DE69315208D1 - Vorrichtung und methode für die in situ messung der elektromagnetischen eigenschaften verschiedener prozessmaterialen unter verwendung der charakteristischen grenzfrequenz - Google Patents

Vorrichtung und methode für die in situ messung der elektromagnetischen eigenschaften verschiedener prozessmaterialen unter verwendung der charakteristischen grenzfrequenz

Info

Publication number
DE69315208D1
DE69315208D1 DE69315208T DE69315208T DE69315208D1 DE 69315208 D1 DE69315208 D1 DE 69315208D1 DE 69315208 T DE69315208 T DE 69315208T DE 69315208 T DE69315208 T DE 69315208T DE 69315208 D1 DE69315208 D1 DE 69315208D1
Authority
DE
Germany
Prior art keywords
measurement
electromagnetic
electromagnetic properties
present
different process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69315208T
Other languages
English (en)
Other versions
DE69315208T2 (de
Inventor
Buford Jean
F Whitehead
Gary Warren
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Fisher Scientific Inc
Original Assignee
Thermedics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/871,339 external-priority patent/US5331284A/en
Application filed by Thermedics Inc filed Critical Thermedics Inc
Publication of DE69315208D1 publication Critical patent/DE69315208D1/de
Application granted granted Critical
Publication of DE69315208T2 publication Critical patent/DE69315208T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
    • G01N22/04—Investigating moisture content

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Investigating And Analyzing Materials By Characteristic Methods (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measuring Magnetic Variables (AREA)
DE69315208T 1992-04-21 1993-04-21 Vorrichtung und methode für die in situ messung der elektromagnetischen eigenschaften verschiedener prozessmaterialen unter verwendung der charakteristischen grenzfrequenz Expired - Lifetime DE69315208T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/871,339 US5331284A (en) 1992-04-21 1992-04-21 Meter and method for in situ measurement of the electromagnetic properties of various process materials using cutoff frequency characterization and analysis
US08/045,854 US5455516A (en) 1992-04-21 1993-04-09 Meter and method for in situ measurement of the electromagnetic properties of various process materials using cutoff frequency characterization and analysis
PCT/US1993/003756 WO1993021516A1 (en) 1992-04-21 1993-04-21 Meter and method for in situ measurement of the electromagnetic properties of various process materials using cutoff frequency characterization and analysis

Publications (2)

Publication Number Publication Date
DE69315208D1 true DE69315208D1 (de) 1997-12-18
DE69315208T2 DE69315208T2 (de) 1998-06-10

Family

ID=26723269

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69315208T Expired - Lifetime DE69315208T2 (de) 1992-04-21 1993-04-21 Vorrichtung und methode für die in situ messung der elektromagnetischen eigenschaften verschiedener prozessmaterialen unter verwendung der charakteristischen grenzfrequenz

Country Status (18)

Country Link
US (1) US5455516A (de)
EP (1) EP0637377B1 (de)
JP (1) JP3170282B2 (de)
KR (1) KR950704680A (de)
AT (1) ATE160220T1 (de)
AU (1) AU677201B2 (de)
BR (1) BR9306268A (de)
CA (1) CA2118404C (de)
CZ (1) CZ259594A3 (de)
DE (1) DE69315208T2 (de)
FI (1) FI944934A0 (de)
HU (1) HUT72142A (de)
MX (1) MX9302273A (de)
NZ (1) NZ252864A (de)
RU (1) RU2115110C1 (de)
SK (1) SK126694A3 (de)
TW (1) TW213502B (de)
WO (1) WO1993021516A1 (de)

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Also Published As

Publication number Publication date
FI944934A (fi) 1994-10-20
CZ259594A3 (en) 1995-02-15
HUT72142A (en) 1996-03-28
JPH07506186A (ja) 1995-07-06
US5455516A (en) 1995-10-03
HU9402953D0 (en) 1995-02-28
KR950704680A (ko) 1995-11-20
FI944934A0 (fi) 1994-10-20
RU2115110C1 (ru) 1998-07-10
CA2118404A1 (en) 1993-10-28
DE69315208T2 (de) 1998-06-10
EP0637377A1 (de) 1995-02-08
TW213502B (en) 1993-09-21
NZ252864A (en) 1996-05-28
MX9302273A (es) 1994-06-30
ATE160220T1 (de) 1997-11-15
BR9306268A (pt) 1998-06-30
WO1993021516A1 (en) 1993-10-28
EP0637377B1 (de) 1997-11-12
JP3170282B2 (ja) 2001-05-28
CA2118404C (en) 1999-04-27
AU677201B2 (en) 1997-04-17
SK126694A3 (en) 1995-07-11
AU4291693A (en) 1993-11-18

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