Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM Japan KK
Original Assignee
ASM Japan KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM Japan KKfiledCriticalASM Japan KK
Priority claimed from PCT/JP1993/000146external-prioritypatent/WO1994018695A1/ja
Publication of DE69307136D1publicationCriticalpatent/DE69307136D1/de
Application grantedgrantedCritical
Publication of DE69307136T2publicationCriticalpatent/DE69307136T2/de