01-07
DE69727111T2 (de) 2004-06-09
TW391027B (en) 2000-05-21
JPH10125613A (ja) 1998-05-15
US6805487B1 (en) 2004-10-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NISSIN ION EQUIPMENT CO., LTD., KYOTO, JP

8339 Ceased/non-payment of the annual fee