DE69331411D1 - Beschneiden der breite eines grabens - Google Patents

Beschneiden der breite eines grabens

Info

Publication number
DE69331411D1
DE69331411D1 DE69331411T DE69331411T DE69331411D1 DE 69331411 D1 DE69331411 D1 DE 69331411D1 DE 69331411 T DE69331411 T DE 69331411T DE 69331411 T DE69331411 T DE 69331411T DE 69331411 D1 DE69331411 D1 DE 69331411D1
Authority
DE
Germany
Prior art keywords
pruning
trench
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69331411T
Other languages
English (en)
Other versions
DE69331411T2 (de
Inventor
H Jerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IC Sensors Inc
Original Assignee
IC Sensors Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IC Sensors Inc filed Critical IC Sensors Inc
Application granted granted Critical
Publication of DE69331411D1 publication Critical patent/DE69331411D1/de
Publication of DE69331411T2 publication Critical patent/DE69331411T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Element Separation (AREA)
DE69331411T 1992-09-08 1993-08-18 Beschneiden der breite eines grabens Expired - Lifetime DE69331411T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/941,997 US5328559A (en) 1992-09-08 1992-09-08 Groove width trimming
PCT/US1993/007755 WO1994005516A1 (en) 1992-09-08 1993-08-18 Groove width trimming

Publications (2)

Publication Number Publication Date
DE69331411D1 true DE69331411D1 (de) 2002-02-07
DE69331411T2 DE69331411T2 (de) 2002-08-01

Family

ID=25477432

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69331411T Expired - Lifetime DE69331411T2 (de) 1992-09-08 1993-08-18 Beschneiden der breite eines grabens

Country Status (6)

Country Link
US (1) US5328559A (de)
EP (1) EP0616573B1 (de)
AU (1) AU5018593A (de)
CA (1) CA2123004A1 (de)
DE (1) DE69331411T2 (de)
WO (1) WO1994005516A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5640995A (en) * 1995-03-14 1997-06-24 Baxter International Inc. Electrofluidic standard module and custom circuit board assembly
SE506163C2 (sv) 1995-04-27 1997-11-17 Ericsson Telefon Ab L M Anordning vid ett kiselsubstrat med ett urtag för upptagande av ett element jämte förfarande för framställande av en dylik anordning
JP3353644B2 (ja) * 1997-04-24 2002-12-03 日本電気株式会社 プロセスシミュレーション方法
TW379404B (en) * 1997-12-31 2000-01-11 United Semiconductor Corp Manufacturing method of shallow trench isolation
US6040597A (en) * 1998-02-13 2000-03-21 Advanced Micro Devices, Inc. Isolation boundaries in flash memory cores
US6239484B1 (en) * 1999-06-09 2001-05-29 International Business Machines Corporation Underfill of chip-under-chip semiconductor modules
US8048789B2 (en) * 2005-04-26 2011-11-01 Northwestern University Mesoscale pyramids, arrays and methods of preparation
US7999353B1 (en) * 2005-04-26 2011-08-16 Northwestern University Mesoscale pyramids, hole arrays and methods of preparation
WO2008134363A1 (en) * 2007-04-25 2008-11-06 The Regents Of The University Of Michigan Tunable elastomeric nanochannels for nanofluidic manipulation

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017885A (en) * 1973-10-25 1977-04-12 Texas Instruments Incorporated Large value capacitor
US4169000A (en) * 1976-09-02 1979-09-25 International Business Machines Corporation Method of forming an integrated circuit structure with fully-enclosed air isolation
US4256514A (en) * 1978-11-03 1981-03-17 International Business Machines Corporation Method for forming a narrow dimensioned region on a body
US4178197A (en) * 1979-03-05 1979-12-11 International Business Machines Corporation Formation of epitaxial tunnels utilizing oriented growth techniques
JPS59163829A (ja) * 1983-03-08 1984-09-14 Matsushita Electronics Corp パタ−ン形成方法
JPH0223617A (ja) * 1988-07-13 1990-01-25 Mitsubishi Electric Corp 半導体基板ウェハの溝形成方法
US5155061A (en) * 1991-06-03 1992-10-13 Allied-Signal Inc. Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures
US5098856A (en) * 1991-06-18 1992-03-24 International Business Machines Corporation Air-filled isolation trench with chemically vapor deposited silicon dioxide cap

Also Published As

Publication number Publication date
US5328559A (en) 1994-07-12
EP0616573B1 (de) 2002-01-02
WO1994005516A1 (en) 1994-03-17
CA2123004A1 (en) 1994-03-17
EP0616573A4 (en) 1997-09-03
DE69331411T2 (de) 2002-08-01
AU5018593A (en) 1994-03-29
EP0616573A1 (de) 1994-09-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition