DE69314348D1 - Interferometrische messvorrichtung - Google Patents
Interferometrische messvorrichtungInfo
- Publication number
- DE69314348D1 DE69314348D1 DE69314348T DE69314348T DE69314348D1 DE 69314348 D1 DE69314348 D1 DE 69314348D1 DE 69314348 T DE69314348 T DE 69314348T DE 69314348 T DE69314348 T DE 69314348T DE 69314348 D1 DE69314348 D1 DE 69314348D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring device
- interferometric measuring
- interferometric
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9215002A FR2699269B1 (fr) | 1992-12-10 | 1992-12-10 | Dispositif de mesure interferrométrique. |
PCT/FR1993/001194 WO1994014028A1 (fr) | 1992-12-10 | 1993-12-06 | Dispositif de mesure interferometrique |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69314348D1 true DE69314348D1 (de) | 1997-11-06 |
DE69314348T2 DE69314348T2 (de) | 1998-03-19 |
Family
ID=9436533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69314348T Expired - Lifetime DE69314348T2 (de) | 1992-12-10 | 1993-12-06 | Interferometrische messvorrichtung |
Country Status (7)
Country | Link |
---|---|
US (1) | US5710629A (de) |
EP (1) | EP0673500B1 (de) |
JP (1) | JP3317970B2 (de) |
DE (1) | DE69314348T2 (de) |
ES (1) | ES2110211T3 (de) |
FR (1) | FR2699269B1 (de) |
WO (1) | WO1994014028A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6956653B1 (en) * | 2000-06-27 | 2005-10-18 | Lockheed Martin Corporation | Dual electrooptic waveguide interferometer |
EP2059791A1 (de) * | 2006-08-22 | 2009-05-20 | Bioscan Technologies, Ltd. | Photorefraktionsinterferometer |
PL2017602T3 (pl) * | 2007-07-19 | 2014-09-30 | Consejo Superior Investigacion | Interferometr i czujnik oparty na światłowodzie bimodalnym oraz sposób wykrywania |
US20140125983A1 (en) * | 2011-05-31 | 2014-05-08 | Tornado Medical Systems, Inc. | Interferometery on a planar substrate |
FR3049710B1 (fr) | 2016-03-31 | 2020-06-19 | Unity Semiconductor | Procede et systeme d'inspection par effet doppler laser de plaquettes pour la microelectronique ou l'optique |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1108903A (en) * | 1979-12-17 | 1981-09-15 | Ettore Colombini | Integrated optical wavelength demultiplexer (iowd) |
FR2613826B1 (fr) * | 1987-04-07 | 1990-10-26 | Commissariat Energie Atomique | Capteur de deplacement en optique integree |
US4850693A (en) * | 1988-05-23 | 1989-07-25 | The United States Of America As Represented By The United States Department Of Energy | Compact portable diffraction moire interferometer |
AT392537B (de) * | 1989-03-21 | 1991-04-25 | Tabarelli Werner | Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles |
JPH04188022A (ja) * | 1990-11-22 | 1992-07-06 | Olympus Optical Co Ltd | 変位検出装置 |
FR2676808B1 (fr) * | 1991-05-21 | 1993-08-13 | Commissariat Energie Atomique | Dispositif de mesure d'une caracteristique d'un objet en optique integree, par interferometrie. |
-
1992
- 1992-12-10 FR FR9215002A patent/FR2699269B1/fr not_active Expired - Fee Related
-
1993
- 1993-12-06 ES ES94901986T patent/ES2110211T3/es not_active Expired - Lifetime
- 1993-12-06 JP JP51385494A patent/JP3317970B2/ja not_active Expired - Lifetime
- 1993-12-06 US US08/432,118 patent/US5710629A/en not_active Expired - Lifetime
- 1993-12-06 EP EP94901986A patent/EP0673500B1/de not_active Expired - Lifetime
- 1993-12-06 DE DE69314348T patent/DE69314348T2/de not_active Expired - Lifetime
- 1993-12-06 WO PCT/FR1993/001194 patent/WO1994014028A1/fr active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
FR2699269B1 (fr) | 1995-01-13 |
ES2110211T3 (es) | 1998-02-01 |
JPH08504945A (ja) | 1996-05-28 |
US5710629A (en) | 1998-01-20 |
JP3317970B2 (ja) | 2002-08-26 |
EP0673500B1 (de) | 1997-10-01 |
DE69314348T2 (de) | 1998-03-19 |
WO1994014028A1 (fr) | 1994-06-23 |
FR2699269A1 (fr) | 1994-06-17 |
EP0673500A1 (de) | 1995-09-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |