DE69612630T2 - Photosensitive resin composition and method for producing fine structures therewith - Google Patents

Photosensitive resin composition and method for producing fine structures therewith

Info

Publication number
DE69612630T2
DE69612630T2 DE1996612630 DE69612630T DE69612630T2 DE 69612630 T2 DE69612630 T2 DE 69612630T2 DE 1996612630 DE1996612630 DE 1996612630 DE 69612630 T DE69612630 T DE 69612630T DE 69612630 T2 DE69612630 T2 DE 69612630T2
Authority
DE
Germany
Prior art keywords
resin composition
photosensitive resin
producing fine
fine structures
structures therewith
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1996612630
Other languages
German (de)
Other versions
DE69612630D1 (en
Inventor
Hiroshi Tsushima
Shigeru Mikami
Emi Watanabe
Tsuyoshi Imamura
Iwao Sumiyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Paint Co Ltd
Original Assignee
Nippon Paint Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Paint Co Ltd filed Critical Nippon Paint Co Ltd
Publication of DE69612630D1 publication Critical patent/DE69612630D1/en
Application granted granted Critical
Publication of DE69612630T2 publication Critical patent/DE69612630T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0754—Non-macromolecular compounds containing silicon-to-silicon bonds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
DE1996612630 1995-01-25 1996-01-22 Photosensitive resin composition and method for producing fine structures therewith Expired - Lifetime DE69612630T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1010395 1995-01-25

Publications (2)

Publication Number Publication Date
DE69612630D1 DE69612630D1 (en) 2001-06-07
DE69612630T2 true DE69612630T2 (en) 2001-10-11

Family

ID=11740986

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996612630 Expired - Lifetime DE69612630T2 (en) 1995-01-25 1996-01-22 Photosensitive resin composition and method for producing fine structures therewith

Country Status (4)

Country Link
EP (1) EP0725315B1 (en)
KR (1) KR100382443B1 (en)
DE (1) DE69612630T2 (en)
TW (1) TW408248B (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100245180B1 (en) * 1996-05-29 2000-02-15 니시무로 타이죠 A phothosensitive composition, a method of forming a pattern and electronic parts
EP1376229B1 (en) 1997-08-08 2010-10-13 Dai Nippon Printing Co., Ltd. Plate for lithography and process for producing the same
JP4096138B2 (en) * 1999-04-12 2008-06-04 Ｊｓｒ株式会社 Method for producing resist underlayer film composition
WO2002077714A1 (en) * 2001-03-26 2002-10-03 Nippon Paint Co., Ltd. Self-flame-retardant resist material and insulating material
KR20040005896A (en) * 2001-03-26 2004-01-16 닛뽕 뻬인또 가부시키가이샤 Method for forming metal pattern
JP2002290018A (en) * 2001-03-26 2002-10-04 Nippon Paint Co Ltd Method of manufacturing printed wiring board and resist material
US6830818B2 (en) * 2001-04-13 2004-12-14 Hitachi Cable, Ltd. Polymer material and polymer film
US7035518B2 (en) 2001-04-13 2006-04-25 Hitachi Cable, Ltd. Polymer waveguides and process for producing the same
US6699748B2 (en) 2002-05-30 2004-03-02 Mitsubishi Denki Kabushiki Kaisha Method of fabricating capacitor having a photosensitive resin layer as a dielectric
JP2007537337A (en) * 2004-05-14 2007-12-20 ダウ・コーニング・コーポレイション Method for preparing branched polysilanes
KR100881860B1 (en) 2007-01-17 2009-02-06 제일모직주식회사 Photosensitive resin composition for color filter and color filter of image sensor using the composition
KR100959187B1 (en) 2007-10-18 2010-05-24 제일모직주식회사 Ink composition for color filter, method for preparing a color filter using the same, and color filter
US8486591B2 (en) 2008-10-24 2013-07-16 Cheil Industries Inc. Photosensitive resin composition for color filter and color filter prepared using the same
KR101344790B1 (en) 2010-06-10 2013-12-24 제일모직주식회사 Blue color resin composition for color filter and color filter using same
KR101293787B1 (en) 2010-07-28 2013-08-06 제일모직주식회사 Transparent Thermoplastic Resin Composition with Excellent Flame-resistance and Heat-resistance
CN102436142B (en) 2010-09-29 2013-11-06 第一毛织株式会社 Black photosensitive resin composition and light blocking layer using the same
KR101351614B1 (en) 2010-11-05 2014-02-17 제일모직주식회사 Polycarbonate resin composition with flame retardancy and scratch resistance
KR101443757B1 (en) 2010-11-08 2014-09-25 제일모직 주식회사 Photosensitive resin composition for color filter and color filter using same
KR101453771B1 (en) 2010-11-08 2014-10-23 제일모직 주식회사 Photosensitive resin composition for color filter and color filter using same
KR101400194B1 (en) 2010-12-01 2014-05-27 제일모직 주식회사 Photosensitive resin composition for color filter, and color filter using the same
KR101400193B1 (en) 2010-12-10 2014-05-28 제일모직 주식회사 Photosensitive resin composition for color filter and color filter using same
KR101374360B1 (en) 2010-12-14 2014-03-18 제일모직주식회사 Polycarbonate resin composition with flame retardancy and scratch resistance
KR20130002789A (en) 2011-06-29 2013-01-08 제일모직주식회사 Photosensitive resin composition for color filter and color filter using the same
KR101344786B1 (en) 2011-12-02 2013-12-26 제일모직주식회사 Photosensitive resin composition for color filter comprising the same and color filter using the same
KR101674990B1 (en) 2012-12-07 2016-11-10 제일모직 주식회사 Photosensitive resin composition for color filter, and color filter using the same
KR20140076320A (en) 2012-12-12 2014-06-20 제일모직주식회사 Photosensitive resin composition and black spacer using the same
KR20140083620A (en) 2012-12-26 2014-07-04 제일모직주식회사 Photosensitive resin composition for light blocking layer and light blocking layer using the same
US10018912B2 (en) 2014-06-13 2018-07-10 Sharp Kabushiki Kaisha Photosensitive resin composition, wavelength conversion substrate and light emitting device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61189533A (en) * 1985-02-19 1986-08-23 Hitachi Ltd Photosensitive resin composition
JPH0643655A (en) * 1991-03-04 1994-02-18 Internatl Business Mach Corp <Ibm> Forming process of resist image and electronic device
CA2087110A1 (en) * 1992-01-14 1993-07-15 Hiroshi Tsushima Method of forming color pattern
JPH06289528A (en) * 1993-04-07 1994-10-18 Nippon Paint Co Ltd Photosensitive color developing composition

Also Published As

Publication number Publication date
EP0725315A3 (en) 1997-05-02
EP0725315B1 (en) 2001-05-02
DE69612630D1 (en) 2001-06-07
TW408248B (en) 2000-10-11
KR100382443B1 (en) 2004-05-31
EP0725315A2 (en) 1996-08-07

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