DE6947148U - DEVICE FOR SUPPLYING FILTERED AIR INTO CLEANROOMS OR CLEANROOM WORK CABINS - Google Patents

Description

DIpI.-Ing. H. B. KÄHLEf * - · Drying. W. STRONG PATENT LAWYERS

mso Krefeld · Moerser Straße 14-O · Fernruf (O 21 51) 2 OM- 69

Date: December 4, 1969

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Gebrüder T. ) x, limited liability company, 4133 Neukirchen-Vluyn, Heymannsweg 4-6

Device for supplying filtered air into clean rooms or clean room work cabins

The invention relates to a device for feeding voué filtered air in cleanrooms or Reinraumarbeitsk jinen with an air filter, arranged upstream of the air filter Druckiaum ν \ eiuem the jjruckraum voreeschalteten air conveyor.

iü: fij implementation of the industrial production process as well as the execution of precise measurement analyzes or the like is ο? Required, d-_J JIe Luft rvur a b ^^. tiisinten maximum feetr ^ fi "on stabi; articles onwei- _v . For, before purposes it is known, a sec! ^ osseueü EaI ¹ Hi, a so-called clean room , or xu 'λ table work booths. Air is supplied to the clean room via an air filter. The air filter is preceded by a pressure chamber, to which the air is in turn supplied from outside or from an air circuit via an air conveyor.

Deutsche Bank AG 1Ο3 / 1525 Krefeld · Stadt-Sparkasse Krefeld 3Ο5 722 · Postal check Essen 4Ο55

The maximum number of dust particles allowed in the clean room can be achieved by selecting the appropriate air filter. Furthermore, the requirement is placed on clean rooms that the air flow in the clean room is as laminar as possible in order to avoid that in the Air particles still floating in the clean room or in the T5 work cabin and those caused by movements or during the work process remove dust particles generated by machining a workpiece. For this purpose, in flow velocities to be adhered to are prescribed in the narrow tolerance limits.

The high-quality air filters used for clean rooms have a high initial resistance, so that to a certain extent The air filter already has a good air distribution the entire outlet cross-section and thus a laminar air flow of the same speed over the entire cross-section of the Air filter can be achieved. It is also known that the air filter consists of several individual filters.

To achieve a constant air volume flow even with increasing contamination of the air filter, it is necessary to use the To increase the air pressure in the pressure chamber accordingly, since the permeability of the air filter decreases with increasing pollution. For this purpose, it has become known to adjust the amount of air supplied to the pressure belt accordingly by regulating the air conveyor. This has been carried out in practice so far that the fans used as air conveyors have self-regulating disc armature motors.

The invention also has to provide an apparatus for Feeding of filtered air into clean rooms or clean room work booths is set for the task, in which the previously required control organs for controlling the fan motor are developed. fall. To solve this problem, the invention provides that in the pressure chamber an independent of the air conveyor, of constant volume regulator connected to the pressurized room air Bracht is * Such constant volume regulators, known per se, work mechanically and are extremely inexpensive. The solution according to the invention offers the advantage »without any control circuit and without a continuously adjustable fan motor the desired constant flow velocity in the

Un f clean room see below, since constant volume controllers keep the volume of air flowing through them constant as a function of the respective pressure.

According to a further feature of the invention it is provided that an intermediate pressure space is arranged in the pressure space in front of the air filter and the volume constant regulator is mounted in the inlet opening of the intermediate pressure space.

If the air filter consists of several soap filters, it is provided according to the invention that each soap filter has one in front of it arranged intermediate pressure chamber and the constant volume regulator in the inlet openings of the intermediate pressure chambers are attached.

According to a further feature of the invention, however, it is also possible to

-A-

be seen that the constant volume regulator above the air inlet opening of the pressure chamber is arranged.

Exemplary embodiments of the invention are shown in the drawings. Show it:

1 shows the schematic top view of an embodiment the arrangement according to the invention;

2 shows the schematic top view of an arrangement according to a further embodiment of the invention.

Fig. 1 shows a schematic representation of the device according to the invention for supplying filtered air into a Clean room work cubicle 1, which, for example, consists of a table work cubicle to carry out analyzes or the like. Can exist. About one designed as a fan 2 and in one Housing 3 arranged air conveyor, outside air is sucked in through an opening (not shown) in the housing 3 and promoted in a pressure chamber 4. An air filter 5 is located on the side of the pressure chamber 4 facing the clean room work cabin appropriate. The flow against the air filter 5 through the pressure chamber air or air ducting fixtures contained in the pressure chamber 4 and the design and the material constants of the air filter 5 can be selected so that it is in the clean room work cabin a laminar air flow of the same velocity represented by the arrows A for the entire cross section of the air filter 5 can form.

Around this laminar air flow of the same speed as well To be maintained with increasing contamination of the air filter, is above the air inlet opening 6 of the pressure chamber 4 a constant volume regulator attached. Such a mechanically operating constant volume regulator has the property that its resistance to the air flow in each case lessened the hatred to which the resistance in the other elements of the arrangement, especially in the air filter, increased, so that the total resistance of the arrangement and thus the amount of air flowing into the clean room work cabin constant remain.

A corresponding arrangement for feeding filtered air into a closed clean room 8 is shown in FIG. Here, too, air is guided into and from a pressure chamber 4 via an air conveyor designed as a fan 2 there via one of several individual filters 5a, 5b, 5c and 5d existing air filter 5 supplied to the clean room 8 so that A laminar air flow A of the same speed over the entire cross section of the air filter 5 results in the clean room. The air is then according to the arrows B via (not shown) exhaust air openings in a wall 9 of the Clean room 8 discharged and partly fed back into the fan 2. The air supplied to the fan 2 normally consists of a further proportion of fresh air.

Intermediate pressure chambers 10 are arranged in front of the individual filters 5a, 5b, 5c and 5d, in front of their inlet openings i1 volume

constant regulator 12 are attached. Using the constant volume regulator 12 with increasing filter pollution, the air flow A becomes without manual or motorized control elements kept constant.

Claims (1)

Protection claims 1. Device for supplying filtered air into clean rooms or clean room work cabins, with an air filter and one: in front of the air filter arranged pressure chamber and a pressure -auffi before ^ "switched I ~" ftf firmerer, characterized in that! .J pressure-du . (4) at least one of the air conveyors (2) independent vo.j.urr oneten: ': e ^ ler (7, 12) attached i b, cn iien the J ^v uc. Raumlrft flows. 2, V "T .ic ■ 'r / ung" .cn claim 1 _a characterized in that in cV:;' ij cue '-i'.TiüJ (4) ^r% ' π - Lui "jfilte ν '_ 5 ) eJ ^. iwischdruck- r.. ''- ) ant.ordn "' .., -. i; α ^ the volume. - ¹ ons ^; , antgler (12) : γ; ι · LIrIp ₁ C (/, s ^: i'ixiun, «; (11 f is Zv / ischtr- ruc ^ .rai.-me ^ rngejracht · Ι- u ..,. R .L . '■■ :. - '< ^/ ''.'<:. ύ . -ί ': ^1; '-.'t.;. ¹ .-. 'Π Eli. I Γ1_ ■ fern (5a _r ^Γ >. 5 C _t · "}"'Λ L-. j, ε.Li ^ eο: ·, -.ei; α y., ■ .vise ' ^1. '" ^! r ^{i .;} iclcrjr -me._ (')" 2s ^ ^: Yi, \ there,; -τ ¹ : ■■■■ '.ε: a.ii .pcf v'''12^>: ■■■ \'"br £ 'Li"riji';, 4 λ ¹ ■ - τ -,. λ. . , ... ■■ · oil Ύ rl - ■. ei ι ■ = "■■ '. υ. keiin. -without, dsj-, Qt: x "ν ui.uiiit; ii.iL0xi.i3 uaxx ι, Jc ^ J-cx KIJ uuci ucx .um. Ofej.xxGj.it> tSOXXHUHg ^ of the pressure chamber (4) is arranged.