DE69320410D1 - Festkörper-Bildaufnehmer und Herstellungsverfahren - Google Patents

Festkörper-Bildaufnehmer und Herstellungsverfahren

Info

Publication number
DE69320410D1
DE69320410D1 DE69320410T DE69320410T DE69320410D1 DE 69320410 D1 DE69320410 D1 DE 69320410D1 DE 69320410 T DE69320410 T DE 69320410T DE 69320410 T DE69320410 T DE 69320410T DE 69320410 D1 DE69320410 D1 DE 69320410D1
Authority
DE
Germany
Prior art keywords
solid
image sensor
manufacturing process
state image
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69320410T
Other languages
English (en)
Other versions
DE69320410T2 (de
Inventor
Takashi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE69320410D1 publication Critical patent/DE69320410D1/de
Application granted granted Critical
Publication of DE69320410T2 publication Critical patent/DE69320410T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14887—Blooming suppression

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
DE69320410T 1992-06-03 1993-06-03 Festkörper-Bildaufnehmer und Herstellungsverfahren Expired - Fee Related DE69320410T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14301692 1992-06-03

Publications (2)

Publication Number Publication Date
DE69320410D1 true DE69320410D1 (de) 1998-09-24
DE69320410T2 DE69320410T2 (de) 1999-03-18

Family

ID=15328980

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69320410T Expired - Fee Related DE69320410T2 (de) 1992-06-03 1993-06-03 Festkörper-Bildaufnehmer und Herstellungsverfahren

Country Status (4)

Country Link
US (1) US5404039A (de)
EP (1) EP0573292B1 (de)
KR (1) KR0130959B1 (de)
DE (1) DE69320410T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3020785B2 (ja) * 1993-12-09 2000-03-15 株式会社東芝 固体撮像装置
JP3697769B2 (ja) * 1995-02-24 2005-09-21 株式会社ニコン 光電変換素子及び光電変換装置
US6351001B1 (en) * 1996-04-17 2002-02-26 Eastman Kodak Company CCD image sensor
US5872371A (en) * 1997-02-27 1999-02-16 Eastman Kodak Company Active pixel sensor with punch-through reset and cross-talk suppression
JPH09331058A (ja) * 1996-06-13 1997-12-22 Sony Corp 固体撮像素子
US5859462A (en) * 1997-04-11 1999-01-12 Eastman Kodak Company Photogenerated carrier collection of a solid state image sensor array
TW425563B (en) * 1998-06-03 2001-03-11 Nippon Electric Co Solid state image pickup device and driving method therefore
JP2001291858A (ja) * 2000-04-04 2001-10-19 Sony Corp 固体撮像素子及びその製造方法
US6586789B1 (en) * 2002-10-07 2003-07-01 Lixin Zhao Pixel image sensor
US20070045682A1 (en) * 2005-08-31 2007-03-01 Hong Sungkwon C Imager with gradient doped EPI layer
US7675093B2 (en) * 2006-11-28 2010-03-09 Micron Technology, Inc. Antiblooming imaging apparatus, system, and methods
KR100976886B1 (ko) * 2006-12-22 2010-08-18 크로스텍 캐피탈, 엘엘씨 부동 베이스 판독 개념을 갖는 ｃｍｏｓ 이미지 센서
US20080217716A1 (en) * 2007-03-09 2008-09-11 Mauritzson Richard A Imaging apparatus, method, and system having reduced dark current
JP5375141B2 (ja) * 2009-02-05 2013-12-25 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法、固体撮像装置の駆動方法、及び電子機器
JP4752926B2 (ja) * 2009-02-05 2011-08-17 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法、固体撮像装置の駆動方法、電子機器
JP5644433B2 (ja) * 2010-12-02 2014-12-24 ソニー株式会社 固体撮像素子、および、固体撮像素子の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6020687A (ja) * 1983-07-15 1985-02-01 Nippon Kogaku Kk <Nikon> 電子スチルカメラ
JPH0624239B2 (ja) * 1984-02-15 1994-03-30 ソニー株式会社 縦形オ−バ−フロ−イメ−ジセンサ−
JPS6224665A (ja) * 1985-07-24 1987-02-02 Matsushita Electronics Corp 固体撮像装置
JPS6224666A (ja) * 1985-07-24 1987-02-02 Matsushita Electronics Corp 固体撮像装置
JPH0715981B2 (ja) * 1985-12-03 1995-02-22 松下電子工業株式会社 固体撮像装置
US4814848A (en) * 1986-06-12 1989-03-21 Hitachi, Ltd. Solid-state imaging device
JP2822393B2 (ja) * 1988-07-30 1998-11-11 ソニー株式会社 固体撮像装置及びその駆動方法
KR920007355B1 (ko) * 1990-05-11 1992-08-31 금성일렉트론 주식회사 Ccd영상 소자의 구조 및 제조방법

Also Published As

Publication number Publication date
KR940006395A (ko) 1994-03-23
EP0573292A1 (de) 1993-12-08
US5404039A (en) 1995-04-04
EP0573292B1 (de) 1998-08-19
KR0130959B1 (ko) 1998-04-14
DE69320410T2 (de) 1999-03-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee