DE69400404D1 - COATING DEVICE FOR EVAPORATING METAL MATERIAL ONTO A SUBSTRATE - Google Patents
COATING DEVICE FOR EVAPORATING METAL MATERIAL ONTO A SUBSTRATEInfo
- Publication number
- DE69400404D1 DE69400404D1 DE69400404T DE69400404T DE69400404D1 DE 69400404 D1 DE69400404 D1 DE 69400404D1 DE 69400404 T DE69400404 T DE 69400404T DE 69400404 T DE69400404 T DE 69400404T DE 69400404 D1 DE69400404 D1 DE 69400404D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- metal material
- coating device
- material onto
- evaporating metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/46—Machines having sequentially arranged operating stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9312709A FR2711450B1 (en) | 1993-10-18 | 1993-10-18 | Installation and method for manufacturing flat display screens. |
PCT/FR1994/001195 WO1995011517A1 (en) | 1993-10-18 | 1994-10-17 | Metal vapour deposition unit |
US08/491,446 US5605608A (en) | 1993-10-18 | 1995-06-16 | Device for sputtering a metallic material on a plate |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69400404D1 true DE69400404D1 (en) | 1996-09-26 |
DE69400404T2 DE69400404T2 (en) | 1996-12-19 |
Family
ID=26230697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69400404T Expired - Fee Related DE69400404T2 (en) | 1993-10-18 | 1994-10-17 | COATING DEVICE FOR EVAPORATING METAL MATERIAL ONTO A SUBSTRATE |
Country Status (6)
Country | Link |
---|---|
US (1) | US5605608A (en) |
EP (1) | EP0674804B1 (en) |
JP (1) | JPH08511305A (en) |
DE (1) | DE69400404T2 (en) |
FR (1) | FR2711450B1 (en) |
WO (1) | WO1995011517A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH692000A5 (en) * | 1995-11-13 | 2001-12-31 | Unaxis Balzers Ag | Coating chamber, substrate carrier therefor, method of vacuum deposition and coating methods. |
CA2185640A1 (en) * | 1995-11-30 | 1997-05-31 | Russell J. Hill | Electron beam evaporation apparatus and method |
EP0837491A3 (en) * | 1996-10-21 | 2000-11-15 | Nihon Shinku Gijutsu Kabushiki Kaisha | Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly |
AUPO712097A0 (en) * | 1997-05-30 | 1997-06-26 | Lintek Pty Ltd | Vacuum deposition system |
US20040250767A1 (en) * | 2003-04-21 | 2004-12-16 | Rohm And Haas Electronic Materials, L.L.C. | Method and apparatus for coating a substrate using combustion chemical vapor deposition |
US7837836B2 (en) * | 2004-02-12 | 2010-11-23 | Seagate Technology Llc | Method and apparatus for multi-stage sputter deposition of uniform thickness layers |
DE202016101274U1 (en) | 2016-03-08 | 2016-03-14 | Lo Laseroptik Gmbh | An apparatus equipped with an ion beam source for coating a substrate in a vacuum chamber |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4104418A (en) * | 1975-09-23 | 1978-08-01 | International Business Machines Corporation | Glass layer fabrication |
US4278528A (en) * | 1979-10-09 | 1981-07-14 | Coulter Systems Corporation | Rectilinear sputtering apparatus and method |
US4607593A (en) * | 1983-12-23 | 1986-08-26 | U.S. Philips Corporation | Apparatus for processing articles in a controlled environment |
JPS6171533A (en) * | 1984-09-12 | 1986-04-12 | Futaba Corp | Method of manufacturing display tube |
US5084151A (en) * | 1985-11-26 | 1992-01-28 | Sorin Biomedica S.P.A. | Method and apparatus for forming prosthetic device having a biocompatible carbon film thereon |
FR2593953B1 (en) * | 1986-01-24 | 1988-04-29 | Commissariat Energie Atomique | METHOD FOR MANUFACTURING A DEVICE FOR VIEWING BY CATHODOLUMINESCENCE EXCITED BY FIELD EMISSION |
DE3925536A1 (en) * | 1989-08-02 | 1991-02-07 | Leybold Ag | ARRANGEMENT FOR THICKNESSING OF THICK FILMS |
EP0428358B1 (en) * | 1989-11-13 | 1996-05-15 | Optical Coating Laboratory, Inc. | Geometries and configurations for magnetron sputtering apparatus |
JP2936276B2 (en) * | 1990-02-27 | 1999-08-23 | 日本真空技術株式会社 | Method and apparatus for manufacturing transparent conductive film |
EP0518333B1 (en) * | 1991-06-14 | 2002-08-28 | Hughes Aircraft Company | Method for inducing tilted perpendicular alignment in liquid crystals |
-
1993
- 1993-10-18 FR FR9312709A patent/FR2711450B1/en not_active Expired - Fee Related
-
1994
- 1994-10-17 EP EP94931068A patent/EP0674804B1/en not_active Expired - Lifetime
- 1994-10-17 WO PCT/FR1994/001195 patent/WO1995011517A1/en active IP Right Grant
- 1994-10-17 JP JP7511402A patent/JPH08511305A/en not_active Ceased
- 1994-10-17 DE DE69400404T patent/DE69400404T2/en not_active Expired - Fee Related
-
1995
- 1995-06-16 US US08/491,446 patent/US5605608A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH08511305A (en) | 1996-11-26 |
FR2711450A1 (en) | 1995-04-28 |
EP0674804A1 (en) | 1995-10-04 |
US5605608A (en) | 1997-02-25 |
DE69400404T2 (en) | 1996-12-19 |
FR2711450B1 (en) | 1996-01-05 |
EP0674804B1 (en) | 1996-08-21 |
WO1995011517A1 (en) | 1995-04-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PIXTECH S.A., ROUSSET, FR |
|
8339 | Ceased/non-payment of the annual fee |