DE69422770D1 - Verfahren und vorrichtung zum beschichten eines glassubstrates - Google Patents

Verfahren und vorrichtung zum beschichten eines glassubstrates

Info

Publication number
DE69422770D1
DE69422770D1 DE69422770T DE69422770T DE69422770D1 DE 69422770 D1 DE69422770 D1 DE 69422770D1 DE 69422770 T DE69422770 T DE 69422770T DE 69422770 T DE69422770 T DE 69422770T DE 69422770 D1 DE69422770 D1 DE 69422770D1
Authority
DE
Germany
Prior art keywords
coating
glass substrate
glass
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69422770T
Other languages
English (en)
Other versions
DE69422770T2 (de
Inventor
Ronald D Goodman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington North America Inc
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Application granted granted Critical
Publication of DE69422770D1 publication Critical patent/DE69422770D1/de
Publication of DE69422770T2 publication Critical patent/DE69422770T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
DE69422770T 1993-04-16 1994-04-14 Verfahren und vorrichtung zum beschichten eines glassubstrates Expired - Fee Related DE69422770T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4879793A 1993-04-16 1993-04-16
PCT/US1994/004134 WO1994024331A1 (en) 1993-04-16 1994-04-14 Method and apparatus for coating a glass substrate

Publications (2)

Publication Number Publication Date
DE69422770D1 true DE69422770D1 (de) 2000-03-02
DE69422770T2 DE69422770T2 (de) 2000-09-21

Family

ID=21956495

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69422770T Expired - Fee Related DE69422770T2 (de) 1993-04-16 1994-04-14 Verfahren und vorrichtung zum beschichten eines glassubstrates

Country Status (12)

Country Link
US (1) US5607725A (de)
EP (1) EP0649479B1 (de)
JP (1) JPH07508257A (de)
CN (1) CN1037702C (de)
AU (1) AU6705094A (de)
CA (1) CA2136639A1 (de)
CZ (1) CZ317694A3 (de)
DE (1) DE69422770T2 (de)
PL (1) PL178112B1 (de)
PT (1) PT649479E (de)
RU (1) RU2125620C1 (de)
WO (1) WO1994024331A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2724923B1 (fr) * 1994-09-27 1996-12-20 Saint Gobain Vitrage Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s)
US6126744A (en) * 1996-11-18 2000-10-03 Asm America, Inc. Method and system for adjusting semiconductor processing equipment
US6198537B1 (en) * 1997-07-11 2001-03-06 Philip Morris Incorporated Optical inspection system for the manufacture of banded cigarette paper
US6194038B1 (en) * 1998-03-20 2001-02-27 Applied Materials, Inc. Method for deposition of a conformal layer on a substrate
TWI494458B (zh) 2008-03-26 2015-08-01 Gtat Corp 在化學氣相沉積反應器中用於配氣之系統和方法
DE102008050936A1 (de) 2008-10-10 2010-04-15 Flabeg Gmbh & Co. Kg Solarspiegel, insbesondere zur Verwendung in einem thermischen Solarkraftwerk, thermisches Solarkraftwerk mit einem derartigen Solarspiegel sowie Verfahren zur Herstellung des Solarspiegels
CN103121798B (zh) * 2011-11-19 2015-12-16 蚌埠玻璃工业设计研究院 一种离线大面积镀膜方法
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
US11015244B2 (en) 2013-12-30 2021-05-25 Advanced Material Solutions, Llc Radiation shielding for a CVD reactor
US10450649B2 (en) 2014-01-29 2019-10-22 Gtat Corporation Reactor filament assembly with enhanced misalignment tolerance

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2570392B1 (fr) * 1984-09-19 1987-01-02 Dme Procede de depot sur substrats optiques de couches antireflechissantes susceptibles d'etre gravees
US4732776A (en) * 1987-02-24 1988-03-22 Measurex Corporation Apparatus and method for controlling the thickness of coatings on paper or other materials
US5217753A (en) * 1989-02-21 1993-06-08 Libbey-Owens-Ford Co. Coated glass articles
US5087525A (en) * 1989-02-21 1992-02-11 Libbey-Owens-Ford Co. Coated glass articles
US5009485A (en) * 1989-08-17 1991-04-23 Hughes Aircraft Company Multiple-notch rugate filters and a controlled method of manufacture thereof

Also Published As

Publication number Publication date
CN1105180A (zh) 1995-07-12
US5607725A (en) 1997-03-04
EP0649479A4 (de) 1997-10-01
WO1994024331A1 (en) 1994-10-27
AU6705094A (en) 1994-11-08
RU2125620C1 (ru) 1999-01-27
DE69422770T2 (de) 2000-09-21
EP0649479B1 (de) 2000-01-26
CZ317694A3 (en) 1995-08-16
CN1037702C (zh) 1998-03-11
JPH07508257A (ja) 1995-09-14
EP0649479A1 (de) 1995-04-26
RU95107699A (ru) 1996-12-27
PT649479E (pt) 2000-05-31
CA2136639A1 (en) 1994-10-27
PL178112B1 (pl) 2000-02-29
PL306776A1 (en) 1995-04-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee