DE69307136D1 - Anordnung zur thermischen behandlung. - Google Patents

Anordnung zur thermischen behandlung.

Info

Publication number
DE69307136D1
DE69307136D1 DE69307136T DE69307136T DE69307136D1 DE 69307136 D1 DE69307136 D1 DE 69307136D1 DE 69307136 T DE69307136 T DE 69307136T DE 69307136 T DE69307136 T DE 69307136T DE 69307136 D1 DE69307136 D1 DE 69307136D1
Authority
DE
Germany
Prior art keywords
arrangement
thermal treatment
thermal
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69307136T
Other languages
English (en)
Other versions
DE69307136T2 (de
Inventor
Mitsusuke Kyogoku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM Japan KK
Original Assignee
ASM Japan KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM Japan KK filed Critical ASM Japan KK
Priority claimed from PCT/JP1993/000146 external-priority patent/WO1994018695A1/ja
Publication of DE69307136D1 publication Critical patent/DE69307136D1/de
Application granted granted Critical
Publication of DE69307136T2 publication Critical patent/DE69307136T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

DE69307136T 1993-02-05 1993-02-05 Anordnung zur thermischen behandlung. Revoked DE69307136T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1993/000146 WO1994018695A1 (en) 1993-02-05 1993-02-05 Apparatus for heat treatment

Publications (2)

Publication Number Publication Date
DE69307136D1 true DE69307136D1 (de) 1997-02-13
DE69307136T2 DE69307136T2 (de) 1997-06-26

Family

ID=1245111

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69307136T Revoked DE69307136T2 (de) 1993-02-05 1993-02-05 Anordnung zur thermischen behandlung.

Country Status (1)

Country Link
DE (1) DE69307136T2 (de)

Also Published As

Publication number Publication date
DE69307136T2 (de) 1997-06-26

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee
8331 Complete revocation