DE69500594D1 - Ionenimplanter und Verfahren zur Implantierung eines Ionenstrahls - Google Patents
Ionenimplanter und Verfahren zur Implantierung eines IonenstrahlsInfo
- Publication number
- DE69500594D1 DE69500594D1 DE69500594T DE69500594T DE69500594D1 DE 69500594 D1 DE69500594 D1 DE 69500594D1 DE 69500594 T DE69500594 T DE 69500594T DE 69500594 T DE69500594 T DE 69500594T DE 69500594 D1 DE69500594 D1 DE 69500594D1
- Authority
- DE
- Germany
- Prior art keywords
- signal
- ion
- scan signals
- phase
- implanting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 230000003139 buffering effect Effects 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/15—Means for deflecting or directing discharge
- H01J2237/1504—Associated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/212,247 US5418378A (en) | 1994-03-14 | 1994-03-14 | Ion implant device with modulated scan output |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69500594D1 true DE69500594D1 (de) | 1997-10-02 |
Family
ID=22790206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69500594T Expired - Lifetime DE69500594D1 (de) | 1994-03-14 | 1995-03-02 | Ionenimplanter und Verfahren zur Implantierung eines Ionenstrahls |
Country Status (5)
Country | Link |
---|---|
US (1) | US5418378A (de) |
EP (1) | EP0673054B1 (de) |
JP (1) | JPH0836987A (de) |
AT (1) | ATE157481T1 (de) |
DE (1) | DE69500594D1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6908836B2 (en) * | 2002-09-23 | 2005-06-21 | Applied Materials, Inc. | Method of implanting a substrate and an ion implanter for performing the method |
US7282427B1 (en) | 2006-05-04 | 2007-10-16 | Applied Materials, Inc. | Method of implanting a substrate and an ion implanter for performing the method |
US7049210B2 (en) * | 2002-09-23 | 2006-05-23 | Applied Materials, Inc. | Method of implanting a substrate and an ion implanter for performing the method |
US6992308B2 (en) * | 2004-02-27 | 2006-01-31 | Axcelis Technologies, Inc. | Modulating ion beam current |
US7358510B2 (en) * | 2006-03-27 | 2008-04-15 | Varian Semiconductor Equipment Associates, Inc. | Ion implanter with variable scan frequency |
JP5373702B2 (ja) * | 2010-06-07 | 2013-12-18 | 株式会社Sen | イオンビームスキャン処理装置及びイオンビームスキャン処理方法 |
US9490185B2 (en) | 2012-08-31 | 2016-11-08 | Axcelis Technologies, Inc. | Implant-induced damage control in ion implantation |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3688203A (en) * | 1970-11-10 | 1972-08-29 | Kev Electronics Corp | Scanning system for ion implantation accelerators |
US4449051A (en) * | 1982-02-16 | 1984-05-15 | Varian Associates, Inc. | Dose compensation by differential pattern scanning |
US4662949A (en) * | 1985-02-15 | 1987-05-05 | Director-General Of Agency Of Industrial Science And Technology | Method of forming a single crystal semiconductor layer from a non-single crystalline material by a shaped energy beam |
US4736107A (en) * | 1986-09-24 | 1988-04-05 | Eaton Corporation | Ion beam implanter scan control system |
US4761559A (en) * | 1986-09-24 | 1988-08-02 | Eaton Corporation | Ion beam implantation display method and apparatus |
US4851693A (en) * | 1988-06-03 | 1989-07-25 | Varian Associates, Inc. | Compensated scan wave form generator for ion implantation equipment |
JPH078300B2 (ja) * | 1988-06-21 | 1995-02-01 | 三菱電機株式会社 | 荷電粒子ビームの照射装置 |
-
1994
- 1994-03-14 US US08/212,247 patent/US5418378A/en not_active Expired - Lifetime
-
1995
- 1995-03-02 AT AT95301339T patent/ATE157481T1/de active
- 1995-03-02 DE DE69500594T patent/DE69500594D1/de not_active Expired - Lifetime
- 1995-03-02 EP EP95301339A patent/EP0673054B1/de not_active Expired - Lifetime
- 1995-03-10 JP JP7051368A patent/JPH0836987A/ja not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
JPH0836987A (ja) | 1996-02-06 |
US5418378A (en) | 1995-05-23 |
ATE157481T1 (de) | 1997-09-15 |
EP0673054A1 (de) | 1995-09-20 |
EP0673054B1 (de) | 1997-08-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5453871A (en) | Temporal imaging with a time lens | |
DE69500594D1 (de) | Ionenimplanter und Verfahren zur Implantierung eines Ionenstrahls | |
ATE130962T1 (de) | Verfahren und vorrichtung zur erzeugung eines beliebigen erregungsspektrums für fourier- transformationsmassspektrometrie. | |
ES2153860T3 (es) | Sistema de control activo para controlar la forma del ruido. | |
CA1271260C (en) | DYNAMIC ANALYSIS SYSTEM IN A VIBRATING RULER ACCELEROMETER | |
EP0522706B1 (de) | Verstärkungssysteme | |
DE69305066D1 (de) | Verbessertes wandlungsgeraet fuer audiosignale,anlage zur behandlung von patienten mit einem solchen geraet und verfahren zum betrieb einer derartigen anlage | |
ATE186660T1 (de) | Verfahren und vorrichtung zur ansteuerung von leistungs-ultraschallgebern | |
EP0376341A3 (de) | Vorrichtung und Verfahren zur Erzeugung von musikalischen Tonwellenformen | |
MY127511A (en) | Semiconductor laser driving method and optical disc apparatus | |
US5373098A (en) | Device for generating tone signals using modulation | |
ES2017226A6 (es) | Generador programable de ondas triangulares. | |
CA2005579A1 (en) | Phase modulation | |
AU6494596A (en) | Method and apparatus for broadband decoupling in nuclear magnetic resonance with chirp pulses | |
EP0629039B1 (de) | Übergangssignale diskriminierender Signalgenerator für Oberwellensignale | |
MY116157A (en) | Pincushion control circuit | |
Leonhardt et al. | Is the Wigner function directly measurable in quantum optics? | |
JPS56164935A (en) | Control method for vibrating table | |
ATE163816T1 (de) | Apparat zur erzeugung eines sinusförmigen ausgangssignales | |
Paschal | Whistler precursors on a VLF transmitter signal | |
US4315452A (en) | Electronic organ percussive modulator | |
SU110730A1 (ru) | Электромузыкальный инструмент с высокочастотной основой | |
Hartemann et al. | Increase in surface-acoustic-wave velocity produced by ion implantation in quartz | |
MY121647A (en) | Electron beam focus voltage circuit. | |
WO1997005501A3 (en) | Apparatus for and method of controlling and calibrating the phase of a coherent signal |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |