DE69316315D1 - Ultraschalantrieb - Google Patents

Ultraschalantrieb

Info

Publication number
DE69316315D1
DE69316315D1 DE69316315T DE69316315T DE69316315D1 DE 69316315 D1 DE69316315 D1 DE 69316315D1 DE 69316315 T DE69316315 T DE 69316315T DE 69316315 T DE69316315 T DE 69316315T DE 69316315 D1 DE69316315 D1 DE 69316315D1
Authority
DE
Germany
Prior art keywords
ultrasonic drive
ultrasonic
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69316315T
Other languages
English (en)
Other versions
DE69316315T2 (de
Inventor
Tadao Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of DE69316315D1 publication Critical patent/DE69316315D1/de
Application granted granted Critical
Publication of DE69316315T2 publication Critical patent/DE69316315T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
DE69316315T 1992-10-28 1993-10-27 Ultraschalantrieb Expired - Fee Related DE69316315T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4289163A JPH06141564A (ja) 1992-10-28 1992-10-28 波動循環型アクチュエータ

Publications (2)

Publication Number Publication Date
DE69316315D1 true DE69316315D1 (de) 1998-02-19
DE69316315T2 DE69316315T2 (de) 1998-07-23

Family

ID=17739580

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69316315T Expired - Fee Related DE69316315T2 (de) 1992-10-28 1993-10-27 Ultraschalantrieb

Country Status (4)

Country Link
US (1) US5404065A (de)
EP (1) EP0595426B1 (de)
JP (1) JPH06141564A (de)
DE (1) DE69316315T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06189568A (ja) * 1992-12-11 1994-07-08 Nikon Corp 波動循環型アクチュエータ
CN100587991C (zh) * 2004-09-03 2010-02-03 物理设备（Pi）两合公司 线性超声电动机
DE102004059429B4 (de) 2004-09-03 2006-07-27 Physik Instrumente (Pi) Gmbh & Co. Kg Linearer Ultraschall-Piezomotor
DE202005021150U1 (de) * 2005-03-21 2007-04-05 Physik Instrumente (Pi) Gmbh & Co. Kg Optische Objektivbaugruppe
JP2007151238A (ja) * 2005-11-24 2007-06-14 Fujinon Corp 駆動装置
DE102008026770A1 (de) * 2008-06-04 2009-12-10 Robert Bosch Gmbh Linearbewegungsvorrichtung mit Piezoaktuator

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL154076B (nl) * 1966-12-28 1977-07-15 Philips Nv Werkwijzen voor het vervaardigen van een ultrasone vertragingslijn, alsmede ultrasone vertraginslijnen vervaardigd volgens die werkwijzen.
US2661432A (en) * 1951-05-14 1953-12-01 Clevite Corp Piezoelectric device
FR2068014A5 (de) * 1969-11-25 1971-08-20 Thomson Csf
US4042845A (en) * 1976-03-25 1977-08-16 Sontrix Division Of Pittway Corporation Transducer assembly and method for radiating and detecting energy over controlled beam width
DE3272713D1 (en) * 1981-06-12 1986-09-25 Meidensha Electric Mfg Co Ltd Electric field detector
CA1208269A (en) * 1982-02-25 1986-07-22 Toshiiku Sashida Motor device utilizing ultrasonic oscillation
JPH0687671B2 (ja) * 1984-05-18 1994-11-02 株式会社ニコン 超音波モータ
JPH072023B2 (ja) * 1985-04-26 1995-01-11 株式会社ニコン 超音波モータの駆動回路
US4742260A (en) * 1986-02-06 1988-05-03 Hiroshi Shimizu Piezoelectrically driving device
US4882500A (en) * 1986-06-04 1989-11-21 Nippon Seimitsu Kogyo Kabushiki Kaisha Method for converting standing wave vibrations into motion and standing wave motor therefor
JP2632811B2 (ja) * 1986-08-29 1997-07-23 キヤノン株式会社 振動駆動モータ
DE3856235T2 (de) * 1987-05-22 1998-12-24 Fuji Photo Film Co., Ltd., Minami-Ashigara, Kanagawa Methode und System zum Antrieb von magnetischen Bändern
JPS6417672A (en) * 1987-07-10 1989-01-20 Shikishima Canvas Kk Surfing board
JPH0223070A (ja) * 1988-07-07 1990-01-25 Toyota Motor Corp リニア型超音波モータ
US5140215A (en) * 1988-09-19 1992-08-18 Brother Kogyo Kabushiki Kaisha Vibrator and ultrasonic motor employing the same
US5039899A (en) * 1989-02-28 1991-08-13 Brother Kogyo Kabushiki Kaisha Piezoelectric transducer
JPH03289372A (ja) * 1990-04-04 1991-12-19 Kenwood Corp 超音波リニアモータ
JPH0552572A (ja) * 1991-08-28 1993-03-02 Akai Electric Co Ltd 振動子の支持構造
JP2574577B2 (ja) * 1991-10-31 1997-01-22 松下電器産業株式会社 リニア型アクチュエータ
US5233261A (en) * 1991-12-23 1993-08-03 Leybold Inficon Inc. Buffered quartz crystal

Also Published As

Publication number Publication date
EP0595426A1 (de) 1994-05-04
EP0595426B1 (de) 1998-01-14
US5404065A (en) 1995-04-04
DE69316315T2 (de) 1998-07-23
JPH06141564A (ja) 1994-05-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee