DE69522826D1 - Radiofrequenz-ionenquelle - Google Patents
Radiofrequenz-ionenquelleInfo
- Publication number
- DE69522826D1 DE69522826D1 DE69522826T DE69522826T DE69522826D1 DE 69522826 D1 DE69522826 D1 DE 69522826D1 DE 69522826 T DE69522826 T DE 69522826T DE 69522826 T DE69522826 T DE 69522826T DE 69522826 D1 DE69522826 D1 DE 69522826D1
- Authority
- DE
- Germany
- Prior art keywords
- radio frequency
- ion source
- frequency ion
- source
- radio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9425984A GB2296369A (en) | 1994-12-22 | 1994-12-22 | Radio frequency ion source |
PCT/GB1995/002918 WO1996019822A1 (en) | 1994-12-22 | 1995-12-14 | Radio frequency ion source |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69522826D1 true DE69522826D1 (de) | 2001-10-25 |
DE69522826T2 DE69522826T2 (de) | 2002-03-28 |
Family
ID=10766425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69522826T Expired - Lifetime DE69522826T2 (de) | 1994-12-22 | 1995-12-14 | Radiofrequenz-ionenquelle |
Country Status (11)
Country | Link |
---|---|
US (1) | US5877593A (de) |
EP (1) | EP0799491B1 (de) |
JP (1) | JP4185163B2 (de) |
KR (1) | KR100418317B1 (de) |
CN (1) | CN1061781C (de) |
AU (1) | AU4184396A (de) |
CA (1) | CA2208305C (de) |
DE (1) | DE69522826T2 (de) |
GB (2) | GB2296369A (de) |
TW (1) | TW295775B (de) |
WO (1) | WO1996019822A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7005632B2 (en) | 2002-04-12 | 2006-02-28 | Sionex Corporation | Method and apparatus for control of mobility-based ion species identification |
US7098449B1 (en) | 1999-07-21 | 2006-08-29 | The Charles Stark Draper Laboratory, Inc. | Spectrometer chip assembly |
US6690004B2 (en) | 1999-07-21 | 2004-02-10 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for electrospray-augmented high field asymmetric ion mobility spectrometry |
US6806463B2 (en) | 1999-07-21 | 2004-10-19 | The Charles Stark Draper Laboratory, Inc. | Micromachined field asymmetric ion mobility filter and detection system |
US6815668B2 (en) | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry |
US6815669B1 (en) | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Longitudinal field driven ion mobility filter and detection system |
GB2369487A (en) * | 2000-11-24 | 2002-05-29 | Secr Defence | Radio frequency ion source |
CA2452128A1 (en) | 2001-06-30 | 2003-01-16 | Sionex Corporation | System for collection of data and identification of unknown ion species in an electric field |
US7274015B2 (en) | 2001-08-08 | 2007-09-25 | Sionex Corporation | Capacitive discharge plasma ion source |
US7091481B2 (en) | 2001-08-08 | 2006-08-15 | Sionex Corporation | Method and apparatus for plasma generation |
US7122794B1 (en) | 2002-02-21 | 2006-10-17 | Sionex Corporation | Systems and methods for ion mobility control |
AU2003298597A1 (en) | 2002-10-12 | 2004-05-25 | Sionex Corporation | NOx MONITOR USING DIFFERENTIAL MOBILITY SPECTROMETRY |
US7425709B2 (en) * | 2003-07-22 | 2008-09-16 | Veeco Instruments, Inc. | Modular ion source |
WO2006060807A1 (en) | 2004-12-03 | 2006-06-08 | Sionex Corporation | Method and apparatus for enhanced ion based sample filtering and detection |
US7501642B2 (en) * | 2005-12-29 | 2009-03-10 | Asml Netherlands B.V. | Radiation source |
JP5362586B2 (ja) | 2007-02-01 | 2013-12-11 | サイオネックス コーポレイション | 質量分光計のための微分移動度分光計プレフィルタ |
CN104752148B (zh) * | 2013-12-30 | 2017-10-10 | 同方威视技术股份有限公司 | 电晕放电组件、离子迁移谱仪、利用电晕放电组件进行电晕放电的方法 |
EP3439016B1 (de) * | 2017-08-01 | 2020-02-19 | Vestel Elektronik Sanayi ve Ticaret A.S. | Kommunikationssender, drahtloskommunikationsvorrichtung und -verfahren |
CN107979907B (zh) * | 2017-12-26 | 2024-04-05 | 中国科学院西安光学精密机械研究所 | 大气压介质阻挡放电增强型直流交替电极低温等离子体射流阵列 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR929228A (fr) * | 1946-06-17 | 1947-12-19 | Csf | Perfectionnement aux générateurs d'ions |
US3317790A (en) * | 1960-08-29 | 1967-05-02 | Univ Minnesota | Sonic jet ionizer |
GB1139608A (en) * | 1966-10-12 | 1969-01-08 | British Titan Products | Plasma generator |
GB1248761A (en) * | 1968-04-08 | 1971-10-06 | Ass Elect Ind | Improvements in or relating to spark source mass spectrometry |
US3809896A (en) * | 1971-05-25 | 1974-05-07 | Varian Mat Gmbh | Method for the mass spectrometric analysis of solids |
DE3134337A1 (de) * | 1981-08-31 | 1983-03-24 | Technics GmbH Europa, 8011 Kirchheim | Ionenstrahlkanone |
US4682026A (en) * | 1986-04-10 | 1987-07-21 | Mds Health Group Limited | Method and apparatus having RF biasing for sampling a plasma into a vacuum chamber |
GB8804290D0 (en) * | 1988-02-24 | 1988-03-23 | Vg Instr Group | Glow discharge spectrometer |
US5086226A (en) * | 1989-05-31 | 1992-02-04 | Clemson University | Device for radio frequency powered glow discharge spectrometry with external sample mount geometry |
JPH0554812A (ja) * | 1991-08-22 | 1993-03-05 | Nissin Electric Co Ltd | イオン源 |
DE69219618T2 (de) * | 1991-12-03 | 1997-09-04 | Graseby Dynamics Ltd | Coronaentladung-ionenquelle |
US5325021A (en) * | 1992-04-09 | 1994-06-28 | Clemson University | Radio-frequency powered glow discharge device and method with high voltage interface |
JPH06124685A (ja) * | 1992-10-12 | 1994-05-06 | Jeol Ltd | グロー放電型イオン源 |
JP3409881B2 (ja) * | 1993-06-04 | 2003-05-26 | 株式会社昭和真空 | Rf放電型イオン源 |
-
1994
- 1994-12-22 GB GB9425984A patent/GB2296369A/en not_active Withdrawn
-
1995
- 1995-12-14 WO PCT/GB1995/002918 patent/WO1996019822A1/en active IP Right Grant
- 1995-12-14 US US08/860,276 patent/US5877593A/en not_active Expired - Lifetime
- 1995-12-14 GB GB9712227A patent/GB2311411B/en not_active Revoked
- 1995-12-14 JP JP51958296A patent/JP4185163B2/ja not_active Expired - Fee Related
- 1995-12-14 DE DE69522826T patent/DE69522826T2/de not_active Expired - Lifetime
- 1995-12-14 KR KR1019970704395A patent/KR100418317B1/ko not_active IP Right Cessation
- 1995-12-14 CA CA002208305A patent/CA2208305C/en not_active Expired - Fee Related
- 1995-12-14 CN CN95197608A patent/CN1061781C/zh not_active Expired - Fee Related
- 1995-12-14 EP EP95940374A patent/EP0799491B1/de not_active Expired - Lifetime
- 1995-12-14 AU AU41843/96A patent/AU4184396A/en not_active Abandoned
-
1996
- 1996-01-24 TW TW085100832A patent/TW295775B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR987001131A (ko) | 1998-04-30 |
WO1996019822A1 (en) | 1996-06-27 |
CN1175320A (zh) | 1998-03-04 |
DE69522826T2 (de) | 2002-03-28 |
EP0799491B1 (de) | 2001-09-19 |
GB2311411B (en) | 1998-05-06 |
JPH10510945A (ja) | 1998-10-20 |
US5877593A (en) | 1999-03-02 |
GB9425984D0 (en) | 1995-02-22 |
EP0799491A1 (de) | 1997-10-08 |
AU4184396A (en) | 1996-07-10 |
CN1061781C (zh) | 2001-02-07 |
JP4185163B2 (ja) | 2008-11-26 |
CA2208305C (en) | 2006-02-21 |
GB2296369A (en) | 1996-06-26 |
CA2208305A1 (en) | 1996-06-27 |
GB9712227D0 (en) | 1997-08-13 |
TW295775B (de) | 1997-01-11 |
GB2311411A (en) | 1997-09-24 |
KR100418317B1 (ko) | 2004-05-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |