DE69306132D1 - Herstellungsverfahren für Linsen, optische Systeme und Fokussierspiegel durch Mikrobearbeitung - Google Patents

Herstellungsverfahren für Linsen, optische Systeme und Fokussierspiegel durch Mikrobearbeitung

Info

Publication number
DE69306132D1
DE69306132D1 DE69306132T DE69306132T DE69306132D1 DE 69306132 D1 DE69306132 D1 DE 69306132D1 DE 69306132 T DE69306132 T DE 69306132T DE 69306132 T DE69306132 T DE 69306132T DE 69306132 D1 DE69306132 D1 DE 69306132D1
Authority
DE
Germany
Prior art keywords
micromachining
lenses
manufacturing process
optical systems
focusing mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69306132T
Other languages
English (en)
Other versions
DE69306132T2 (de
Inventor
Igor I Bol
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE69306132D1 publication Critical patent/DE69306132D1/de
Application granted granted Critical
Publication of DE69306132T2 publication Critical patent/DE69306132T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/911—Differential oxidation and etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
DE69306132T 1992-01-06 1993-01-05 Herstellungsverfahren für Linsen, optische Systeme und Fokussierspiegel durch Mikrobearbeitung Expired - Lifetime DE69306132T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/817,163 US5248379A (en) 1992-01-06 1992-01-06 Method to manufacture lenses, optical systems and focusing mirrors by micromachining

Publications (2)

Publication Number Publication Date
DE69306132D1 true DE69306132D1 (de) 1997-01-09
DE69306132T2 DE69306132T2 (de) 1997-06-12

Family

ID=25222473

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69306132T Expired - Lifetime DE69306132T2 (de) 1992-01-06 1993-01-05 Herstellungsverfahren für Linsen, optische Systeme und Fokussierspiegel durch Mikrobearbeitung

Country Status (4)

Country Link
US (1) US5248379A (de)
EP (1) EP0552862B1 (de)
JP (1) JP3280441B2 (de)
DE (1) DE69306132T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6071426A (en) * 1997-12-08 2000-06-06 The Regents Of The University Of California Micro benchtop optics by bulk silicon micromachining
US6115520A (en) * 1998-03-05 2000-09-05 Lucent Technologies Inc. Compact mach-zehnder interferometer and wavelength reference employing same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4400866A (en) * 1980-02-14 1983-08-30 Xerox Corporation Application of grown oxide bumper insulators to a high-speed VLSI SASMESFET
US4338616A (en) * 1980-02-19 1982-07-06 Xerox Corporation Self-aligned Schottky metal semi-conductor field effect transistor with buried source and drain
US5149397A (en) * 1991-07-03 1992-09-22 Xerox Corporation Fabrication methods for micromechanical elements

Also Published As

Publication number Publication date
JP3280441B2 (ja) 2002-05-13
EP0552862A1 (de) 1993-07-28
DE69306132T2 (de) 1997-06-12
EP0552862B1 (de) 1996-11-27
JPH0643308A (ja) 1994-02-18
US5248379A (en) 1993-09-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
R071 Expiry of right

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