DE69715180D1 - Magnetanordnung für magnetrone - Google Patents

Magnetanordnung für magnetrone

Info

Publication number
DE69715180D1
DE69715180D1 DE69715180T DE69715180T DE69715180D1 DE 69715180 D1 DE69715180 D1 DE 69715180D1 DE 69715180 T DE69715180 T DE 69715180T DE 69715180 T DE69715180 T DE 69715180T DE 69715180 D1 DE69715180 D1 DE 69715180D1
Authority
DE
Germany
Prior art keywords
magnetrone
magnet arrangement
magnet
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69715180T
Other languages
English (en)
Other versions
DE69715180T2 (de
Inventor
Afer Hussain J
Michael Walls
Graham Spencer
Robert Waugh
Henry White
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum International Ltd
Original Assignee
Applied Vision Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Vision Ltd filed Critical Applied Vision Ltd
Publication of DE69715180D1 publication Critical patent/DE69715180D1/de
Application granted granted Critical
Publication of DE69715180T2 publication Critical patent/DE69715180T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3452—Magnet distribution
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering
DE69715180T 1996-04-02 1997-04-02 Magnetanordnung für magnetrone Expired - Lifetime DE69715180T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9606920.8A GB9606920D0 (en) 1996-04-02 1996-04-02 Magnet array for magnetrons
PCT/GB1997/000918 WO1997037371A1 (en) 1996-04-02 1997-04-02 Magnet array for magnetrons

Publications (2)

Publication Number Publication Date
DE69715180D1 true DE69715180D1 (de) 2002-10-10
DE69715180T2 DE69715180T2 (de) 2003-05-15

Family

ID=10791463

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69715180T Expired - Lifetime DE69715180T2 (de) 1996-04-02 1997-04-02 Magnetanordnung für magnetrone

Country Status (6)

Country Link
US (1) US6159351A (de)
EP (1) EP0892984B1 (de)
AU (1) AU2299897A (de)
DE (1) DE69715180T2 (de)
GB (1) GB9606920D0 (de)
WO (1) WO1997037371A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6579421B1 (en) 1999-01-07 2003-06-17 Applied Materials, Inc. Transverse magnetic field for ionized sputter deposition
US8696875B2 (en) * 1999-10-08 2014-04-15 Applied Materials, Inc. Self-ionized and inductively-coupled plasma for sputtering and resputtering
US10047430B2 (en) 1999-10-08 2018-08-14 Applied Materials, Inc. Self-ionized and inductively-coupled plasma for sputtering and resputtering
US6610184B2 (en) 2001-11-14 2003-08-26 Applied Materials, Inc. Magnet array in conjunction with rotating magnetron for plasma sputtering
JP4371569B2 (ja) * 2000-12-25 2009-11-25 信越化学工業株式会社 マグネトロンスパッタ装置とそれを用いたフォトマスクブランクの製造方法
US7041201B2 (en) * 2001-11-14 2006-05-09 Applied Materials, Inc. Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith
US20040055883A1 (en) * 2002-03-02 2004-03-25 Shinzo Onishi Magnetron sputtering target for non-magnetic materials
US6623610B1 (en) * 2002-03-02 2003-09-23 Shinzo Onishi Magnetron sputtering target for magnetic materials
US7504006B2 (en) * 2002-08-01 2009-03-17 Applied Materials, Inc. Self-ionized and capacitively-coupled plasma for sputtering and resputtering
US20070007130A1 (en) * 2005-07-11 2007-01-11 Heraeus, Inc. Enhanced magnetron sputtering target
KR101147484B1 (ko) * 2007-01-26 2012-05-22 가부시끼가이샤 오오사까 신꾸우기끼 세이사꾸쇼 스퍼터링 방법 및 스퍼터링 장치
US20100018857A1 (en) * 2008-07-23 2010-01-28 Seagate Technology Llc Sputter cathode apparatus allowing thick magnetic targets
EP2718959B1 (de) 2011-06-07 2018-10-31 Vision Ease LP Verbesserungen bei der auftragung von beschichtungsmaterialien
US20130146451A1 (en) * 2011-12-07 2013-06-13 Intermolecular, Inc. Magnetic Confinement and Directionally Driven Ionized Sputtered Films For Combinatorial Processing

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4060470A (en) * 1974-12-06 1977-11-29 Clarke Peter J Sputtering apparatus and method
GB2096177B (en) * 1981-04-07 1985-07-17 Fournier Paul R Improved integrated sputtering apparatus and method
US4407708A (en) * 1981-08-06 1983-10-04 Eaton Corporation Method for operating a magnetron sputtering apparatus
JPS5976875A (ja) * 1982-10-22 1984-05-02 Hitachi Ltd マグネトロン型スパッタ装置とそれに用いるターゲット
JPS59173265A (ja) * 1983-03-22 1984-10-01 Fujitsu Ltd スパツタ装置
JPS62218562A (ja) * 1986-03-19 1987-09-25 Fujitsu Ltd スパツタリング装置
EP0295649B1 (de) * 1987-06-16 1994-12-14 Hitachi, Ltd. Magnetron-Zerstäubungsgerät und Verfahren zur Anwendung desselben zur Schichtenherstellung
DE3844064A1 (de) * 1988-12-28 1990-07-05 Leybold Ag Katodenzerstaeubungsvorrichtung nach dem magnetron-prinzip mit einer hohlkatode und einem zylindrischen target
US5171415A (en) * 1990-12-21 1992-12-15 Novellus Systems, Inc. Cooling method and apparatus for magnetron sputtering
TW271490B (de) * 1993-05-05 1996-03-01 Varian Associates
DE4329155A1 (de) * 1993-08-30 1995-03-02 Bloesch W Ag Magnetfeldkathode
JP2627861B2 (ja) * 1993-10-22 1997-07-09 アネルバ株式会社 Ｔｉ−ＴｉＮ積層膜の成膜方法および装置
US5795451A (en) * 1997-06-12 1998-08-18 Read-Rite Corporation Sputtering apparatus with a rotating magnet array

Also Published As

Publication number Publication date
GB9606920D0 (en) 1996-06-05
AU2299897A (en) 1997-10-22
WO1997037371A1 (en) 1997-10-09
US6159351A (en) 2000-12-12
EP0892984A1 (de) 1999-01-27
EP0892984B1 (de) 2002-09-04
DE69715180T2 (de) 2003-05-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS HIGH VACUUM INTERNATIONAL LTD., WINDLESHAM