DE69311840D1 - Press mold for the production of a micro-optical element, associated manufacturing process, micro-optical element and manufacturing process - Google Patents

Press mold for the production of a micro-optical element, associated manufacturing process, micro-optical element and manufacturing process

Info

Publication number
DE69311840D1
DE69311840D1 DE69311840T DE69311840T DE69311840D1 DE 69311840 D1 DE69311840 D1 DE 69311840D1 DE 69311840 T DE69311840 T DE 69311840T DE 69311840 T DE69311840 T DE 69311840T DE 69311840 D1 DE69311840 D1 DE 69311840D1
Authority
DE
Germany
Prior art keywords
micro
manufacturing process
optical element
production
press mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69311840T
Other languages
German (de)
Other versions
DE69311840T2 (en
Inventor
Makoto Umetani
Masaki Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69311840D1 publication Critical patent/DE69311840D1/en
Application granted granted Critical
Publication of DE69311840T2 publication Critical patent/DE69311840T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/082—Construction of plunger or mould for making solid articles, e.g. lenses having profiled, patterned or microstructured surfaces
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0025—Machining, e.g. grinding, polishing, diamond turning, manufacturing of mould parts
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2101/00—Use of unspecified macromolecular compounds as moulding material
    • B29K2101/12—Thermoplastic materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses
    • B29L2011/005—Fresnel lenses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/10—Die base materials
    • C03B2215/12—Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/16—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals
    • C03B2215/17—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals comprising one or more of the noble meals, i.e. Ag, Au, platinum group metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
    • C03B2215/31—Two or more distinct intermediate layers or zones
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
    • C03B2215/32—Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/40—Product characteristics
    • C03B2215/41—Profiled surfaces
    • C03B2215/412—Profiled surfaces fine structured, e.g. fresnel lenses, prismatic reflectors, other sharp-edged surface profiles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/40—Product characteristics
    • C03B2215/41—Profiled surfaces
    • C03B2215/414—Arrays of products, e.g. lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12102—Lens

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
DE69311840T 1992-04-21 1993-04-20 Press mold for the production of a micro-optical element, associated manufacturing process, micro-optical element and manufacturing process Expired - Fee Related DE69311840T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10083592A JP3147481B2 (en) 1992-04-21 1992-04-21 Mold for forming glass diffraction grating, method for manufacturing the same, and method for manufacturing glass diffraction grating

Publications (2)

Publication Number Publication Date
DE69311840D1 true DE69311840D1 (en) 1997-08-07
DE69311840T2 DE69311840T2 (en) 1997-11-27

Family

ID=14284377

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311840T Expired - Fee Related DE69311840T2 (en) 1992-04-21 1993-04-20 Press mold for the production of a micro-optical element, associated manufacturing process, micro-optical element and manufacturing process

Country Status (4)

Country Link
US (1) US5436764A (en)
EP (1) EP0567896B1 (en)
JP (1) JP3147481B2 (en)
DE (1) DE69311840T2 (en)

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RU2083733C1 (en) * 1993-10-20 1997-07-10 Совместное предприятие "Амкрис-Эйч, Лтд." Method of manufacturing large-size polycrystalline plates from optical and scintillation materials
DE69529334T2 (en) * 1994-09-09 2003-10-16 Koninkl Philips Electronics Nv METHOD FOR PRODUCING A MOLD FOR USE IN MANUFACTURING AN OPTICAL ELEMENT CONTAINING OPTICAL SUB-ELEMENTS ARRANGED IN A PATTERN, AND DEVICE FOR CARRYING OUT THE METHOD
US5770120A (en) * 1994-12-09 1998-06-23 Olympus Optical Co., Ltd. Method of manufacturing die and optical element performed by using the die
US5602947A (en) * 1995-01-05 1997-02-11 Ceram Optee Industries, Inc. Anti-reflective mid-infrared optical fiber and micro optical components
US5636057A (en) * 1995-02-10 1997-06-03 Ecolux Inc. Prismatic toroidal lens and traffic signal light using this lens
US5997709A (en) * 1996-05-28 1999-12-07 Minnesota Mining And Manufacturing Co. Method of providing diffuse risers on a fresnel lens die
JP2920164B2 (en) * 1997-01-17 1999-07-19 サイマー，インコーポレーテッド Reflective overcoat for replica gratings
WO1998033222A1 (en) * 1997-01-27 1998-07-30 Corning Incorporated Rigid battery separator with compliant layer
US5958469A (en) * 1997-05-14 1999-09-28 Eastman Kodak Company Method for fabricating tools for molding diffractive surfaces on optical lenses
US6162495A (en) 1997-09-29 2000-12-19 Cymer, Inc. Protective overcoat for replicated diffraction gratings
US6330261B1 (en) 1997-07-18 2001-12-11 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
JPH11236229A (en) 1997-12-16 1999-08-31 Ngk Insulators Ltd Mold for press forming of glass element
US6570505B1 (en) 1997-12-30 2003-05-27 Gelcore Llc LED lamp with a fault-indicating impedance-changing circuit
US20020027301A1 (en) 1998-06-11 2002-03-07 Hideo Kato Method for manufacture of optical element
US6352759B2 (en) * 1998-08-20 2002-03-05 Physical Optics Corporation Non-lambertian glass diffuser and method of making
WO2000046622A1 (en) 1999-02-05 2000-08-10 Corning Incorporated Optical fiber component with shaped optical element and method of making same
JP3751778B2 (en) * 1999-04-26 2006-03-01 日本板硝子株式会社 Method for producing sol-gel molded product
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DE19956654B4 (en) * 1999-11-25 2005-04-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Process for structuring surfaces of micromechanical and / or microoptical components and / or functional elements made of vitreous materials
US20020118465A1 (en) * 2001-02-28 2002-08-29 Konica Corporation Molding die for optical element, optical element and master die
WO2002070739A2 (en) * 2001-03-08 2002-09-12 Boehringer Ingelheim (Canada) Ltd Assay for identifying inhibitors of the rna dependent rna polymerase (ns5b) of hcv
US20030115907A1 (en) * 2001-09-07 2003-06-26 Patton Edward K. Multiple lens molding system and method
KR100446914B1 (en) * 2001-11-14 2004-09-01 주식회사 엘지에스 Method and device of producing DOE Lens
DE10207952A1 (en) * 2002-02-25 2003-09-04 Max Planck Gesellschaft Process for producing porous material with a periodic pore arrangement
US6899838B2 (en) * 2002-07-12 2005-05-31 Becton, Dickinson And Company Method of forming a mold and molding a micro-device
CN1688516A (en) * 2002-10-04 2005-10-26 康宁股份有限公司 Lens array, method for fabricating the lens array and photosensitive glass plate
KR20040061658A (en) * 2002-12-31 2004-07-07 삼성전자주식회사 Hybrid achromatic optical lens and manufacturing method thereof
US20040183220A1 (en) * 2003-03-18 2004-09-23 Avinash Dalmia Ultra thin layer coating using self-assembled molecules as a separating layer for diffraction grating application
JP4007269B2 (en) * 2003-07-29 2007-11-14 オムロン株式会社 Biomolecule shape transfer method, chip substrate manufacturing method, and biochip manufacturing method
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JP4576961B2 (en) * 2004-09-28 2010-11-10 株式会社島津製作所 Method for manufacturing replica diffraction grating
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JP5266059B2 (en) * 2005-11-18 2013-08-21 ナノコンプ オイ リミテッド Manufacturing method of diffraction grating
JP2009529400A (en) * 2006-03-10 2009-08-20 アルザ コーポレイション Application of microprojection array with high barrier holder
US8141384B2 (en) * 2006-05-03 2012-03-27 3M Innovative Properties Company Methods of making LED extractor arrays
KR100782468B1 (en) * 2006-05-22 2007-12-05 삼성에스디아이 주식회사 Laser irradiation device and Fabrication method of organic light emitting display device using the same
TWI481064B (en) * 2007-02-13 2015-04-11 3M Innovative Properties Co Led devices having lenses and methods of making same
US9944031B2 (en) * 2007-02-13 2018-04-17 3M Innovative Properties Company Molded optical articles and methods of making same
US8958070B2 (en) * 2007-05-29 2015-02-17 OptoTrace (SuZhou) Technologies, Inc. Multi-layer variable micro structure for sensing substance
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JP6188743B2 (en) * 2014-06-19 2017-08-30 キヤノン株式会社 Optical element having a plurality of optical functional surfaces, spectroscopic device, and manufacturing method thereof
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Also Published As

Publication number Publication date
JP3147481B2 (en) 2001-03-19
JPH05297210A (en) 1993-11-12
EP0567896B1 (en) 1997-07-02
EP0567896A1 (en) 1993-11-03
DE69311840T2 (en) 1997-11-27
US5436764A (en) 1995-07-25

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee