DE69625615T2 - METHOD AND DEVICE FOR DEPOSITING PARYLENE AF4 ON SEMICONDUCTOR WAFERS - Google Patents

METHOD AND DEVICE FOR DEPOSITING PARYLENE AF4 ON SEMICONDUCTOR WAFERS

Info

Publication number
DE69625615T2
DE69625615T2 DE69625615T DE69625615T DE69625615T2 DE 69625615 T2 DE69625615 T2 DE 69625615T2 DE 69625615 T DE69625615 T DE 69625615T DE 69625615 T DE69625615 T DE 69625615T DE 69625615 T2 DE69625615 T2 DE 69625615T2
Authority
DE
Germany
Prior art keywords
semiconductor wafers
depositing parylene
parylene
depositing
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69625615T
Other languages
German (de)
Other versions
DE69625615D1 (en
Inventor
F Beach
A Olson
John Wary
Kermit Crain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Specialty Coating Systems Inc
Original Assignee
Specialty Coating Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/549,169 external-priority patent/US5534068A/en
Priority claimed from US08/549,395 external-priority patent/US5709753A/en
Priority claimed from US08/549,130 external-priority patent/US5556473A/en
Priority claimed from US08/549,635 external-priority patent/US5536322A/en
Priority claimed from US08/549,087 external-priority patent/US5538758A/en
Priority claimed from US08/549,093 external-priority patent/US5536319A/en
Priority claimed from US08/549,133 external-priority patent/US5536317A/en
Priority claimed from US08/549,131 external-priority patent/US5536321A/en
Application filed by Specialty Coating Systems Inc filed Critical Specialty Coating Systems Inc
Priority claimed from PCT/US1996/017003 external-priority patent/WO1997015699A2/en
Application granted granted Critical
Publication of DE69625615D1 publication Critical patent/DE69625615D1/en
Publication of DE69625615T2 publication Critical patent/DE69625615T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE69625615T 1995-10-27 1996-10-25 METHOD AND DEVICE FOR DEPOSITING PARYLENE AF4 ON SEMICONDUCTOR WAFERS Expired - Fee Related DE69625615T2 (en)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
US08/549,087 US5538758A (en) 1995-10-27 1995-10-27 Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers
US08/549,093 US5536319A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including an atmospheric shroud and inert gas source
US08/549,133 US5536317A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a quartz crystal thickness/rate controller
US08/549,131 US5536321A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filter
US08/549,395 US5709753A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a heated and cooled dimer crucible
US08/549,169 US5534068A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement
US08/549,635 US5536322A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device
US08/549,130 US5556473A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including dry vacuum pump system and downstream cold trap
US68016196A 1996-07-15 1996-07-15
US67995896A 1996-07-15 1996-07-15
PCT/US1996/017003 WO1997015699A2 (en) 1995-10-27 1996-10-25 Method and apparatus for the deposition of parylene af4 onto semiconductor wafers

Publications (2)

Publication Number Publication Date
DE69625615D1 DE69625615D1 (en) 2003-02-06
DE69625615T2 true DE69625615T2 (en) 2003-09-11

Family

ID=27581286

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69625615T Expired - Fee Related DE69625615T2 (en) 1995-10-27 1996-10-25 METHOD AND DEVICE FOR DEPOSITING PARYLENE AF4 ON SEMICONDUCTOR WAFERS

Country Status (1)

Country Link
DE (1) DE69625615T2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007008291A1 (en) * 2007-02-16 2008-08-21 Siemens Ag Air flow sensor
DE102008026974A1 (en) * 2008-06-03 2009-12-10 Aixtron Ag Method and apparatus for depositing thin layers of polymeric para-xylylenes or substituted para-xylylenes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007008291A1 (en) * 2007-02-16 2008-08-21 Siemens Ag Air flow sensor
DE102008026974A1 (en) * 2008-06-03 2009-12-10 Aixtron Ag Method and apparatus for depositing thin layers of polymeric para-xylylenes or substituted para-xylylenes

Also Published As

Publication number Publication date
DE69625615D1 (en) 2003-02-06

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee