DE69418423T2 - Schleifbearbeitungsverfahren für Keramikwerkstoffe - Google Patents

Schleifbearbeitungsverfahren für Keramikwerkstoffe

Info

Publication number
DE69418423T2
DE69418423T2 DE69418423T DE69418423T DE69418423T2 DE 69418423 T2 DE69418423 T2 DE 69418423T2 DE 69418423 T DE69418423 T DE 69418423T DE 69418423 T DE69418423 T DE 69418423T DE 69418423 T2 DE69418423 T2 DE 69418423T2
Authority
DE
Germany
Prior art keywords
grinding process
ceramic materials
ceramic
grinding
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69418423T
Other languages
English (en)
Other versions
DE69418423D1 (de
Inventor
Takao Nishioka
Takehisa Yamamoto
Yasushi Ito
Akira Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69418423D1 publication Critical patent/DE69418423D1/de
Application granted granted Critical
Publication of DE69418423T2 publication Critical patent/DE69418423T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Ceramic Products (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
DE69418423T 1993-11-08 1994-02-28 Schleifbearbeitungsverfahren für Keramikwerkstoffe Expired - Lifetime DE69418423T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5302311A JPH07132448A (ja) 1993-11-08 1993-11-08 セラミックス材料の研削加工方法

Publications (2)

Publication Number Publication Date
DE69418423D1 DE69418423D1 (de) 1999-06-17
DE69418423T2 true DE69418423T2 (de) 1999-12-23

Family

ID=17907432

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69418423T Expired - Lifetime DE69418423T2 (de) 1993-11-08 1994-02-28 Schleifbearbeitungsverfahren für Keramikwerkstoffe

Country Status (4)

Country Link
US (1) US5564966A (de)
EP (1) EP0652076B1 (de)
JP (1) JPH07132448A (de)
DE (1) DE69418423T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632809C2 (de) * 1996-08-14 2002-06-20 Infineon Technologies Ag Gerät zum chemisch-mechanischen Polieren von Wafern
WO1999007507A2 (en) * 1997-08-12 1999-02-18 Arizona Board Of Regents, A Body Corporate Acting On Behalf Of Arizona State University Method and apparatus for hard machining
US6733365B1 (en) * 1997-08-12 2004-05-11 Arizona Board Of Regents Method and apparatus for hard machining
US6030277A (en) * 1997-09-30 2000-02-29 Cummins Engine Company, Inc. High infeed rate method for grinding ceramic workpieces with silicon carbide grinding wheels
FR2773507B1 (fr) * 1998-01-14 2000-03-31 Christian Bachmann Machine de faconnage de bords de plaques de verre ou analogue
US6074278A (en) * 1998-01-30 2000-06-13 Norton Company High speed grinding wheel
JPH11335158A (ja) * 1998-03-24 1999-12-07 Sumitomo Electric Ind Ltd セラミックス基板及びその研磨方法
US6019668A (en) * 1998-03-27 2000-02-01 Norton Company Method for grinding precision components
US6050881A (en) * 1998-07-27 2000-04-18 Ford Global Technologies, Inc. Surface finishing covalent-ionic ceramics
DE10025173A1 (de) * 2000-05-24 2001-11-29 Swarovski Tyrolit Schleif Verfahren zum Schleifen von insbesondere Nickel enthaltenden metallischen Werkstücken
DE102006042762B3 (de) * 2006-09-12 2008-04-03 Gebr. Brasseler Gmbh & Co. Kg Verfahren zur Herstellung eines chirurgischen Instruments
CN100436054C (zh) * 2006-12-15 2008-11-26 华南理工大学 一种超硬碳化硅陶瓷纳米镜面的磨削方法
CN101339114B (zh) * 2008-09-03 2012-05-23 石家庄铁道学院 陶瓷磨削加工性能测试方法
US8602845B2 (en) * 2011-09-23 2013-12-10 United Technologies Corporation Strengthening by machining
CN103707133A (zh) * 2013-12-17 2014-04-09 湘潭大学 一种工程陶瓷高效低损伤的高静液压磨削方法
JP7158316B2 (ja) * 2019-03-05 2022-10-21 Ｊｘ金属株式会社 スパッタリングターゲット及びその製造方法
CN113290432A (zh) * 2021-06-25 2021-08-24 深圳市仕兴鸿精密机械设备有限公司 一种增强型金属陶瓷刀片的仿形磨削工艺
CN114211316B (zh) * 2021-12-23 2023-04-07 宁波江丰复合材料科技有限公司 一种陶瓷及其机械加工方法与应用

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB816751A (en) * 1954-07-06 1959-07-15 John Kitchen Improvements in or relating to holders for tool bits for machine tools
US455391A (en) * 1891-07-07 Tool-holder
US945674A (en) * 1908-10-13 1910-01-04 Ready Tool Company Tool-holder.
US2551948A (en) * 1949-04-11 1951-05-08 William S Hutchinson Boring bar
DE1117970B (de) * 1958-04-26 1961-11-23 Robert Breuning Zerspanungswerkzeug mit einem laengsverstellbaren zylindrischen Schneidstahl oder Schneidstahleinsatz
US4227841A (en) * 1979-02-15 1980-10-14 Hoover Donald L Boring bar
US4663890A (en) * 1982-05-18 1987-05-12 Gmn Georg Muller Nurnberg Gmbh Method for machining workpieces of brittle hard material into wafers
US4619564A (en) * 1985-06-12 1986-10-28 Mls, Inc. Boring bar
DE3737641A1 (de) * 1987-10-19 1989-04-27 Fortuna Werke Maschf Ag Verfahren zum aussenrundschleifen von werkstuecken
US4839996A (en) * 1987-11-11 1989-06-20 Disco Abrasive Systems, Ltd. Method and apparatus for machining hard, brittle and difficultly-machinable workpieces
JP3207898B2 (ja) * 1991-11-29 2001-09-10 日産自動車株式会社 高速研削用砥石

Also Published As

Publication number Publication date
EP0652076A1 (de) 1995-05-10
DE69418423D1 (de) 1999-06-17
US5564966A (en) 1996-10-15
EP0652076B1 (de) 1999-05-12
JPH07132448A (ja) 1995-05-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: FIENER, J., PAT.-ANW., 87719 MINDELHEIM

8330 Complete disclaimer