DE69317141D1 - Anisotropische Ätzung von Metalloxid - Google Patents
Anisotropische Ätzung von MetalloxidInfo
- Publication number
- DE69317141D1 DE69317141D1 DE69317141T DE69317141T DE69317141D1 DE 69317141 D1 DE69317141 D1 DE 69317141D1 DE 69317141 T DE69317141 T DE 69317141T DE 69317141 T DE69317141 T DE 69317141T DE 69317141 D1 DE69317141 D1 DE 69317141D1
- Authority
- DE
- Germany
- Prior art keywords
- metal oxide
- anisotropic etching
- anisotropic
- etching
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005530 etching Methods 0.000 title 1
- 229910044991 metal oxide Inorganic materials 0.000 title 1
- 150000004706 metal oxides Chemical class 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/53—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
- C04B41/5338—Etching
- C04B41/5353—Wet etching, e.g. with etchants dissolved in organic solvents
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87270292A | 1992-04-20 | 1992-04-20 | |
US87098892A | 1992-04-20 | 1992-04-20 | |
US07/871,862 US5238529A (en) | 1992-04-20 | 1992-04-20 | Anisotropic metal oxide etch |
US07/872,701 US5201989A (en) | 1992-04-20 | 1992-04-20 | Anisotropic niobium pentoxide etch |
US07/871,863 US5238530A (en) | 1992-04-20 | 1992-04-20 | Anisotropic titanate etch |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69317141D1 true DE69317141D1 (de) | 1998-04-09 |
DE69317141T2 DE69317141T2 (de) | 1998-06-25 |
Family
ID=27542276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1993617141 Expired - Fee Related DE69317141T2 (de) | 1992-04-20 | 1993-04-20 | Anisotropische Ätzung von Metalloxid |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0567063B1 (de) |
DE (1) | DE69317141T2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5746930A (en) * | 1995-01-03 | 1998-05-05 | Texas Instruments Incorporated | Method and structure for forming an array of thermal sensors |
US5626773A (en) * | 1995-01-03 | 1997-05-06 | Texas Instruments Incorporated | Structure and method including dry etching techniques for forming an array of thermal sensitive elements |
ATE352868T1 (de) * | 1998-07-23 | 2007-02-15 | Surface Technology Systems Plc | Verfahren für anisotropes ätzen |
US6358430B1 (en) * | 1999-07-28 | 2002-03-19 | Motorola, Inc. | Technique for etching oxides and/or insulators |
DE10244862B4 (de) * | 2002-09-23 | 2006-09-14 | IHP GmbH - Innovations for High Performance Microelectronics/Institut für innovative Mikroelektronik | Verfahren zur Herstellung eines elektronischen Bauelements mit einer Praseodymoxid-Schicht |
US20040166678A1 (en) * | 2003-02-24 | 2004-08-26 | Hall Lindsey H. | Wet clean method for PZT capacitors |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4661201A (en) * | 1985-09-09 | 1987-04-28 | Cts Corporation | Preferential etching of a piezoelectric material |
US4978418A (en) * | 1988-08-18 | 1990-12-18 | The United States Of America As Represented By The United States Department Of Energy | Controlled ion implant damage profile for etching |
JPH04124078A (ja) * | 1990-09-17 | 1992-04-24 | Canon Inc | 微細加工方法 |
-
1993
- 1993-04-20 EP EP19930106374 patent/EP0567063B1/de not_active Expired - Lifetime
- 1993-04-20 DE DE1993617141 patent/DE69317141T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0567063A3 (de) | 1994-03-09 |
EP0567063B1 (de) | 1998-03-04 |
DE69317141T2 (de) | 1998-06-25 |
EP0567063A2 (de) | 1993-10-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |