DE69601576D1 - Vorrichtung zur Analyse eines Ernergiespektrums - Google Patents

Vorrichtung zur Analyse eines Ernergiespektrums

Info

Publication number
DE69601576D1
DE69601576D1 DE69601576T DE69601576T DE69601576D1 DE 69601576 D1 DE69601576 D1 DE 69601576D1 DE 69601576 T DE69601576 T DE 69601576T DE 69601576 T DE69601576 T DE 69601576T DE 69601576 D1 DE69601576 D1 DE 69601576D1
Authority
DE
Germany
Prior art keywords
analyzing
energy spectrum
spectrum
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69601576T
Other languages
English (en)
Other versions
DE69601576T2 (de
Inventor
Ondrej Krivanek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gatan Inc
Original Assignee
Gatan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gatan Inc filed Critical Gatan Inc
Publication of DE69601576D1 publication Critical patent/DE69601576D1/de
Application granted granted Critical
Publication of DE69601576T2 publication Critical patent/DE69601576T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/045—Diaphragms
    • H01J2237/0455—Diaphragms with variable aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2538—Low energy electron microscopy [LEEM]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Spectrometry And Color Measurement (AREA)
DE69601576T 1995-08-25 1996-08-08 Vorrichtung zur Analyse eines Ernergiespektrums Expired - Lifetime DE69601576T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/519,535 US5640012A (en) 1995-08-25 1995-08-25 Precision-controlled slit mechanism for electron microscope
PCT/US1996/012838 WO1997008732A1 (en) 1995-08-25 1996-08-08 Precision-controlled slit mechanism for electron microscope

Publications (2)

Publication Number Publication Date
DE69601576D1 true DE69601576D1 (de) 1999-04-01
DE69601576T2 DE69601576T2 (de) 1999-09-02

Family

ID=24068727

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69601576T Expired - Lifetime DE69601576T2 (de) 1995-08-25 1996-08-08 Vorrichtung zur Analyse eines Ernergiespektrums

Country Status (5)

Country Link
US (1) US5640012A (de)
EP (1) EP0834186B1 (de)
JP (1) JPH11511587A (de)
DE (1) DE69601576T2 (de)
WO (1) WO1997008732A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
US6194734B1 (en) * 1999-02-19 2001-02-27 Axcelis Technologies, Inc. Method and system for operating a variable aperture in an ion implanter
JP3721287B2 (ja) * 1999-09-01 2005-11-30 日本電子株式会社 エネルギ選択スリット幅設定装置
US6770887B2 (en) * 2002-07-08 2004-08-03 Ondrej L. Krivanek Aberration-corrected charged-particle optical apparatus
JP4048925B2 (ja) * 2002-11-18 2008-02-20 株式会社日立製作所 電子顕微鏡
JP2004212355A (ja) * 2003-01-09 2004-07-29 Hitachi Ltd バイオ電子顕微鏡及び試料の観察方法
US7238938B2 (en) * 2005-06-16 2007-07-03 Gatan, Inc. Energy selecting slit and energy selective sample analysis systems utilizing the same
CN116519656B (zh) * 2023-06-25 2023-09-12 广州盛安医学检验有限公司 一种荧光扫描装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017403A (en) * 1974-07-31 1977-04-12 United Kingdom Atomic Energy Authority Ion beam separators
DE3332949A1 (de) * 1983-09-13 1985-04-04 Finnigan MAT GmbH, 2800 Bremen Vorrichtung zur einstellung von spaltweiten bei spektrometern
NL8600685A (nl) * 1986-03-18 1987-10-16 Philips Nv Apparaat voor energie selectieve afbeelding.
JPS63127200A (ja) * 1986-11-17 1988-05-31 株式会社島津製作所 スリツト装置
US4851670A (en) * 1987-08-28 1989-07-25 Gatan Inc. Energy-selected electron imaging filter
GB2233124B (en) * 1989-06-06 1994-02-09 Mitsubishi Electric Corp Ion implantation apparatus
US5065029A (en) * 1990-08-03 1991-11-12 Gatan, Inc. Cooled CCD camera for an electron microscope
JPH0519206A (ja) * 1990-10-26 1993-01-29 Toyo Ink Mfg Co Ltd 光ビームのサイズ制御方法
JP3219444B2 (ja) * 1992-01-07 2001-10-15 キヤノン株式会社 光量調節装置および光学機器
US5381010A (en) * 1993-12-03 1995-01-10 Sleepair Corporation Periodically alternating path and alternating wavelength bridges for quantitative and ultrasensitive measurement of vapor concentration

Also Published As

Publication number Publication date
JPH11511587A (ja) 1999-10-05
EP0834186B1 (de) 1999-02-24
WO1997008732A1 (en) 1997-03-06
EP0834186A1 (de) 1998-04-08
DE69601576T2 (de) 1999-09-02
US5640012A (en) 1997-06-17

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