DE69323891T2 - Unterdruckregler für eine entfernte zone - Google Patents
Unterdruckregler für eine entfernte zoneInfo
- Publication number
- DE69323891T2 DE69323891T2 DE1993623891 DE69323891T DE69323891T2 DE 69323891 T2 DE69323891 T2 DE 69323891T2 DE 1993623891 DE1993623891 DE 1993623891 DE 69323891 T DE69323891 T DE 69323891T DE 69323891 T2 DE69323891 T2 DE 69323891T2
- Authority
- DE
- Germany
- Prior art keywords
- plates
- regulator
- pressure
- grate
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
- F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
- F24F13/14—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/01—Control of flow without auxiliary power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
- B08B15/023—Fume cabinets or cupboards, e.g. for laboratories
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
- F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
- F24F11/75—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity for maintaining constant air flow rate or air velocity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
- F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
- F24F13/12—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of sliding members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
- F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
- F24F13/14—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre
- F24F13/1426—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre characterised by actuating means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/024—Controlling the inlet pressure, e.g. back-pressure regulator
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/04—Control of fluid pressure without auxiliary power
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
- F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
- F24F13/14—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre
- F24F13/1426—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre characterised by actuating means
- F24F2013/1466—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre characterised by actuating means with pneumatic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/40—Pressure, e.g. wind pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2140/00—Control inputs relating to system states
- F24F2140/10—Pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2221/00—Details or features not otherwise provided for
- F24F2221/26—Details or features not otherwise provided for improving the aesthetic appearance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S137/00—Fluid handling
- Y10S137/907—Vacuum-actuated valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7781—With separate connected fluid reactor surface
- Y10T137/7784—Responsive to change in rate of fluid flow
- Y10T137/7787—Expansible chamber subject to differential pressures
- Y10T137/7788—Pressures across fixed choke
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7781—With separate connected fluid reactor surface
- Y10T137/7784—Responsive to change in rate of fluid flow
- Y10T137/7787—Expansible chamber subject to differential pressures
- Y10T137/7791—Pressures across flow line valve
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Automation & Control Theory (AREA)
- General Physics & Mathematics (AREA)
- Control Of Fluid Pressure (AREA)
- Manipulator (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Extrusion Moulding Of Plastics Or The Like (AREA)
- Air-Flow Control Members (AREA)
- Supplying Of Containers To The Packaging Station (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/965,907 US5320124A (en) | 1988-04-07 | 1992-10-23 | Regulator adaptable for maintaining a constant partial vacuum in a remote region |
PCT/US1993/010145 WO1994010617A1 (en) | 1992-10-23 | 1993-10-22 | Remote region vacuum regulator |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69323891D1 DE69323891D1 (de) | 1999-04-15 |
DE69323891T2 true DE69323891T2 (de) | 1999-09-30 |
Family
ID=25510656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1993623891 Expired - Fee Related DE69323891T2 (de) | 1992-10-23 | 1993-10-22 | Unterdruckregler für eine entfernte zone |
Country Status (8)
Country | Link |
---|---|
US (1) | US5320124A (de) |
EP (1) | EP0667006B1 (de) |
JP (1) | JP3419776B2 (de) |
KR (1) | KR100298992B1 (de) |
AT (1) | ATE177544T1 (de) |
CA (1) | CA2145654C (de) |
DE (1) | DE69323891T2 (de) |
WO (1) | WO1994010617A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE36637E (en) * | 1988-04-07 | 2000-04-04 | Palmer; David W. | Flow regulator |
US5597011A (en) * | 1988-04-07 | 1997-01-28 | Palmer; David W. | Flow regulator |
US5687760A (en) * | 1988-04-07 | 1997-11-18 | Palmer; David W. | Flow regulator |
US5873388A (en) * | 1996-06-07 | 1999-02-23 | Atmi Ecosys Corporation | System for stabilization of pressure perturbations from oxidation systems for treatment of process gases from semiconductor manufacturing operations |
US6192922B1 (en) | 1999-06-01 | 2001-02-27 | Synetics Solutions Inc. | Airflow control valve for a clean room |
AU2002219854A1 (en) | 2000-11-06 | 2002-05-15 | Brooks Automation, Inc. | Method and apparatus for a flow regulator having an integral hinge |
US7569193B2 (en) * | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
US7736599B2 (en) | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
JP5102217B2 (ja) * | 2005-10-31 | 2012-12-19 | アプライド マテリアルズ インコーポレイテッド | プロセス削減反応器 |
JP5128168B2 (ja) * | 2006-04-24 | 2013-01-23 | 三菱電線工業株式会社 | 排気装置 |
CN108490844B (zh) * | 2018-05-11 | 2023-05-26 | 湖南众源科技有限公司 | 一种高精度恒压强闭环控制仪 |
CN113503595B (zh) * | 2021-04-08 | 2022-06-21 | 南京林业大学 | 一种基于微气候的环保建筑 |
CN113757833B (zh) * | 2021-09-14 | 2022-04-08 | 北京联合大学 | 基于数据驱动的生产模式与值班模式切换方法及系统 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3312241A (en) * | 1964-04-16 | 1967-04-04 | Westinghouse Electric Corp | Fluid control apparatus |
DE2421873C2 (de) * | 1974-05-06 | 1983-11-03 | Danfoss A/S, 6430 Nordborg | Vorrichtung zur Regelung der Brennluftzufuhr zu einer Feuerung mit Öl- oder Gasbrenner für Heizungsanlagen |
SE402631B (sv) * | 1976-11-04 | 1978-07-10 | Stromberg Thore | Anordning for att automatiskt reglera sugeffekten hos ett till en sugslang anslutbart munstcke |
US4739924A (en) * | 1985-03-18 | 1988-04-26 | Kelley Winfield L | Air volume regulator valve |
US5251654A (en) * | 1988-04-07 | 1993-10-12 | David Palmer | Flow regulator adaptable for use with exhaust from a process chamber |
CA2106187C (en) * | 1991-03-15 | 2002-12-10 | David Palmer | Flow regulator adaptable for use with exhaust from a process chamber |
-
1992
- 1992-10-23 US US07/965,907 patent/US5320124A/en not_active Expired - Lifetime
-
1993
- 1993-10-22 JP JP51119594A patent/JP3419776B2/ja not_active Expired - Fee Related
- 1993-10-22 EP EP19930925005 patent/EP0667006B1/de not_active Expired - Lifetime
- 1993-10-22 CA CA 2145654 patent/CA2145654C/en not_active Expired - Fee Related
- 1993-10-22 KR KR1019950701559A patent/KR100298992B1/ko not_active IP Right Cessation
- 1993-10-22 AT AT93925005T patent/ATE177544T1/de not_active IP Right Cessation
- 1993-10-22 WO PCT/US1993/010145 patent/WO1994010617A1/en active IP Right Grant
- 1993-10-22 DE DE1993623891 patent/DE69323891T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0667006A1 (de) | 1995-08-16 |
JPH08502813A (ja) | 1996-03-26 |
KR100298992B1 (ko) | 2001-10-22 |
US5320124A (en) | 1994-06-14 |
CA2145654C (en) | 1998-06-30 |
EP0667006A4 (de) | 1995-10-11 |
JP3419776B2 (ja) | 2003-06-23 |
KR950704731A (ko) | 1995-11-20 |
DE69323891D1 (de) | 1999-04-15 |
ATE177544T1 (de) | 1999-03-15 |
WO1994010617A1 (en) | 1994-05-11 |
EP0667006B1 (de) | 1999-03-10 |
CA2145654A1 (en) | 1994-05-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |