DE69313339T2 - Mittel zur Positionierung einer mikroelektronischen Einrichtung sowie Anordnung zur Montage einer solchen Einrichtung - Google Patents
Mittel zur Positionierung einer mikroelektronischen Einrichtung sowie Anordnung zur Montage einer solchen EinrichtungInfo
- Publication number
- DE69313339T2 DE69313339T2 DE69313339T DE69313339T DE69313339T2 DE 69313339 T2 DE69313339 T2 DE 69313339T2 DE 69313339 T DE69313339 T DE 69313339T DE 69313339 T DE69313339 T DE 69313339T DE 69313339 T2 DE69313339 T2 DE 69313339T2
- Authority
- DE
- Germany
- Prior art keywords
- positioning
- mounting
- arrangement
- microelectronic
- microelectronic device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Mounting Components In General For Electric Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR929204976A FR2690275B1 (fr) | 1992-04-21 | 1992-04-21 | Moyens de positionnement d'un dispositif microelectronique et ensemble de montage d'un tel dispositif. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69313339D1 DE69313339D1 (de) | 1997-10-02 |
DE69313339T2 true DE69313339T2 (de) | 1998-03-19 |
Family
ID=9429162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69313339T Expired - Fee Related DE69313339T2 (de) | 1992-04-21 | 1993-04-13 | Mittel zur Positionierung einer mikroelektronischen Einrichtung sowie Anordnung zur Montage einer solchen Einrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5406454A (de) |
EP (1) | EP0566943B1 (de) |
JP (1) | JPH0690090A (de) |
CN (1) | CN1081535A (de) |
DE (1) | DE69313339T2 (de) |
FR (1) | FR2690275B1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5476819A (en) * | 1993-07-26 | 1995-12-19 | Litton Systems, Inc. | Substrate anchor for undercut silicon on insulator microstructures |
US5457390A (en) * | 1993-12-13 | 1995-10-10 | Northern Telecom Limited | Circuit board manufacture |
DE4421337A1 (de) * | 1994-06-17 | 1995-12-21 | Telefunken Microelectron | Ätzverfahren zur Herstellung von quasiplanaren, freitragenden Strukturen in Silizium |
WO1996016435A2 (en) * | 1994-11-23 | 1996-05-30 | Philips Electronics N.V. | Semiconductor device provided with a microcomponent having a fixed and a movable electrode |
US5911329A (en) * | 1996-04-30 | 1999-06-15 | Micron Technology, Inc. | Apparatus and method for facilitating circuit board processing |
US5856914A (en) * | 1996-07-29 | 1999-01-05 | National Semiconductor Corporation | Micro-electronic assembly including a flip-chip mounted micro-device and method |
US5821532A (en) * | 1997-06-16 | 1998-10-13 | Eastman Kodak Company | Imager package substrate |
EP0948059A1 (de) * | 1998-02-05 | 1999-10-06 | Asulab S.A. | Positionierungsmittel in einem mikroelektronischen Bauelement und Bildsensor mit Verwendung dieses Bauelements |
US6574858B1 (en) | 1998-02-13 | 2003-06-10 | Micron Technology, Inc. | Method of manufacturing a chip package |
JP2004003886A (ja) | 2002-05-31 | 2004-01-08 | Matsushita Electric Works Ltd | センサパッケージ |
JP2005106584A (ja) * | 2003-09-30 | 2005-04-21 | Mitsubishi Electric Corp | 加速度センサユニット |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4097894A (en) * | 1976-11-01 | 1978-06-27 | Tanner Electronics Systems Technology, Inc. | Secured scramble decoder filter |
EP0454190A3 (en) * | 1986-09-22 | 1992-01-08 | Nippondenso Co., Ltd. | Semiconductor accelerometer |
US5296692A (en) * | 1988-10-24 | 1994-03-22 | Sharp Kabushiki Kaisha | IC card adapter for use in memory card slot with or without superimposed memory card |
FR2662000A1 (fr) * | 1990-05-11 | 1991-11-15 | Philips Composants | Carte a microcircuit. |
US5276278A (en) * | 1993-03-09 | 1994-01-04 | Lin Min Huei | Housing of ceiling fan control circuit board |
-
1992
- 1992-04-21 FR FR929204976A patent/FR2690275B1/fr not_active Expired - Fee Related
-
1993
- 1993-04-13 DE DE69313339T patent/DE69313339T2/de not_active Expired - Fee Related
- 1993-04-13 EP EP93105914A patent/EP0566943B1/de not_active Expired - Lifetime
- 1993-04-19 JP JP5091183A patent/JPH0690090A/ja active Pending
- 1993-04-20 CN CN93104660A patent/CN1081535A/zh active Pending
- 1993-04-21 US US08/050,889 patent/US5406454A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0566943B1 (de) | 1997-08-27 |
DE69313339D1 (de) | 1997-10-02 |
JPH0690090A (ja) | 1994-03-29 |
CN1081535A (zh) | 1994-02-02 |
FR2690275A1 (fr) | 1993-10-22 |
US5406454A (en) | 1995-04-11 |
EP0566943A1 (de) | 1993-10-27 |
FR2690275B1 (fr) | 1994-06-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69426163D1 (de) | Verfahren und Einrichtung zur Freigabe einer Halbleiterplatte | |
DE69330476D1 (de) | Gerät zur genauen Positionierung | |
DE69736764D1 (de) | Lokales Positionierungsgerät und Verfahren dafür | |
DE69710509T2 (de) | Optoelektronische Vorrichtung und dessen Montage | |
DE69331127D1 (de) | Kompaktes elektronisches Gerät und Zusammensetzungsverfahren | |
DE69530095T2 (de) | X-y-theta positioniervorrichtung | |
DE69308361T2 (de) | Halbleiteranordnung und Verfahren zum Zusammensetzen derselben | |
DE69325343D1 (de) | Halbleiteranordnung und Herstellungsverfahren dafür | |
DE69535201D1 (de) | Positionsbestimmungsgerät und -verfahren | |
DE69517913T2 (de) | Fixiervorrichtung und Fixierverfahren | |
DE69313339T2 (de) | Mittel zur Positionierung einer mikroelektronischen Einrichtung sowie Anordnung zur Montage einer solchen Einrichtung | |
DE69723783D1 (de) | Positioniervorrichtung und bauteilplazierungsmaschine mit einer solchen positioniervorrichtung | |
DE69222673D1 (de) | Vorrichtung zur Montage optischer Geräte | |
DE69505930T2 (de) | Abschirmungsvorrichtung und Verfahren zur Montage | |
DE69224671T2 (de) | Räumliche positionierungsvorrichtung | |
FI96064B (fi) | Menetelmä jäähdytyksen aikaansaamiseksi ja jäähdytykseen soveltuva jäähdytyslaite | |
HK1023685A1 (en) | Method and device for positioning and retaining microbuilding-blocks | |
DE59407479D1 (de) | Messgerät und Verfahren zur Montage desselben | |
ATA10694A (de) | Einrichtung zur befestigung eines bauteiles | |
ATA215292A (de) | Halte- und positioniervorrichtung | |
DE59504680D1 (de) | Verfahren und Vorrichtung zur Montage einer biegsamen Platte | |
ITMI932681A0 (it) | Dispositivo a circuito integrato e metodo per produrre lo stesso | |
ATA15192A (de) | Werkzeugschliess- und verriegelungsvorrichtung | |
KR950034701U (ko) | 기판 위치결정 및 지지장치 | |
KR910020277U (ko) | 중장비 작업장치의 탈ㆍ장착장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |